Publications

Results 26–28 of 28

wafer level packaging of aluminum nitride rf mems filters

Henry, Michael D.; Young, Travis R.; Hollowell, Andrew E.; Eichenfield, Matthew S.; Olsson, Roy H.

Abstract not provided.

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TYPE Conference Poster YEAR 2015

OSTI

Advanced PiezoMEMS: Advanced PiezoMEMs:Wafer Level Packaged AlN RF Filters

Olsson, Roy H.; Bauer, Todd B.; Clews, Peggy J.; Young, Travis R.; Ford, Christine L.

Abstract not provided.

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TYPE Conference YEAR 2013

OSTI

Hermetic Wafer-Level Packaging for RF MEMs: Effects on Resonator Performance

Olsson, Roy H.; Greth, Karl D.; Nordquist, Christopher N.; Shul, Randy J.; Wiwi, Michael W.; Plut, Thomas A.; Young, Travis R.

Abstract not provided.

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TYPE Conference YEAR 2012

OSTI

Results 26–28 of 28

Results 26–28 of 28