Publications

Abstract not provided.

Abstract not provided.

Abstract not provided.

Abstract not provided.

This paper presents continuum simulations of viscous polymer flow during nanoimprint lithography (NIL) for embossing tools having irregular spacings and sizes. Simulations varied non-uniform embossing tool geometry to distinguish geometric quantities governing cavity filling order, polymer peak deformation, and global mold filling times. A characteristic NIL velocity predicts cavity filling order. In general, small cavities fill more quickly than large cavities, while cavity spacing modulates polymer deformation mode. Individual cavity size, not total filling volume, dominates replication time, with large differences in individual cavity size resulting in non-uniform, squeeze flow filling. High density features can be modeled as a solid indenter in squeeze flow to accurately predict polymer flow and allow for optimization of wafer-scale replication. The present simulations make it possible to design imprint templates capable of distributing pressure evenly across the mold surface and facilitating symmetric polymer flow over large areas to prevent mold deformation and non-uniform residual layer thickness.

Abstract not provided.

Abstract not provided.

This paper presents continuum simulations of polymer flow during nanoimprint lithography (NIL). The simulations capture the underlying physics of polymer flow from the nanometer to millimeter length scale and examine geometry and thermophysical process quantities affecting cavity filling. Variations in embossing tool geometry and polymer film thickness during viscous flow distinguish different flow driving mechanisms. Three parameters can predict polymer deformation mode: cavity width to polymer thickness ratio, polymer supply ratio, and Capillary number. The ratio of cavity width to initial polymer film thickness determines vertically or laterally dominant deformation. The ratio of indenter width to residual film thickness measures polymer supply beneath the indenter which determines Stokes or squeeze flow. The local geometry ratios can predict a fill time based on laminar flow between plates, Stokes flow, or squeeze flow. Characteristic NIL capillary number based on geometry-dependent fill time distinguishes between capillary or viscous driven flows. The three parameters predict filling modes observed in published studies of NIL deformation over nanometer to millimeter length scales. The work seeks to establish process design rules for NIL and to provide tools for the rational design of NIL master templates, resist polymers, and process parameters.

This SAND report describes progress made during a Sandia National Laboratories sponsored graduate fellowship. The fellowship was funded through an LDRD proposal. The goal of this project is development and characterization of mixing strategies for polymeric microfluidic devices. The mixing strategies under investigation include electroosmotic flow focusing, hydrodynamic focusing, physical constrictions and porous polymer monoliths. For electroosmotic flow focusing, simulations were performed to determine the effect of electroosmotic flow in a microchannel with heterogeneous surface potential. The heterogeneous surface potential caused recirculations to form within the microchannel. These recirculations could then be used to restrict two mixing streams and reduce the characteristic diffusion length. Maximum mixing occurred when the ratio of the mixing region surface potential to the average channel surface potential was made large in magnitude and negative in sign, and when the ratio of the characteristic convection time to the characteristic diffusion time was minimized. Based on these results, experiments were performed to evaluate the manipulation of surface potential using living-radical photopolymerization. The material chosen to manipulate typically exhibits a negative surface potential. Using living-radical surface grafting, a positive surface potential was produced using 2-(Dimethylamino)ethyl methacrylate and a neutral surface was produced using a poly(ethylene glycol) surface graft. Simulations investigating hydrodynamic focusing were also performed. For this technique, mixing is enhanced by using a tertiary fluid stream to constrict the two mixing streams and reduce the characteristic diffusion length. Maximum mixing occurred when the ratio of the tertiary flow stream flow-rate to the mixing streams flow-rate was maximized. Also, like the electroosmotic focusing mixer, mixing was also maximized when the ratio of the characteristic convection time to the characteristic diffusion time was minimized. Physical constrictions were investigated through simulations. The results show that the maximum mixing occurs when the height of the mixing region is minimized. Finally, experiments were performed to determine the effectiveness of using porous polymer monoliths to enhance mixing. The porous polymer monoliths were constructed using a monomer/salt paste. Two salt crystal size ranges were used; 75 to 106 microns and 53 to 180 microns. Mixing in the porous polymer monoliths fabricated with the 75 to 106 micron salt crystal size range was six times higher than a channel without a monolith. Mixing in the monolith fabricated with the 53 to 180 micron salt crystal size range was nine times higher.

Abstract not provided.

This article presents continuum simulations of viscous polymer flow during nanoimprint lithography (NIL) for embossing tools having irregular spacings and sizes. Simulations vary nonuniform embossing tool geometry to distinguish geometric quantities governing cavity filling order, polymer peak deformation, and global mold filling times. A characteristic NIL velocity predicts cavity filling order. In general, small cavities fill more quickly than large cavities, while cavity spacing modulates polymer deformation mode. Individual cavity size, not total filling volume, dominates replication time, with large differences in individual cavity size resulting in nonuniform, squeeze flow filling. High density features can be modeled as a solid indenter in squeeze flow to accurately predict polymer flow and allow for optimization of wafer-scale replication. The present simulations make it possible to design imprint templates capable of distributing pressure evenly across the mold surface and facilitating symmetric polymer flow over large areas to prevent mold deformation and nonuniform residual layer thickness.

Abstract not provided.

This paper presents continuum simulations of polymer flow during nanoimprint lithography (NIL). The simulations capture the underlying physics of polymer flow from the nanometer to millimeter length scale and examine geometry and thermophysical process quantities affecting cavity filling. Variations in embossing tool geometry and polymer film thickness during viscous flow distinguish different flow driving mechanisms. Three parameters can predict polymer deformation mode: cavity width to polymer thickness ratio, polymer supply ratio and capillary number. The ratio of cavity width to initial polymer film thickness determines vertically or laterally dominant deformation. The ratio of indenter width to residual film thickness measures polymer supply beneath the indenter which determines Stokes or squeeze flow. The local geometry ratios can predict a fill time based on laminar flow between plates, Stokes flow, or squeeze flow. A characteristic NIL capillary number based on geometry-dependent fill time distinguishes between capillary- or viscous-driven flows. The three parameters predict filling modes observed in published studies of NIL deformation over nanometer to millimeter length scales. The work seeks to establish process design rules for NIL and to provide tools for the rational design of NIL master templates, resist polymers and process parameters.

Abstract not provided.

This report summarizes research advances pursued with award funding issued by the DOE to Drexel University through the Presidential Early Career Award (PECASE) program. Professor Rich Cairncross was the recipient of this award in 1997. With it he pursued two related research topics under Sandia's guidance that address the outstanding issue of fluid-structural interactions of liquids with deformable solid materials, focusing mainly on the ubiquitous dynamic wetting problem. The project focus in the first four years was aimed at deriving a predictive numerical modeling approach for the motion of the dynamic contact line on a deformable substrate. A formulation of physical model equations was derived in the context of the Galerkin finite element method in an arbitrary Lagrangian/Eulerian (ALE) frame of reference. The formulation was successfully integrated in Sandia's Goma finite element code and tested on several technologically important thin-film coating problems. The model equations, the finite-element implementation, and results from several applications are given in this report. In the last year of the five-year project the same physical concepts were extended towards the problem of capillary imbibition in deformable porous media. A synopsis of this preliminary modeling and experimental effort is also discussed.

Solidification and blood flow seemingly have little in common, but each involves a fluid in contact with a deformable solid. In these systems, the solid-fluid interface moves as the solid advects and deforms, often traversing the entire domain of interest. Currently, these problems cannot be simulated without innumerable expensive remeshing steps, mesh manipulations or decoupling the solid and fluid motion. Despite the wealth of progress recently made in mechanics modeling, this glaring inadequacy persists. We propose a new technique that tracks the interface implicitly and circumvents the need for remeshing and remapping the solution onto the new mesh. The solid-fluid boundary is tracked with a level set algorithm that changes the equation type dynamically depending on the phases present. This novel approach to coupled mechanics problems promises to give accurate stresses, displacements and velocities in both phases, simultaneously.

Abstract not provided.

Encapsulation is a common process used in manufacturing most non-nuclear components including: firing sets, neutron generators, trajectory sensing signal generators (TSSGs), arming, fusing and firing devices (AF and Fs), radars, programmers, connectors, and batteries. Encapsulation is used to contain high voltage, to mitigate stress and vibration and to protect against moisture. The purpose of the ASCI Encapsulation project is to develop a simulation capability that will allow us to aid in the encapsulation design process, especially for neutron generators. The introduction of an encapsulant poses many problems because of the need to balance ease of processing and properties necessary to achieve the design benefits such as tailored encapsulant properties, optimized cure schedule and reduced failure rates. Encapsulants can fail through fracture or delamination as a result of cure shrinkage, thermally induced residual stresses, voids or incomplete component embedding and particle gradients. Manufacturing design requirements include (1) maintaining uniform composition of particles in order to maintain the desired thermal coefficient of expansion (CTE) and density, (2) mitigating void formation during mold fill, (3) mitigating cure and thermally induced stresses during cure and cool down, and (4) eliminating delamination and fracture due to cure shrinkage/thermal strains. The first two require modeling of the fluid phase, and it is proposed to use the finite element code GOMA to accomplish this. The latter two require modeling of the solid state; however, ideally the effects of particle distribution would be included in the calculations, and thus initial conditions would be set from GOMA predictions. These models, once they are verified and validated, will be transitioned into the SIERRA framework and the ARIA code. This will facilitate exchange of data with the solid mechanics calculations in SIERRA/ADAGIO.

Recently so-called soft lithography approaches [Angew. Chem. Int. Ed. 37 (1998) 550] have been combined with surfactant [Adv. Mater. 9 (1997) 811. Nature 390 (1997) 674] and particulate [Science 282 (1998) 2244] templating procedures to create oxides with multiple levels of structural order. But the materials thus formed have been limited primarily to oxides with no specific functionality, and the associated processing times have ranged from hours to days. Using self-assembling inks we have combined evaporation-induced (silica/surfactant) self-assembly [Adv. Mater. 11 (1999) 579] with rapid prototyping techniques like micro-pen lithography [Science 283 (1999) 661. Mat. Res. Soc. Symp. Proc. 542 (1999) 159], ink-jet printing [Adv. Mater. 11 (1999) 734, Mat. Sci. Eng. C5 (1998) 289], and dip coating on micro-contact printed substrates to form hierarchically organized structures in seconds. By co-condensation of tetrafunctional silanes (Si(OR)4) with tri-functional organosilanes ((RO)3SiR') [Chem. Commun. (1999) 1367. Chem. Commun. (1997) 1769, J. Am. Chem. Soc. 119 (1997) 4090] or bridged silsesquioxanes (RO)3Si-R'-Si(OR)3) or by inclusion of organic additives, we have selectively derivatized the silica framework with functional R' ligands or molecules. The rapid-prototyping procedures we describe are simple, employ readily available equipment, and provide a link between computer-aided design and self-assembled functional nanostructures. We expect that the ability to form arbitrary functional designs on arbitrary surfaces will be of practical importance for directly writing sensor arrays and fluidic or photonic systems. © 2001 Elsevier Science B.V. All rights reserved.

Living systems exhibit form and function on multiple length scales and at multiple locations. In order to mimic such natural structures, it is necessary to develop efficient strategies for assembling hierarchical materials. Conventional photolithography, although ubiquitous in the fabrication of microelectronics and microelectromechanical systems, is impractical for defining feature sizes below 0.1 micrometres and poorly suited to pattern chemical functionality. Recently, so-called 'soft' lithographic approaches have been combined with surfactant and particulate templating procedures to create materials with multiple levels of structural order. But the materials thus formed have been limited primarily to oxides with no specific functionality, and the associated processing times have ranged from hours to days. Here, using a self-assembling 'ink', we combine silica-surfactant self-assembly with three rapid printing procedures-pen lithography, ink-jet printing, and dip-coating of patterned self-assembled monolayers-to form functional, hierarchically organized structures in seconds. The rapid-prototyping procedures we describe are simple, employ readily available equipment, and provide a link between computer-aided design and self-assembled nanostructures. We expect that the ability to form arbitrary functional designs on arbitrary surfaces will be of practical importance for directly writing sensor arrays and fluidic or photonic systems.