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Henry, Michael D. ; Wolfley, Steven L. ; Miner, John M. ; Douglas, Erica A. ; Young, Travis R. ; Pearce, Charles J. ; Monson, Todd M. ; Brunke, Lyle B. ; Lewis, Rupert ; Missert, Nancy A.
Abstract not provided.
Henry, Michael D. ; Wolfley, Steven L. ; Miner, John M. ; Douglas, Erica A. ; Young, Travis R. ; Lewis, Rupert ; Brunke, Lyle B. ; Pearce, Charles J. ; Monson, Todd M. ; Missert, Nancy A.
Abstract not provided.
Smith, Sean S. ; Ihlefeld, Jon I. ; Kitahara, Andrew R.; Henry, Michael D. ; Brumbach, Michael T. ; Rodriguez, Mark A.
Abstract not provided.
Applied Physics Letters
Burckel, David B. ; Finnegan, Patrick S. ; Henry, Michael D. ; Resnick, Paul J. ; Jarecki, Robert L.
A method for patterning on vertical silicon surfaces in high aspect ratio silicon topography is presented. A Faraday cage is used to direct energetic reactive ions obliquely through a patterned suspended membrane positioned over the topography. The technique is capable of forming high-fidelity pattern (100 nm) features, adding an additional fabrication capability to standard top-down fabrication approaches.
Nordquist, Christopher N. ; Henry, Michael D. ; Nguyen, Janet N.; Clews, Peggy J. ; Lepkowski, Stefan M. ; Grine, Alejandro J. ; Dyck, Christopher D. ; Olsson, Roy H.
Abstract not provided.
Henry, Michael D. ; Olsson, Roy H. ; Eichenfield, Matthew S. ; Hollowell, Andrew E. ; Young, Travis R.
Abstract not provided.
Henry, Michael D. ; Young, Travis R. ; Hollowell, Andrew E. ; Eichenfield, Matthew S. ; Olsson, Roy H.
Abstract not provided.
Reeves, Robert V. ; Henry, Michael D. ; Goeke, Ronald S. ; Adams, David P.
Abstract not provided.
Frank, Ian W. ; Tomes, Matthew R. ; Burckel, David B. ; Henry, Michael D. ; Bielejec, Edward S.
Abstract not provided.
Jarecki, Robert L. ; Resnick, Paul J. ; Henry, Michael D. ; Finnegan, Patrick S.
Abstract not provided.
Wojciechowski, Kenneth W. ; Nordquist, Christopher N. ; Griffin, Benjamin G. ; Henry, Michael D. ; Olsson, Roy H.
Abstract not provided.
Derzon, Mark S. ; Wiemann, Dora K. ; Renzi, Ronald F. ; Bogart, Gregory R. ; Claus, Liam D. ; Galambos, Paul ; Henry, Michael D. ; Lake, Patrick W. ; Robertson, Gideon R.
Abstract not provided.
Derzon, Mark S. ; Robertson, Gideon R. ; Bogart, Gregory R. ; Claus, Liam D. ; Wiemann, Dora K. ; Galambos, Paul ; Henry, Michael D. ; Kay, Randolph R. ; Lake, Patrick W. ; Renzi, Ronald F.
Abstract not provided.
Proposed for publication in IEEE Transactions on Components and Packing Technologies.
Henry, Michael D. ; Ahlers, Catalina A.
Abstract not provided.
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