Quantitative studies of material properties and interfaces using the atomic force microscope (AFM) have important applications in engineering, biotechnology and chemistry. Emerging studies require an estimate of the stiffness of the probe so that the forces exerted on a sample can be determined from the measured displacements. Numerous methods for determining the spring constant of AFM cantilevers have been proposed, yet none accounts for the effect of the mass of the probe tip on the calibration procedure. This work demonstrates that the probe tip does have a significant effect on the dynamic response of an AFM cantilever by experimentally measuring the first few modes of a commercial AFM probe and comparing them with those of a theoretical model for a cantilever probe that does not have a tip. The mass and inertia of an AFM probe tip are estimated from scanning electron microscope images and a simple model for the probe is derived and tuned to match the first few modes of the actual probe. Analysis suggests that both the method of Sader and the thermal tune method of Hutter and Bechhoefer give erroneous predictions of the area density or the effective mass of the probe. However, both methods do accurately predict the static stiffness of the AFM probe due to the fact that the mass terms cancel so long as the mode shape of the AFM probe does not deviate from the theoretical model. The calibration errors that would be induced due to differences between mode shapes measured in this study and the theoretical ones are estimated.
One powerful method for measuring the motion of microelectromechanical systems (MEMS) relies on a Laser Doppler Vibrometer (LDV) focused through an optical microscope. Recent data taken under a very simple and common condition demonstrate that the velocity signal produced by the LDV with an optical microscope may be different from the velocity signal produced by the LDV without a microscope. This is especially important if one wishes to estimate acceleration by differentiating velocity. In this study, the time derivatives of LDV signals are compared against the signal from an accelerometer when the LDV is focused through an optical microscope and without the microscope system. The signal from the LDV without the microscope is almost identical to the accelerometer signal. In contrast, the signal from the LDV with the microscope exhibits a nonlinear relationship with the accelerometer signal. Both the LDV and the accelerometer were measuring a sinusoidal velocity generated by an electromechanical shaker. The Fourier transform of the acceleration from the LDV with the microscope shows a multitude of high harmonics of the excitation frequency, which have much higher amplitudes than the harmonics present in the accelerometer signal. Without the microscope, the LDV gives a much less distorted sinusoidal signal, even after time differentiation. The distortion of the signal from the LDV is periodic, with the same period as the sinusoidal drive signal. The largest distortion occurs near points of maximum negative acceleration, corresponding to the positive displacement peak of the sinusoidal oscillation. Because the measured oscillation is out of plane, pseudo-vibrations caused by speckle noise do not explain the distortion. Instead, the distortion appears to be caused by the optics of the microscope.
When a micro cantilever beam is excited by base shaking, electrostatic force makes the tip displacement response nonlinear with respect to the base acceleration input. This paper derives a single-degree-of-freedom model for the deflection in a micro cantilever due to electrostatic voltage for this excitation. The tip deflection due to electrostatic force is derived first as part of the total tip deflection, and then in terms of an equivalent base excitation. The relationship between electrostatic deflection and equivalent base excitation is determined numerically, but can be represented accurately by a simple curve-fit function.
Forces generated by a static magnetic field interacting with eddy currents can provide a novel method of vibration damping. This paper discusses an experiment performed to validate modeling [3] for a case where a static magnetic field penetrates a thin sheet of conducting, non-magnetic material. When the thin sheet experiences motion, the penetrating magnetic field generates eddy currents within the sheet. These eddy currents then interact with the static field, creating magnetic forces that act on the sheet, providing damping to the sheet motion. In the presented experiment, the sheet was supported by cantilever springs attached to a frame, then excited with a vibratory shaker. The recorded motions of the sheet and the frame were used to characterize the effect of the eddy current damping.
This report summarizes a survey of several new methods for obtaining mechanical and rheological properties of single biological cells, in particular: (1) The use of laser Doppler vibrometry (LDV) to measure the natural vibrations of certain cells. (2) The development of a novel micro-electro-mechanical system (MEMS) for obtaining high-resolution force-displacement curves. (3) The use of the atomic force microscope (AFM) for cell imaging. (4) The adaptation of a novel squeezing-flow technique to micro-scale measurement. The LDV technique was used to investigate the recent finding reported by others that the membranes of certain biological cells vibrate naturally, and that the vibration can be detected clearly with recent instrumentation. The LDV has been reported to detect motions of certain biological cells indirectly through the motion of a probe. In this project, trials on Saccharomyces cerevisiae tested and rejected the hypothesis that the LDV could measure vibrations of the cell membranes directly. The MEMS investigated in the second technique is a polysilicon surface-micromachined force sensor that is able to measure forces to a few pN in both air and water. The simple device consists of compliant springs with force constants as low as 0.3 milliN/m and Moire patterns for nanometer-scale optical displacement measurement. Fields from an electromagnet created forces on magnetic micro beads glued to the force sensors. These forces were measured and agreed well with finite element prediction. It was demonstrated that the force sensor was fully functional when immersed in aqueous buffer. These results show the force sensors can be useful for calibrating magnetic forces on magnetic beads and also for direct measurement of biophysical forces on-chip. The use of atomic force microscopy (AFM) for profiling the geometry of red blood cells was the third technique investigated here. An important finding was that the method commonly used for attaching the cells to a substrate actually modified the mechanical properties of the cell membrane. Thus, the use of the method for measuring the mechanical properties of the cell may not be completely appropriate without significant modifications. The latest of the studies discussed in this report is intended to overcome the drawback of the AFM as a means of measuring mechanical and rheological properties. The squeezing-flow AFM technique utilizes two parallel plates, one stationary and the other attached to an AFM probe. Instead of using static force-displacement curves, the technique takes advantage of frequency response functions from force to velocity. The technique appears to be quite promising for obtaining dynamic properties. More research is required to develop this technique.
Experimental modal analysis (EMA) was carried out on a micro-machined acceleration switch to characterize the motions of the device as fabricated and to compare this with analytical results for the nominal design. Finite element analysis (FEA) of the nominal design was used for this comparison. The acceleration switch was a single-crystal silicon disc supported by four fork-shaped springs. We shook the base of the die with step sine type excitation. A Laser Doppler Velocimeter (LDV) in conjunction with a microscope was used to measure the velocities of the die at several points. The desired first three modes of the structure were identified. The fundamental natural frequency that we measured in this experiment gives an estimate of the actuation g-level for the specified stroke. The fundamental resonance and actuation g-level results from the EMA and the FEA showed large variations. The discrepancy prompted thorough dimensional measurement of the acceleration switch, which revealed discrepancies between the nominal design and tested component.