Optical coatings with the highest laser damage thresholds rely on clean conditions in the vacuum chamber during the coating deposition process. A low-base pressure in the coating chamber, as well as the ability of the vacuum system to maintain the required pressure during deposition, are important aspects of limiting the amount of defects in an optical coating that could induce laser damage. Our large optics coating chamber at Sandia National Laboratories normally relies on three cryo pumps to maintain low pressures for e-beam coating processes. However, on occasion, one or more of the cryo pumps have been out of commission. In light of this circumstance, we explored how deposition under compromised vacuum conditions resulting from the use of only one or two cryo pumps affects the laser-induced damage thresholds of optical coatings. The coatings of this study consist of HfO2 and SiO2 layer materials and include antireflection coatings for 527 nm at normal incidence and high-reflection coatings for 527 nm at 45-deg angle of incidence in P-polarization.
When an optical coating is damaged, deposited incorrectly, or is otherwise unsuitable, the conventional method to restore the optic often entails repolishing the optic surface, which can incur a large cost and long lead time. We propose three alternative options to repolishing, including (i) burying the unsuitable coating under another optical coating, (ii) using ion milling to etch the unsuitable coating completely from the optic surface and then recoating the optic, and (iii) using ion milling to etch through a number of unsuitable layers, leaving the rest of the coating intact, and then recoating the layers that were etched. Repairs were made on test optics with dielectric mirror coatings according to the above three options. The mirror coatings to be repaired were quarter wave stacks of HfO2 and SiO2 layers for high reflection at 1054 nm at 45 deg incidence in P-polarization. One of the coating layers was purposely deposited incorrectly as Hf metal instead of HfO2 to evaluate the ability of each repair method to restore the coating's high laser-induced damage threshold (LIDT) of 64.0 J/cm2. The repaired coating with the highest resistance to laser-induced damage was achieved using repair method (ii) with an LIDT of 49.0 to 61.0 J/cm2.
Optical coatings deposited using electron beam evaporation are subject to aging effects that change the spectral characteristics of the optical coating. The aim of this study was to determine whether aging effects can also negatively impact the laser damage resistance of an optical coating. Maintaining high resistance to laser damage is particularly important for the performance of high fluence laser systems. In 2013, we deposited different high reflection coatings for 1054 nm containing HfO2/TiO2/SiO2 layers. For this study, we re-measured the laser damage thresholds of these coatings at 3.5 ns to determine if aging effects cause the laser damage threshold to decline, and to compare whether HfO2 or TiO2 is superior in terms of long-term laser damage resistance.
AEgis requires large area partial mirror optics consisting of partially reflecting optical coatings on large dimension substrates for high energy laser (HEL) applications. The partial mirrors should transmit nearly the same small fraction of HEL radiation incident from a wide range of angles of incidence (AOIs), and the laser-induced damage threshold (LIDT) of the coatings should be high enough for them to be able to withstand direct exposure to near infrared CW HEL radiation at multi-kilowatt/cm2 power levels. The transmitted fraction of incident HEL radiation should reach an array of detectors at power levels high enough for reliable detection but low enough to not damage the detectors. The reflected fraction of incident HEL radiation should scatter into a divergent pattern so as to be eye safe at a distance of ~ 200 m from the mirror in the case of 100 kilowatt incident laser power. The detector array together with the partial mirror optic and possible additional optics that provide divergent scattering of reflected HEL radiation constitute what AEgis refers to as a target board. The target board use environment may vary from benign, indoor laboratory conditions to harsh, outdoor conditions in tests on the ground as well as in air. Under this NMSBA project, Sandia agreed to apply its extensive expertise and capability in the design and production of high LIDT coatings on large dimension optics for high power pulsed laser radiation to advise and assist AEgis in the design and development of high LIDT coatings for the partial mirror optic. Sandia and AEgis met several times to discuss the partial mirror and target board requirements, and Sandia was guided in its work by these discussions as well as by the partial mirror and target board requirement summaries of Tables 1 and 2, respectively, that were provided by AEgis.
We designed a dichroic beam combiner coating with 11 HfO2/SiO2 layer pairs and deposited it on a large substrate. It provides high transmission (HT) at 527 nm and high reflection (HR) at 1054 nm for a 22.5-deg angle of incidence (AOI), S polarization (Spol), and uses near half-wave layer thicknesses for HT at 527 nm, modified for HR at 1054 nm. The two options for the beam combiner each require that a high intensity beam be incident on the coating from within the substrate (from glass). We analyze the laser-induced damage threshold (LIDT) differences between the two options in terms of the 527- and 1054-nm E-field behaviors for air → coating and glass → coating incidences. This indicates that LIDTs should be higher for air → coating than for glass → coating incidence. LIDT tests at the use AOI, Spol with ns pulses at 532 and 1064 nm confirm this, with glass → coating LIDTs about half that of air → coating LIDTs. Lastly, these results clearly indicate that the best beam combiner option is for the high intensity 527 and 1054 nm beams to be incident on the coating from air and glass, respectively.
Broad bandwidth coatings allow angle of incidence flexibility and accommodate spectral shifts due to aging and water absorption. Higher refractive index materials in optical coatings, such as TiO2, Nb2O5, and Ta2O5, can be used to achieve broader bandwidths compared to coatings that contain HfO2 high index layers. We have identified the deposition settings that lead to the highest index, lowest absorption layers of TiO2, Nb2O5, and Ta2O5, via e-beam evaporation using ion-assisted deposition. We paired these high index materials with SiO2 as the low index material to create broad bandwidth high reflection coatings centered at 1054 nm for 45 deg angle of incidence and P polarization. Furthermore, high reflection bandwidths as large as 231 nm were realized. Laser damage tests of these coatings using the ISO 11254 and NIF-MEL protocols are presented, which revealed that the Ta2O5/SiO2 coating exhibits the highest resistance to laser damage, at the expense of lower bandwidth compared to the TiO2/SiO2 and Nb2O5/SiO2 coatings.
We describe an optical coating design suitable for broad bandwidth high reflection (BBHR) at 45° angle of incidence (AOI), P polarization (Ppol) of femtosecond (fs) laser pulses whose wavelengths range from 800 to 1000 nm. Our design process is guided by quarter-wave HR coating properties. The design must afford low group delay dispersion (GDD) for reflected light over the broad, 200 nm bandwidth in order to minimize temporal broadening of the fs pulses due to dispersive alteration of relative phases between their frequency components. The design should also be favorable to high laser-induced damage threshold (LIDT). We base the coating on TiO 2 /SiO 2 layer pairs produced by means of e-beam evaporation with ion-assisted deposition, and use OptiLayer Thin Film Software to explore designs starting with TiO 2 /SiO 2 layers having thicknesses in a reverse chirped arrangement. This approach led to a design with R > 99% from 800 to 1000 nm and GDD < 20 fs 2 from 843 to 949 nm (45° AOI, Ppol). The design's GDD behaves in a smooth way, suitable for GDD compensation techniques, and its electric field intensities show promise for high LIDTs. Reflectivity and GDD measurements for the initial test coating indicate good performance of the BBHR design. Subsequent coating runs with improved process calibration produced two coatings whose HR bands satisfactorily meet the design goals. For the sake of completeness, we summarize our previously reported transmission spectra and LIDT test results with 800 ps, 8 ps and 675 fs pulses for these two coatings, and present a table of the LIDT results we have for all of our TiO 2 /SiO 2 BBHR coatings, showing the trends with test laser pulse duration from the ns to sub-ps regimes.