Publications

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This paper presents a novel micro-scale passive-latching mechanical shock sensor with reset capability. The device integrates a compliant bistable mechanism, designed to have a high contact force and low actuation force, with metal-to-metal electrical contacts that provide a means for interrogating the switch state. No electrical power is required during storage or sensing. Electrical power is only required to initialize, reset, self-test, or interrogate the device, allowing the mechanism to be used in low-power and long shelf-life applications. The sensor has a footprint of about 1 mm2, allowing multiple devices to be integrated on a single chip for arrays of acceleration thresholds, redundancy, and/or multiple sense directions. Modeling and experimental results for a few devices with different thresholds in the 100g to 400g range are given. Centrifuge test results show that the accelerations required to toggle the switches are higher than current model predictions. Resonant frequency measurements suggest that the springs may be stiffer than predicted. Hammer-strike tests demonstrate the feasibility of using the devices as sensors for actual mechanical shock events. Copyright © 2008 by ASME.

A learning control algorithm is presented that reduces the closing time of a radio-frequency microelectromechanical systems switch by minimizing bounce while maintaining robustness to fabrication variability. The switch consists of a plate supported by folded-beam springs. Electrostatic actuation of the plate causes pull-in with high impact velocities, which are difficult to control due to parameter variations from part to part. A single degree-of-freedom model was utilized to design a simple learning control algorithm that shapes the actuation voltage based on the open/closed state of the switch. Experiments on three different test switches show that after 5-10 iterations, the learning algorithm lands the switch plate with an impact velocity not exceeding 0.20 m/s, eliminating bounce. Simulations show that robustness to parameter variation is directly related to the number of required iterations for the device to learn the input for a bounce-free closure. © 2009 IEEE.

Due to the coupling of thermal and mechanical behaviors at small scales, a Campaign 6 project was created to investigate thermomechanical phenomena in microsystems. This report documents experimental measurements conducted under the auspices of this project. Since thermal and mechanical measurements for thermal microactuators were not available for a single microactuator design, a comprehensive suite of thermal and mechanical experimental data was taken and compiled for model validation purposes. Three thermal microactuator designs were selected and fabricated using the SUMMiT V{sup TM} process at Sandia National Laboratories. Thermal and mechanical measurements for the bent-beam polycrystalline silicon thermal microactuators are reported, including displacement, overall actuator electrical resistance, force, temperature profiles along microactuator legs in standard laboratory air pressures and reduced pressures down to 50 mTorr, resonant frequency, out-of-plane displacement, and dynamic displacement response to applied voltages.

This report summarizes design and modeling activities for the MEMS passive shock sensor. It provides a description of past design revisions, including the purposes and major differences between design revisions but with a focus on Revisions 4 through 7 and the work performed in fiscal year 2008 (FY08). This report is a reference for comparing different designs; it summarizes design parameters and analysis results, and identifies test structures. It also highlights some of the changes and or additions to models previously documented [Mitchell et al. 2006, Mitchell et al. 2008] such as the way uncertainty thresholds are analyzed and reported. It also includes dynamic simulation results used to investigate how positioning of hard stops may reduce vibration sensitivity.

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This report summarizes the functional, model validation, and technology readiness testing of the Sandia MEMS Passive Shock Sensor in FY08. Functional testing of a large number of revision 4 parts showed robust and consistent performance. Model validation testing helped tune the models to match data well and identified several areas for future investigation related to high frequency sensitivity and thermal effects. Finally, technology readiness testing demonstrated the integrated elements of the sensor under realistic environments.

This report describes activities conducted in FY07 to mature the MEMS passive shock sensor. The first chapter of the report provides motivation and background on activities that are described in detail in later chapters. The second chapter discusses concepts that are important for integrating the MEMS passive shock sensor into a system. Following these two introductory chapters, the report details modeling and design efforts, packaging, failure analysis and testing and validation. At the end of FY07, the MEMS passive shock sensor was at TRL 4.

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A model for computing the force from a gas film squeezed between parallel plates was recently developed using Direct Simulation Monte Carlo simulations in conjunction with the classical Reynolds equation. This paper compares predictions from that model with experimental data. The experimental validation used an almost rectangular MEMS oscillating plate with piezoelectric base excitation. The velocities of the suspended plate and of the substrate were measured with a laser Doppler vibrometer and a microscope. Experimental modal analysis yielded the damping ratio of twelve test structures for several different gas pressures. Small perforation holes in the plates did not alter the squeeze-film damping substantially. These experimental data suggest that the model predicts squeeze-film damping forces accurately. From this comparison, it is seen that these structures have a tangential-velocity accommodation coefficient close to unity. Copyright © 2007 by ASME.

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When a micro cantilever beam is excited by base shaking, electrostatic force makes the tip displacement response nonlinear with respect to the base acceleration input. This paper derives a single-degree-of-freedom model for the deflection in a micro cantilever due to electrostatic voltage for this excitation. The tip deflection due to electrostatic force is derived first as part of the total tip deflection, and then in terms of an equivalent base excitation. The relationship between electrostatic deflection and equivalent base excitation is determined numerically, but can be represented accurately by a simple curve-fit function.

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Long-term reliability testing of Micro-Electro-Mechanical Systems (MEMS) is important to the acceptance of these devices for critical and high-impact applications. In order to make predictions on aging mechanisms, these validation experiments must be performed in controlled environments. Additionally, because the aging acceleration factors are not understood, the experiments can last for months. This paper describes the design and implementation of a long-term MEMS reliability test bed for accelerated life testing. The system is comprised of a small environmental chamber mounted on an electrodynamic shaker with a laser Doppler vibrometer (LDV) and digital camera for data collection. The humidity and temperature controlled chamber has capacity for 16 MEMS components in a 4×4 array. The shaker is used to dynamically excite the devices using broadband noise, chirp or any other programmed signal via the control software. Driving amplitudes can be varied to maintain the actuation of the test units at the desired level. The actuation is monitored optically via the LDV which can report the displacement or velocity information of the surface. A springmass accelerated aging experiment was started using a controlled environment of 5000 ppmv humidity (roughly 13% at room temperature), temperature of 29 °C, and ±80μm maximum displacement of the mass. During the first phase of the experiment, the resonant frequency was measured every 2 hours. From 114.5 to 450 hours under stress, measurements were taken every 12 hours and after that every 24 hours. Resonant frequency tracking indicates no changes in the structures for 4200 hours of testing.

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The responses of micro-cantilever beams, with lengths ranging from 100-1500 microns, have been found to exhibit nonlinear dynamic characteristics at very low vibration amplitudes and in near vacuum. This work seeks to find a functional form for the nonlinear forces acting on the beams in order to aide in identifying their cause. In this paper, the restoring force surface method is used to non-parametrically identify the nonlinear forces acting on a 200 micron long beam. The beam response to sinusoidal excitation contains as many as 19 significant harmonics within the measurement bandwidth. The nonlinear forces on the beam are found to be oscillatory and to depend on the beam velocity. A piecewise linear curve is fit to the response in order to more easily compare the restoring forces obtained at various amplitudes. The analysis illustrates the utility of the restoring force surface method on a system with complex and highly nonlinear forces. Copyright © 2006 by ASME.

This paper addresses the coupling of experimental and finite element models of substructures. In creating the experimental model, difficulties exist in applying moments and estimating resulting rotations at the connection point between the experimental and finite element models. In this work, a simple test fixture for applying moments and estimating rotations is used to more accurately estimate these quantities. The test fixture is analytically "subtracted" from the model using the admittance approach. Inherent in this process is the inversion of frequency response function matrices that can amplify the uncertainty in the measured data. Presented here is the work applied to a two-component beam model and analyses that attempt to identify and quantify some of these uncertainties. The admittance model of one beam component was generated experimentally using the moment-rotation fixture, and the other from a detailed finite element model. During analytical testing of the admittance modeling algorithm, it was discovered that the component admittance models generated by finite elements were ill conditioned due to the inherent physics.

Experimental modal analysis (EMA) was carried out on a micro-machined acceleration switch to characterize the motions of the device as fabricated and to compare this with analytical results for the nominal design. Finite element analysis (FEA) of the nominal design was used for this comparison. The acceleration switch was a single-crystal silicon disc supported by four fork-shaped springs. We shook the base of the die with step sine type excitation. A Laser Doppler Velocimeter (LDV) in conjunction with a microscope was used to measure the velocities of the die at several points. The desired first three modes of the structure were identified. The fundamental natural frequency that we measured in this experiment gives an estimate of the actuation g-level for the specified stroke. The fundamental resonance and actuation g-level results from the EMA and the FEA showed large variations. The discrepancy prompted thorough dimensional measurement of the acceleration switch, which revealed discrepancies between the nominal design and tested component.

Damping vibrations is important in the design of some types of inertial sensing devices. One method for adding damping to a device is to use magnetic forces generated by a static magnetic field interacting with eddy currents. In this report, we develop a 2-dimensional finite element model for the analysis of quasistatic eddy currents in a thin sheet of conducting material. The model was used for design and sensitivity analyses of a novel mechanical oscillator that consists of a shuttle mass (thin sheet of conducting material) and a set of folded spring elements. The oscillator is damped through the interaction of a static magnetic field and eddy currents in the shuttle mass. Using a prototype device and Laser Dopler Velocimetry (LDV), measurements were compared to the model in a validation study using simulation based uncertainty analyses. Measurements were found to follow the trends predicted by the model.

We report on experimental work that characterizes the frequency response of resonators of Microfabricated Acoustic Spectrum Analyzer (MASA) devices which were fabricated using Sandia's SUMMiT™ processing technology. A 1.1 micron silicon nitride layer was used in the fabrication to isolate the sense mechanism from the actuation mechanism. The devices are actuated using electrostatic vertical comb-drive actuation in a 30-50 mTorr vacuum and the frequency response is measured using a piezo-resistive readout mechanism. Two MASA devices are tested using comb-drive ac signals (e.g., 200mV) superimposed on a dc bias (e.g., 15V). In addition, dc bias voltages placed on the comb-drive are shown to tune the resonant frequency of the resonator. The frequency response of the piezo-resistive readout mechanism is measured using a 10V dc supply voltage supplied across its Wheatstone bridge. The results show that the piezo-resistive readout mechanism can detect resonant behavior and determine resonant frequency. A laser doppler vibrometer is used as an independent means to characterize the frequency response and verify the results.

Mechanical dynamics can be a determining factor for the switching speed of radio-frequency microelectromechanical systems (RF MEMS) switches. This paper presents the simulation of the mechanical motion of a microswitch under actuation. The switch has a plate suspended by springs. When an electrostatic actuation is applied, the plate moves toward the substrate and closes the switch. Simulations are calculated via a high-fidelity finite element model that couples solid dynamics with electrostatic actuation. It incorporates non-linear coupled dynamics and accommodates fabrication variations. Experimental modal analysis gives results in the frequency domain that verifies the natural frequencies and mode shapes predicted by the model. An effective 1D model is created and used to calculate an actuation voltage waveform that minimizes switch velocity at closure. In the experiment, the switch is actuated with this actuation voltage, and the displacements of the switch at various points are measured using a laser Doppler velocimeter through a microscope. The experiments are repeated on several switches from different batches. The experimental results verify the model.

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