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Oxalate co-precipitation synthesis of calcium zirconate and calcium titanate powders

Tuttle, Bruce T.; Sipola, Diana L.; Garino, Terry J.; Mahoney, Patrick M.; Rodriguez, Marko A.; Voigt, James A.

Fine powders of calcium zirconate (CaZrO{sub 3}, CZ) and calcium titanate (CaTiO{sub 3}, CT) were synthesized using a nonaqueous oxalate co-precipitation route from Ca(NO{sub 3}){sub 2}{center_dot}4 H{sub 2}O and group(IV) n-butoxides (Ti(OBu{sup n}){sub 4} or Zr(OBu{sup n}){sub 4}). Several reaction conditions and batch sizes (2-35 g) were explored to determine their influence on final particle size, morphology, and phase. Characterization of the as-prepared oxalate precursors, oven dried oxalate precursors (60-90 C), and calcined powders (635-900 C) were analyzed with TGA/DTA, XRD, TEM, and SEM. Densification and sintering studies on pressed CZ pellets at 1375 and 1400 C were also performed. Through the developed oxalate co-precipitation route, densification temperatures for CZ were lowered by 125 C from the 1500 C firing temperature required for conventional mixed oxide powders. Low field electrical tests of the CZ pellets indicated excellent dielectric properties with dielectric constants of {approx}30 and a dissipation factor of 0.0004 were measured at 1 kHz.

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TYPE SAND Report YEAR 2009
OSTIDOI

Fabrication of (Ba,Sr)TiO3 high-value integrated capacitors by chemical solution deposition

IEEE International Symposium on Applications of Ferroelectrics

Sigman, Jennifer; Clem, Paul G.; Brennecka, Geoffrey L.; Tuttle, Bruce T.

This report focuses on our recent advances in the fabrication and processing of barium strontium titanate (BST) thin films by chemical solution depositiion for next generation fuctional integrated capacitors. Projected trends for capacitors include increasing capacitance density, decreasing operating voltages, decreasing dielectric thickness and decreased process cost. Key to all these trends is the strong correlation of film phase evolution and resulting microstructure, it becomes possible to tailor the microstructure for specific applications. This interplay will be discussed in relation to the resulting temperature dependent dielectric response of the BST films.

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TYPE Conference YEAR 2008
ScopusOSTI

Advances in (Ba,Sr)TiO3 high value capacitors fabricated by chemical solution deposition

Clem, Paul G.; Brennecka, Geoffrey L.; Tuttle, Bruce T.

This report focuses on our recent advances in the fabrication and processing of barium strontium titanate (BST) thin films by chemical solution deposition for next generation functional integrated capacitors. Projected trends for capacitors include increasing capacitance density, decreasing operating voltages, decreasing dielectric thickness and decreased process cost. Key to all these trends is the strong correlation of film phase evolution and resulting microstructure, it becomes possible to tailor the microstructure for specific applications. This interplay will be discussed in relation to the resulting temperature dependent dielectric response of the BST films.

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TYPE Conference YEAR 2008
OSTI

Fabrication of ultrathin film capacitors by chemical solution deposition

Journal of Materials Research

Brennecka, Geoff L.; Tuttle, Bruce T.

A facile solution-based processing route using standard spin-coating deposition techniques has been developed for the production of reliable capacitors based on lead lanthanum zirconate titanate (PLZT) with active areas of ≥1 mm2 and dielectric layer thicknesses down to 50 nm. With careful control of the dielectric phase development through improved processing, ultrathin capacitors exhibited slim ferroelectric hysteresis loops and dielectric constants of >1000, similar to those of much thicker films. Thus, it has been demonstrated that chemical solution deposition is a viable route to the production of capacitor films which are as thin as 50 nm but are still macroscopically addressable with specific capacitance values >160 nF/mm2.

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TYPE Journal Article YEAR 2007
ScopusOSTIDOI
Results 1–25 of 49
Results 1–25 of 49