A single asperity study of Au/Au electrical contacts
Journal of Applied Physics
The measurement of the electrical contact properties of electroplated gold thin films of the type used in the microelectromechanical system relays using interfacial force microscopy (IFM) was discussed. It was found that some subtle chemical changes in the contamination layer induced by the ozonation process profoundly affected the electrical properties of the gold-gold contact. The critical role of positive and negative of the latent contamination present on the contact surfaces was also elaborated.