Publications

Kaplar, Robert K.; Allerman, A.A.; Armstrong, Andrew A.; Crawford, Mary H.; Fischer, Arthur J.; Dickerson, Jeramy R.; King, Michael P.; Baca, A.G.; Douglas, Erica A.; Sanchez, Carlos A.; Neely, Jason C.; Flicker, Jack D.; Zutavern, Fred J.; Mauch, Daniel L.; Brocato, Robert W.; Rashkin, Lee; Delhotal, Jarod J.; Fang, Lu F.; Kizilyalli, Isik C.; Aktas, Ozgur A.

Abstract not provided.

Kaplar, Robert K.; Allerman, A.A.; Armstrong, Andrew A.; Fischer, Arthur J.; Crawford, Mary H.; Dickerson, Jeramy R.; King, Michael P.; Baca, A.G.; Neely, Jason C.

Abstract not provided.

Allerman, A.A.; Moseley, Michael; Crawford, Mary H.; Wierer, J.Jr.; Armstrong, Andrew A.; Baca, A.G.; Kaplar, Robert K.; Lee, Stephen R.; Clark, Blythe C.

Abstract not provided.

Kaplar, Robert K.; Allerman, A.A.; Armstrong, Andrew A.; Fischer, Arthur J.; Dickerson, Jeramy R.; Baca, A.G.; Douglas, Erica A.; King, Michael P.; Coltrin, Michael E.; Koleske, Daniel K.; Ihlefeld, Jon I.; Paisley, Elizabeth A.; Neely, Jason C.; Flicker, Jack D.; Wierer, Jonathan J.

Abstract not provided.

Douglas, Erica A.; Allerman, A.A.; Baca, A.G.; Sanchez, Carlos A.; Kaplar, Robert K.

Abstract not provided.

Wierer, J.Jr.; Allerman, A.A.; Dickerson, Jeramy R.; Moseley, Michael; Fischer, Arthur J.; Bryant, B.N.; Baca, A.G.; King, Michael P.; Kaplar, Robert K.; Schneider, Richard P.

Abstract not provided.

Kaplar, Robert K.; Allerman, A.A.; Armstrong, Andrew A.; Wierer, Jonathan J.; Fischer, Arthur J.; Baca, A.G.; Neely, Jason C.

Abstract not provided.

Dickerson, Jeramy R.; Wierer, Jonathan W.; Allerman, A.A.; Moseley, Michael; Fischer, Arthur J.; Bryant, Benjamin N.; Baca, A.G.; King, Michael P.; Kaplar, Robert K.; Schneider, Richard P.

Abstract not provided.

Armstrong, Andrew A.; Allerman, A.A.; Baca, A.G.; Kaplar, Robert K.; Moseley, Michael

Abstract not provided.

Douglas, Erica A.; Allerman, A.A.; Kaplar, Robert K.; Sanchez, Carlos A.; Baca, A.G.

Abstract not provided.

Shaner, Eric A.; Dyer, Gregory C.; Seng, William F.; Bethke, Donald T.; Grine, Albert D.; Baca, A.G.; Allerman, A.A.

We investigate plasmonic structures in nitride-based materials for far-infrared (IR) applications. The two dimensional electron gas (2DEG) in the GaN/AlGaN material system, much like metal- dielectric structures, is a patternable plasmonic medium. However, it also permits for direct tunability via an applied voltage. While there have been proof-of-principle demonstrations of plasma excitations in nitride 2DEGs, exploration of the potential of this material system has thus far been limited. We recently demonstrated coherent phenomena such as the formation of plasmonic crystals, strong coupling of tunable crystal defects to a plasmonic crystal, and electromagnetically induced transparency in GaAs/AlGaAs 2DEGs at sub-THz frequencies. In this project, we explore whether these effects can be realized in nitride 2DEG materials above 1 THz and at temperatures exceeding 77 K.

Solid-State Electronics

Dasgupta, Sandeepan; Baca, A.G.; Cich, Michael J.

Simulations are used to explore the possibility of achieving breakdown voltage scaling using deep acceptors in the buffer for AlGaN/GaN HEMTs. The existence of an optimal range of deep level acceptor density (1017 cm-3), for which the electric field shows the most uniform distribution over the entire Lgd is demonstrated. The peak electric field can be capped off at a certain value, which can be engineered using deep level defects to be less than the critical electric field for GaN or the critical field for punch-through, whichever is lower. Following the saturation in peak electric field, the additional applied voltage spreads across the device access region. Thus, precise control of defect incorporation in the GaN buffer is shown to be a key factor in achieving high breakdown voltage HEMTs with improved unipolar figure of merit. A novel scheme for the source and drain contacts, using shallow mesa etch and partial mesa sidewall oxidation to increase the allowed range of variation in optimal acceptor density to achieve uniform electric field distribution is presented. © 2013 Elsevier Ltd. All rights reserved.

Kaplar, Robert K.; Marinella, Matthew J.; Baca, A.G.

Abstract not provided.

Proposed for publication in Semiconductor Science and Technology.

Armstrong, Andrew A.; Allerman, A.A.; Baca, A.G.; Sanchez, Carlos A.

Abstract not provided.

Baca, A.G.; Fortune, Torben R.; Gorenz, Alan G.; Clevenger, Jascinda C.; Briggs, R.D.; Patrizi, G.A.; Klem, John F.; Sullivan, Charles T.

Abstract not provided.

Baca, A.G.; Fortune, Torben R.; Gorenz, Alan G.; Clevenger, Jascinda C.; Briggs, R.D.; Patrizi, G.A.; Klem, John F.; Sullivan, Charles T.

Abstract not provided.

Journal of Vacuum and Science and Technology

Overberg, Mark E.; Baca, A.G.; Martinez, Marino M.; Wouters, Gregg A.

Abstract not provided.

Clevenger, Jascinda C.; Patrizi, G.A.; Peterson, T.C.; Cich, Michael C.; Baca, A.G.; Klem, John F.; Plut, Thomas A.; Hawkins, Samuel D.; Sullivan, Charles T.

Abstract not provided.

ECS Transactions

Clevenger, J.B.; Patrizi, G.A.; Peterson, T.C.; Cich, M.J.; Baca, A.G.; Klem, John F.; Plut, Thomas A.; Fortune, T.R.; Hightower, M.S.; Torres, D.; Hawkins, Samuel D.; Sullivan, Charles T.

Specially designed Pnp heterojunction bipolar transistors (HBT's) in the AlGaAs/GaAs material system can offer improved radiation response over commercially-available silicon bipolar junction transistors (BJT's). To be a viable alternative to the silicon Pnp BJT, improvements to the manufacturability of the HBT were required. Utilization of a Pd/Ge/Au non-spiking ohmic contact to the base and implementation of a PECVD silicon nitride hard mask for wet etch control were the primary developments that led to a more reliable fabrication process. The implementation of the silicon nitride hard mask and the subsequent process improvements increased the average electrical yield from 43% to 90%. © The Electrochemical Society.

Overberg, Mark E.; Baca, A.G.; Stevens, Jeffrey S.; Martinez, Marino M.; Wouters, Gregg A.

Abstract not provided.

Koleske, Daniel K.; Shul, Randy J.; Follstaedt, D.M.; Provencio, P.N.; Allerman, A.A.; Wright, Alan F.; Missert, Nancy A.; Baca, A.G.; Briggs, R.D.; Marsh, Philbert F.; Tigges, Chris P.

GaN-based microwave power amplifiers have been identified as critical components in Sandia's next generation micro-Synthetic-Aperture-Radar (SAR) operating at X-band and Ku-band (10-18 GHz). To miniaturize SAR, GaN-based amplifiers are necessary to replace bulky traveling wave tubes. Specifically, for micro-SAR development, highly reliable GaN high electron mobility transistors (HEMTs), which have delivered a factor of 10 times improvement in power performance compared to GaAs, need to be developed. Despite the great promise of GaN HEMTs, problems associated with nitride materials growth currently limit gain, linearity, power-added-efficiency, reproducibility, and reliability. These material quality issues are primarily due to heteroepitaxial growth of GaN on lattice mismatched substrates. Because SiC provides the best lattice match and thermal conductivity, SiC is currently the substrate of choice for GaN-based microwave amplifiers. Obviously for GaN-based HEMTs to fully realize their tremendous promise, several challenges related to GaN heteroepitaxy on SiC must be solved. For this LDRD, we conducted a concerted effort to resolve materials issues through in-depth research on GaN/AlGaN growth on SiC. Repeatable growth processes were developed which enabled basic studies of these device layers as well as full fabrication of microwave amplifiers. Detailed studies of the GaN and AlGaN growth of SiC were conducted and techniques to measure the structural and electrical properties of the layers were developed. Problems that limit device performance were investigated, including electron traps, dislocations, the quality of semi-insulating GaN, the GaN/AlGaN interface roughness, and surface pinning of the AlGaN gate. Surface charge was reduced by developing silicon nitride passivation. Constant feedback between material properties, physical understanding, and device performance enabled rapid progress which eventually led to the successful fabrication of state of the art HEMT transistors and amplifiers.

Smith, Patrick A.; Briner, Clifton F.; Plichta, Todd P.; Shagam, Richard N.; Mar, Alan M.; Cich, Michael C.; Baca, A.G.; Martin, Dennis C.; Martin, Dennis C.

Abstract not provided.

Smith, Patrick A.; Briner, Clifton F.; Plichta, Todd P.; Shagam, Richard N.; Mar, Alan M.; Cich, Michael C.; Baca, A.G.; Martin, Dennis C.

Abstract not provided.

Proposed for publication in Applied Physics Letters.

Kurtz, S.R.; Tigges, Chris P.; Allerman, A.A.; Baca, A.G.

We report micro-Raman studies of self-heating in an AlGaN/GaN heterostructure field-effect transistor using below (visible 488.0 nm) and near (UV 363.8 nm) GaN band-gap excitation. The shallow penetration depth of the UV light allows us to measure temperature rise ({Delta}T) in the two-dimensional electron gas (2DEG) region of the device between drain and source. Visible light gives the average {Delta}T in the GaN layer, and that of the SiC substrate, at the same lateral position. Combined, we depth profile the self-heating. Measured {Delta}T in the 2DEG is consistently over twice the average GaN-layer value. Electrical and thermal transport properties are simulated. We identify a hotspot, located at the gate edge in the 2DEG, as the prevailing factor in the self-heating.

Applied Physics Letters

Kim, Jihyun; Ren, F.; Chung, G.Y.; MacMillan, M.F.; Baca, A.G.; Briggs, R.D.; Schoenfeld, D.; Pearton, S.J.

A comparison of the performance of WSi x rectifiers with Ni/SiC Schottky rectifiers to high dose γ-ray irradiation was discussed. SiC Schottky rectifiers with moderate breakdown voltages of ∼450 V and with either WSi x or Ni rectifying contacts were irradiated with Co-60 γ-rays. It was found that high dose γ-ray irradiation of N/SiC schottky rectifiers show significant degradation of the forward current characteristics, due to instability of the contacts. The results show that the WSi x/SiC rectifiers show little deterioration of the contact with the same conditions.