A QUANTITATIVE METHOD FOR MEASURING REMAINING SILICON THICKNESS DURING XEF2 FIB TRENCHING FOR BACKSIDE CIRCUIT OPERATIONS Salazar, Gregory P.; Shul, Randy J.; Ball, Steven N.; Rye, Michael J.; Phillips, B.S.; DiBattista, Michael D.; Sivermann, Scott S.; Salazar, Gregory P. Abstract not provided. More Details TYPE Conference Poster YEAR 2017 OSTI
FIB/SEM Circuit Edit and Imaging Ball, Steven N.; Salazar, Gregory P.; Shul, Randy J.; Sniegowski, Jeffry J. Abstract not provided. More Details TYPE Presentation YEAR 2016 OSTI