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High kinetic inductance NbTiN superconducting transmission line resonators in the very thin film limit

Applied Physics Letters

Bretz-Sullivan, Terence M.; Lewis, Rupert; Lima-Sharma, Ana L.; Lidsky, David A.; Smyth, Christopher M.; Harris, Charles T.; Venuti, Michael V.; Eley, Serena E.; Lu, Tzu-Ming L.

We examine the DC and radio frequency (RF) response of superconducting transmission line resonators comprised of very thin NbTiN films, [Formula: see text] in thickness, in the high-temperature limit, where the photon energy is less than the thermal energy. The resonant frequencies of these superconducting resonators show a significant nonlinear response as a function of RF input power, which can approach a frequency shift of [Formula: see text] in a [Formula: see text] span in the thinnest film. The strong nonlinear response allows these very thin film resonators to serve as high kinetic inductance parametric amplifiers.

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Leveraging Spin-Orbit Coupling in Ge/SiGe Heterostructures for Quantum Information Transfer

Bretz-Sullivan, Terence M.; Brickson, Mitchell I.; Foster, Natalie D.; Hutchins-Delgado, Troy A.; Lewis, Rupert; Lu, Tzu-Ming L.; Miller, Andrew J.; Srinivasa, Vanita S.; Tracy, Lisa A.; Wanke, Michael W.; Luhman, Dwight R.

Hole spin qubits confined to lithographically - defined lateral quantum dots in Ge/SiGe heterostructures show great promise. On reason for this is the intrinsic spin - orbit coupling that allows all - electric control of the qubit. That same feature can be exploited as a coupling mechanism to coherently link spin qubits to a photon field in a superconducting resonator, which could, in principle, be used as a quantum bus to distribute quantum information. The work reported here advances the knowledge and technology required for such a demonstration. We discuss the device fabrication and characterization of different quantum dot designs and the demonstration of single hole occupation in multiple devices. Superconductor resonators fabricated using an outside vendor were found to have adequate performance and a path toward flip-chip integration with quantum devices is discussed. The results of an optical study exploring aspects of using implanted Ga as quantum memory in a Ge system are presented.

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A Fast-Cycle Charge Noise Measurement for Better Qubits

Lewis, Rupert; Kindel, William K.; Harris, Charles T.; Skinner Ramos, Sueli D.

Defects in materials are an ongoing challenge for quantum bits, so called qubits. Solid state qubits—both spins in semiconductors and superconducting qubits—suffer from losses and noise caused by two-level-system (TLS) defects thought to reside on surfaces and in amorphous materials. Understanding and reducing the number of such defects is an ongoing challenge to the field. Superconducting resonators couple to TLS defects and provide a handle that can be used to better understand TLS. We develop noise measurements of superconducting resonators at very low temperatures (20 mK) compared to the resonant frequency, and low powers, down to single photon occupation.

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Asynchronous Ballistic Reversible Fluxon Logic

IEEE Transactions on Applied Superconductivity

Frank, Michael P.; Lewis, Rupert; Missert, Nancy A.; Wolak, Matthaeus W.; Henry, Michael D.

In a previous paper, we described a new abstract circuit model for reversible computation called asynchronous ballistic reversible computing (ABRC), in which localized information-bearing pulses propagate ballistically along signal paths between stateful abstract devices and elastically scatter off those devices serially, while updating the device state in a logically-reversible and deterministic fashion. The ABRC model has been shown to be capable of universal computation. In the research reported here, we begin exploring how the ABRC model might be realized in practice using single flux quantum solitons (fluxons) in superconducting Josephson junction (JJ) circuits. One natural family of realizations could utilize fluxon polarity to represent binary data in individual pulses propagating near-ballistically, along discrete or continuous long Josephson junctions or microstrip passive transmission lines, and utilize the flux charge (-1, 0, +1) of a JJ-containing superconducting loop with Φ0 < IcL < 2Φ0 to encode a ternary state variable internal to a device. A natural question then arises as to which of the definable abstract ABRC device functionalities using this data representation might be implementable using a JJ circuit that dissipates only a small fraction of the input fluxon energy. We discuss conservation rules and symmetries considered as constraints to be obeyed in these circuits, and begin the process of classifying the possible ABRC devices in this family having up to three bidirectional I/O terminals, and up to three internal states.

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SNS Josephson Junctions with Tunable Ta-N Barriers

IEEE Transactions on Applied Superconductivity

Wolak, Matthaeus W.; Missert, Nancy A.; Henry, Michael D.; Lewis, Rupert; Wolfley, Steven L.; Brunke, Lyle B.; Sierra Suarez, Jonatan A.

We report on the fabrication and characterization of Nb/Ta-N/Nb Josephson junctions grown by room temperature magnetron sputtering on 150-mm diameter Si wafers. Junction characteristics depend upon the Ta-N barrier composition, which was varied by adjusting the N2 flow during film deposition. Higher N2 flow rates raise the barrier resistance and increase the junction critical current. This work demonstrates the viability of Ta-N as an alternative barrier to aluminum oxide, with the potential for large scale integration.

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Measuring Changes in Inductance with Microstrip Resonators

IEEE Transactions on Applied Superconductivity

Lewis, Rupert; Henry, Michael D.; Young, Travis R.; Frank, Michael P.; Wolak, Matthaeus W.; Missert, Nancy A.

We measure the frequency dependence of a niobium microstrip resonator as a function of temperature from 1.4 to 8.4 K. In a 2-micrometer-wide half-wave resonator, we find the frequency of resonance changes by a factor of 7 over this temperature range. From the resonant frequencies, we extract inductance per unit length, characteristic impedance, and propagation velocity (group velocity). We discuss how these results relate to superconducting electronics. Over the 2 K to 6 K temperature range where superconducting electronic circuits operate, inductance shows a 19% change and both impedance and propagation velocity show an 11% change.

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Semi-Automated Design of Functional Elements for a New Approach to Digital Superconducting Electronics: Methodology and Preliminary Results

ISEC 2019 - International Superconductive Electronics Conference

Frank, Michael P.; Lewis, Rupert; Missert, Nancy A.; Henry, M.D.; Wolak, Matthaeus W.; Debenedictis, Erik P.

In an ongoing project at Sandia National Laboratories, we are attempting to develop a novel style of superconducting digital processing, based on a new model of reversible computation called Asynchronous Ballistic Reversible Computing (ABRC). We envision an approach in which polarized flux-ons scatter elastically from near-lossless functional components, reversibly updating the local digital state of the circuit, while dissipating only a small fraction of the input fluxon energy. This approach to superconducting digital computation is sufficiently unconventional that an appropriate methodology for hand-design of such circuits is not immediately obvious. To gain insight into the design principles that are applicable in this new domain, we are creating a software tool to automatically enumerate possible topologies of reactive, undamped Josephson junction circuits, and sweep the parameter space of each circuit searching for designs exhibiting desired dynamical behaviors. But first, we identified by hand a circuit implementing the simplest possible nontrivial ABRC functional behavior with bits encoded as conserved polarized fluxons, namely, a one-bit reversible memory cell with one bidirectional I/O port. We expect the tool to be useful for designing more complex circuits.

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Stabilization of ferroelectric phase of Hf0.58Zr0.42O2 on NbN at 4 K

Applied Physics Letters

Henry, M.D.; Smith, Sean S.; Lewis, Rupert; Ihlefeld, J.F.

Ferroelectricity in doped and alloyed hafnia thin films has been demonstrated using several different electrodes, with TiN and TaN being most prominent. In this work, we demonstrate ferroelectric Hf0.58Zr0.42O2 thin films with superconducting NbN electrodes at cryogenic temperatures. Demonstration of polarization - electric field [P(E)] response at liquid helium cryogenic temperatures, 4 K, suggests that the polarization is switchable over a wide temperature range after an initial 600 °C anneal. Further, room temperature P(E) and capacitance measurements demonstrate an expected polarization response with wake-up required to reach the steady state. Wake-up cycling at 4 K is observed to have no effect upon the ferroelectric phase suggesting an oxygen vacancy mobility freeze out whereas wake-up cycling at 294 K demonstrates close to a 3× increase in remanent polarization. This integration of a ferroelectric Hf0.58Zr0.42O2 thin film with NbN demonstrates the suitability of a highly scalable ferroelectric in applications for cryogenic technologies.

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A single electron transistor charge sensor in strong rf fields

AIP Advances

Lewis, Rupert; Harris, C.T.; Shaner, E.A.

We measure the charge sensitivity, Se, of a single electron transistor (SET) in the presence of strong (Vrf ∼ e/Cg) spurious radio frequency (rf) signals at frequencies up to 50 MHz, where Cg is the gate capacitance. Although Se appears to degrade when exposed to Vrf, we find that broadening of conduction peaks is largely due to the measurement technique and show that Se is maintained even with strong Vrf present. We show cancellation of a known Vrf signal at 1 MHz, demonstrating that a stable bias point in the presence of rf signals is possible.

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Tunable Nitride Josephson Junctions

Missert, Nancy A.; Henry, Michael D.; Lewis, Rupert; Howell, Stephen W.; Wolfley, Steven L.; Brunke, Lyle B.; Wolak, Matthaeus W.

We have developed an ambient temperature, SiO2/Si wafer - scale process for Josephson junctions based on Nb electrodes and Ta x N barriers with tunable electronic properties. The films are fabricated by magnetron sputtering. The electronic properties of the TaxN barriers are controlled by adjusting the nitrogen flow during sputtering. This technology offers a scalable alternative to the more traditional junctions based on AlOx barriers for low - power, high - performance computing.

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Materials Study of NbN and TaxN Thin Films for SNS Josephson Junctions

IEEE Transactions on Applied Superconductivity

Missert, Nancy A.; Brunke, Lyle B.; Henry, Michael D.; Wolfley, Steven L.; Howell, Stephen W.; Mudrick, John M.; Lewis, Rupert

Properties of NbN and TaxN thin films grown at ambient temperatures on SiO2/Si substrates by reactive-pulsed laser deposition and reactive magnetron sputtering (MS) as a function of N2 gas flow were investigated. Both techniques produced films with smooth surfaces, where the surface roughness did not depend on the N2 gas flow during growth. High crystalline quality, (111) oriented NbN films with Tc up to 11 K were produced by both techniques for N contents near 50%. The low temperature transport properties of the TaxN films depended upon both the N2 partial pressure used during growth and the film thickness. The root mean square surface roughness of TaxN films grown by MS increased as the film thickness decreased down to 10 nm.

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Vacuum gap microstrip microwave resonators for 2.5-D integration in quantum computing

IEEE Transactions on Applied Superconductivity

Lewis, Rupert; Henry, Michael D.; Schroeder, Katlin S.

Vacuum gap λ/2 microwave resonators are demonstrated as a route toward higher integration in superconducting qubit circuits. The resonators are fabricated from pieces on two silicon chips bonded together with an In-Sb bond. Measurements of the devices yield resonant frequencies in good agreement with simulations. Creating low loss circuits in this geometry is also discussed.

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Degradation of superconducting Nb/NbN films by atmospheric oxidation

IEEE Transactions on Applied Superconductivity

Henry, Michael D.; Wolfley, Steven L.; Young, Travis R.; Monson, Todd M.; Pearce, Charles J.; Lewis, Rupert; Clark, Blythe C.; Brunke, Lyle B.; Missert, Nancy A.

Niobium and niobium nitride thin films are transitioning from fundamental research toward wafer scale manufacturing with technology drivers that include superconducting circuits and electronics, optical single photon detectors, logic, and memory. Successful microfabrication requires precise control over the properties of sputtered superconducting films, including oxidation. Previous work has demonstrated the mechanism in oxidation of Nb and how film structure could have deleterious effects upon the superconducting properties. This study provides an examination of atmospheric oxidation of NbN films. By examination of the room temperature sheet resistance of NbN bulk oxidation was identified and confirmed by secondary ion mass spectrometry. As a result, Meissner magnetic measurements confirmed the bulk oxidation not observed with simple cryogenic resistivity measurements.

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Ga lithography in sputtered niobium for superconductive micro and nanowires

Applied Physics Letters

Henry, M.D.; Wolfley, Steven L.; Monson, Todd M.; Lewis, Rupert

This work demonstrates the use of focused ion beam (FIB) implanted Ga as a lithographic mask for plasma etching of Nb films. Using a highly collimated Ga beam of a FIB, Nb is implanted 12 nm deep with a 14 nm thick Ga layer providing etch selectivity better than 15:1 with fluorine based etch chemistry. Implanted square test patterns, both 10 μm by 10 μm and 100 μm by 100 μm, demonstrate that doses above than 7.5 × 1015cm-2 at 30 kV provide adequate mask protection for a 205 nm thick, sputtered Nb film. The resolution of this dry lithographic technique is demonstrated by fabrication of nanowires 75 nm wide by 10 μm long connected to 50 μm wide contact pads. The residual resistance ratio of patterned Nb films was 3. The superconducting transition temperature (Tc) = 7.7 K was measured using a magnetic properties measurement system. This nanoscale, dry lithographic technique was extended to sputtered TiN and Ta here and could be used on other fluorine etched superconductors such as NbN, NbSi, and NbTi. © 2014 AIP Publishing LLC.

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52 Results
52 Results