Derzon, Mark S.; Powledge, Aaron P.; Gutierrez, Lorenzo P.; Hoyt, Kevin H.; Brooks, Carlton B.; Perez, Jose R.; Galambos, Paul; Price, Nathan J.; Koskelo, Markku J.; Myers, William M.; Moss, Calvin M.; James, Michael J.
Derzon, Mark S.; Powledge, Aaron P.; Gutierrez, Lorenzo P.; Hoyt, Kevin H.; Brooks, Carlton B.; Perez, Jose R.; Galambos, Paul; Price, Nathan J.; Koskelo, Markku J.; Myers, William M.; Moss, Calvin M.; James, Michael J.
Micro-Gas-Analyzers have many applications in detecting chemical compounds present in the air. MEMS valves are used to perform sampling of gasses, as they enable control of fluid flow at the micro level. Current generation electrostatically actuated MEMS valves were tested to determine their ability to hold off a given gauge pressure with an applied voltage. Current valve designs were able to hold off 98 psi with only 82 V applied to the valves. The valves were determined to be 1.83 times more efficient than older valve designs, due to increasing the electrostatic area of the valve and trapping oxide between polysilicon layers. Newer valve designs were also proposed and modeled using ANSYS multiphysics, which should be able to hold off 100 psi with only 29 V needed. This performance would be 2.82 times more efficient than current designs, or 5.17 times more efficient than older valve designs. This will be accomplished by further increasing the valve radius and decreasing the gap between the valve boss and electrode.
A liquid metal ESD is being developed to provide electrical switching at different acceleration levels. The metal will act as both proof mass and electric contact. Mercury is chosen to comply with operation parameters. There are many challenges surrounding the deposition and containment of micro scale mercury droplets. Novel methods of micro liquid transfer are developed to deliver controllable amounts of mercury to the appropriate channels in volumes under 1 uL. Issues of hermetic sealing and avoidance of mercury contamination are also addressed.