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Silicon microring modulator with integrated heater and temperature sensor for thermal control

Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010

DeRose, Christopher T.; Watts, Michael W.; Trotter, Douglas C.; Luck, David L.; Nielson, Gregory N.; Young, Ralph W.

The first demonstration of a silicon microring modulator with both an integrated resistive heater and diode-based temperature sensor is shown. The temperature-sensor exhibits a linear response for more than an 85 °C external temperature range. ©2010 Optical Society of America.

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Low-power high-speed silicon microdisk modulators

Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010

Zortman, William A.; Watts, Michael W.; Trotter, Douglas C.; Young, Ralph W.; Lentine, Anthony L.

A novel silicon microdisk modulator with "error-free" ∼3 femtojoule/bit modulation at 12.5Gbs has been demonstrated. Modulation with a 1 volt swing allows for compatibility with current and future digital logic CMOS electronics. ©2010 IEEE.

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Power penalty measurement and frequency chirp extraction in silicon microdisk resonator modulators

2010 Conference on Optical Fiber Communication, Collocated National Fiber Optic Engineers Conference, OFC/NFOEC 2010

Zortman, William A.; Lentine, Anthony L.; Watts, Michael W.; Trotter, Douglas C.

We demonstrate 5Gbs and10Gbs error free operation of silicon photonic microdisk resonant modulators to a distance of 70km, measure dispersion power penalties and compare the experimental results with theoretically derived values. ©2009 Optical Society of America.

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Determination of wafer and process induced resonant frequency variation in silicon microdisk-resonators

Optics InfoBase Conference Papers

Zortman, William A.; Watts, Michael W.; Trotter, Douglas C.

By comparing the frequency deviations of the TE and TM modes of identically designed silicon microdisk-resonators across a wafer, we demonstrate that layer thickness non-uniformity is the dominant cause of fabrication-induced microdisk-resonator frequency deviation. © 2009 Optical Society of America.

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Adiabatic resonant microrings (ARMs) with directly integrated thermal microphotonics

2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009

Watts, Michael W.; Zortman, William A.; Trotter, Douglas C.; Nielson, Gregory N.; Luck, David L.; Young, Ralph W.

A new class of microphotonic-resonators, Adiabatic Resonant Microrings (ARMs), is introduced. The ARM resonator geometry enables heater elements to be formed within the resonator, simultaneously enabling record low-power (4.4μW/GHz) and record high-speed (1μs) thermal tuning. ©2009 Optical Society of America.

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Analytical energy and bandwidth model for compact silicon photonic microdisk resonators

Watts, Michael W.; Zortman, William A.

Microdisk resonators for use as low energy modulators in telecom and datacom applications have been fabricated using vertical PN junctions which operate in reverse bias. These devices have demonstrated the lowest energy/bit thus far. In this paper we show that the reverse biased PN junction diodes follow the analytical depletion approximation based on numerical simulation.

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Ultralow power silicon microdisk modulators and switches

2008 5th International Conference on Group IV Photonics, GFP

Watts, Michael W.; Trotter, Douglas C.; Young, Ralph W.; Lentine, Anthony L.

We demonstrate a 4μm silicon microdisk modulator with a power consumption of 85fJ/bit. The modulator utilizes a reverse-biased. vertical p-n junction to achieve 10Gb/s data transmission, with 3.5V drive voltage, BER<10-12, and without signal pre-emphasis. High-speed silicon bandpass switches are constructed from pairs of modulators. © 2008 IEEE Institute of Electrical and Electronics Engineers.

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SOI-Enabled MEMS Processes Lead to Novel Mechanical Optical and Atomic Physics Devices Presentation

Herrera, Gilbert V.; McCormick, Frederick B.; Nielson, Gregory N.; Nordquist, Christopher N.; Okandan, Murat O.; Olsson, Roy H.; Ortiz, Keith O.; Platzbecker, Mark R.; Resnick, Paul J.; Shul, Randy J.; Bauer, Todd B.; Sullivan, Charles T.; Watts, Michael W.; Blain, Matthew G.; Dodd, Paul E.; Dondero, Richard D.; Garcia, Ernest J.; Galambos, Paul; Hetherington, Dale L.; Hudgens, James J.

Abstract not provided.

SOI-Enabled MEMS Processes Lead to Novel Mechanical Optical and Atomic Physics Devices

Herrera, Gilbert V.; McCormick, Frederick B.; Nielson, Gregory N.; Nordquist, Christopher N.; Okandan, Murat O.; Olsson, Roy H.; Ortiz, Keith O.; Platzbecker, Mark R.; Resnick, Paul J.; Shul, Randy J.; Bauer, Todd B.; Sullivan, Charles T.; Watts, Michael W.; Blain, Matthew G.; Dodd, Paul E.; Dondero, Richard D.; Garcia, Ernest J.; Galambos, Paul; Hetherington, Dale L.; Hudgens, James J.

Abstract not provided.

Fabrication techniques for creating a thermally isolated TM-FPA (thermal microphotonic focal plane array)

Proceedings of SPIE - The International Society for Optical Engineering

Watts, Michael W.; Watts, Michael W.; Nielson, Gregory N.

A novel fabrication strategy has produced optical microring-resonator-based thermal detectors. The detectors are based on the thermo-optic effect and are thermally isolated from a silicon wafer substrate so as to maximize the temperature excursion for a given amount of incident radiation and minimize the impact of thermal phonon noise. The combination of high-Q, thermal isolation, and lack of Johnson noise offers thermal microphotonic detectors the potential to achieve significantly greater room temperature sensitivity than standard bolometric techniques. Several batch fabrication strategies were investigated for producing thermal microphotonic detectors using waveguide materials such as LPCVD Silicon Nitride (Si3N4) on Oxide and Silicon on Insulator (SOI). Fabrication challenges and loss reduction strategies will be presented along with some initial infrared detection results.

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18 Results
18 Results