Publications

The effects of H{sub 2}O vapor introduced during focused ion beam (FIB) milling of diamond(100) are examined. In particular, we determine the yield, surface morphology, and microstructural damage that results from FIB sputtering and H{sub 2}O-assisted FIB milling processes. Experiments involving 20 keV Ga{sup +} bombardment to doses {approx}10{sup 18} ions/cm{sup 2} are conducted at a number of fixed ion incidence angles, {theta}. For each {theta} selected, H{sub 2}O-assisted ion milling shows an increased material removal rate compared with FIB sputtering (no gas assist). The amount by which the yield is enhanced depends on the angle of incidence with the largest difference occurring at {theta} = 75{sup o}. Experiments that vary pixel dwell time from 3 {micro}s to 20 ms while maintaining a fixed H{sub 2}O gas pressure demonstrate the additional effect of beam scan rate on yield for gas-assisted processes. Different surface morphologies develop during ion bombardment depending on the angle of ion incidence and the presence/absence of H{sub 2}O. In general, a single mode of ripples having a wave vector aligned with the projection of the ion beam vector forms for {theta} as high as 70{sup o}. H{sub 2}O affects this morphology by lowering the ripple onset angle and decreasing the ripple wavelength. At high angles of incidence ({theta} > 70{sup o}) a step/terrace morphology is observed. H{sub 2}O-assisted milling at {theta} > 70{sup o} results in a smoother stepped surface compared with FIB sputtering. Transmission electron microscopy shows that the amorphized thickness is reduced by 20% when using H{sub 2}O-assisted FIB milling.

This paper presents techniques for fabricating microscopic, curvilinear features in a variety of workpiece materials. Micro-grooving and micro-threading tools having cutting widths as small as 13 {micro}m are made by focused ion beam sputtering and used for ultra-precision machining. Tool fabrication involves directing a 20 keV gallium beam at polished cylindrical punches made of cobalt M42 high-speed steel or C2 tungsten carbide to create a number of critically aligned facets. Sputtering produces rake facets of desired angle and cutting edges having radii of curvature equal to 0.4 {micro}m. Clearance for minimizing frictional drag of a tool results from a particular ion beam/target geometry that accounts for the sputter yield dependence on incidence angle. It is believed that geometrically specific cutting tools of this dimension have not been made previously. Numerically controlled, ultra-precision machining with micro-grooving tools results in a close match between tool width and feature size. Microtools are used to machine 13 {micro}m wide, 4 {micro}m deep, helical grooves in polymethyl methacrylate and 6061 Al cylindrical workplaces. Micro-grooving tools are also used to fabricate sinusoidal cross-section features in planar metal samples.