VCSELs for Interferometric Readout of MEMS Sensors
Abstract not provided.
Publications
VCSELs for interferometric readout of MEMS sensors
Proceedings of SPIE - The International Society for Optical Engineering
We report on the development of single-frequency VCSELs (vertical-cavity surface-emitting lasers) for sensing the position of a moving MEMS (micro-electro-mechanical system) object with resolution much less than 1nm. Position measurement is the basis of many different types of MEMS sensors, including accelerometers, gyroscopes, and pressure sensors. Typically, by switching from a traditional capacitive electronic readout to an interferometric optical readout, the resolution can be improved by an order of magnitude with a corresponding improvement in MEMS sensor performance. Because the VCSEL wavelength determines the scale of the position measurement, laser wavelength (frequency) stability is desirable. This paper discusses the impact of VCSEL amplitude and frequency noise on the position measurement.
Liquid Cell in-situ TEM Capabilities for Lithium Battery Materials
Abstract not provided.
Liquid Electrochemistry in a TEM: Lithium Cycling
Abstract not provided.
Efficient fiber-to-chip coupling enabling on-chip quantum optics
Abstract not provided.
5 Results