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Active and Nonreciprocal Radio-Frequency Acoustic Microsystems

Hackett, Lisa A.; Siddiqui, Aleem M.; Dominguez, Daniel D.; Douglas, James K.; Tauke-Pedretti, Anna; Friedmann, Thomas A.; Peake, Gregory M.; Arterburn, Shawn C.; Miller, Michael R.; Eichenfield, Matthew S.

Radio frequency (RF) devices are becoming more multi-band, increasing the number of filters and other front-end components while simultaneously pushing towards reduced cost, size, weight, and power (CSWaP). One approach to reducing CSWaP is to augment the achievable functionalities of electromechanical/acoustic filtering chips to include "active" and nonlinear functionalities, such as gain and mixing. The acoustoelectric (AE) effect could enable such active acoustic wave devices. We have examined the AE effect with a leaky surface acoustic wave (LSAW) in a monolithic structure of epitaxial indium gallium arsenide (In GaAs) on lithium niobate (LiNb0 3 ). This lead to experimentally demonstrated state-of-the-art SAW amplifier performance in terms of gain per acoustic wavelength, reduced power consumption, and increased power efficiency. We quantitatively compare the amplifier performance to previous notable works and discuss the outlook of active acoustic wave components using this material platform. Ultimately, this could lead to smaller, higher-performance RF signal processors for communications applications.

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Large Acoustoelectric Effect in Wafer Bonded Indium Gallium Arsenide / Lithium Niobate Heterostructure Augmented by Novel Gate Control

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Siddiqui, Aleem M.; Hackett, Lisa A.; Dominguez, Daniel D.; Tauke-Pedretti, Anna; Friedmann, Thomas A.; Peake, Gregory M.; Miller, Michael R.; Douglas, James K.; Eichenfield, Matthew S.

This paper demonstrates a monolithic surface acoustic wave amplifier fabricated by state-of-the-art heterogenous integration of a IH-V InGaAs-based epitaxial material stack and LiNb03. Due to the superior properties of the materials employed, we observe electron gain and also non-reciprocal gain in excess of 30dB with reduced power consumption. Additionally, we present a framework for performance optimization as a function of material parameters for a targeted gain. This platform enables further advances in active and non-reciprocal piezoelectric acoustic devices.

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Optimization of Si-photonics compatible AlN waveguides for integrated nonlinear optics applications

Optics InfoBase Conference Papers

Siddiqui, Aleem M.; Dominguez, Daniel D.; Michael, Christopher M.; Sims, Ryan; Stanfield, Paul S.; Hackett, Lisa A.; Leenheer, Andrew J.; Eichenfield, Matthew S.

We explore fabrication-process dependencies on optical losses of AlN films and demonstrate Second Harmonic Generation through modal phase-matching in integrated AlN waveguides. A loss-dependent conversion efficiency model is developed to better design waveguides in lossy AlN media.

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9 Results
9 Results