Publications
Damage of MEMS thermal actuators heated by laser irradiation
Progress in Biomedical Optics and Imaging - Proceedings of SPIE
Damage of MEMS thermal actuators heated by laser irradiation
Polysilicon MEMS opto-thermal actuator design and performance
Anomalies in the theory of viscous energy losses due to shear in rotational MEMS resonators
5 Results