Progress in the Development of Bulk Nitrides for High Power Electronics
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This report summarizes a brief and unsuccessful attempt to grow indium nitride via the electrochemical solution growth method and a modification thereof. Described in this report is a brief effort using a $50,000 LDRD award to explore the possibilities of applying the Electrochemical Solution Growth (ESG) technique to the growth of indium nitride (InN). The ability to grow bulk InN would be exciting from a scientific perspective, and a commercial incentive lies in the potential of extending the ESG technique to grow homogeneous, bulk alloys of In{sub x}Ga{sub 1-x}N for light emitting diodes (LEDs) operating in the green region of the spectrum. Indium nitride is the most difficult of the III-nitrides to grow due to its very high equilibrium vapor pressure of nitrogen1. It is several orders of magnitude higher than for gallium nitride or aluminum nitride. InN has a bandgap energy of 0.7eV, and achieving its growth in bulk for large area, high quality substrates would permit the fabrication of LEDs operating in the infrared. By alloying with GaN and AlN, the bulk material used as substrates would enable high efficiency emission wavelengths that could be tailored all the way through the deep ultraviolet. In addition, InN has been shown to have very high electronic mobilities (2700 cm{sup 2}/V s), making it a promising material for transistors and even terahertz emitters. Several attempts at synthesizing InN have been made by several groups. It was shown that metallic indium does not interact with unactivated nitrogen even at very high temperatures. Thus sets up an incompatibility between the precursors in all growth methods: a tradeoff between thermally activating the nitrogen-containing precursor and the low decomposition temperature of solid InN. We have been working to develop a novel growth technique that circumvents the difficulties of other bulk growth techniques by precipitating the column III nitrides from a solvent, such as a molten chloride salt, that provides an excellent host environment for the gallium nitride and indium nitride precursors. In particular, we have found that molten halide salts can solubilize both gallium (Ga{sup 3+}) and nitride (N{sup 3-}) ions without reacting with them to the extent that they are no longer available for reaction with each other. Literature reports indicate measured nitride ion concentrations in LiCl at 650 C as high as 10 mol% - a sufficient concentration to yield growth rates on the order of 0.1 to {approx}1 mm/hr under diffusion-limited growth conditions. Also, molten salts are compatible with the 400-1200 C temperatures likely to be necessary for growth of high-quality single-crystal III-nitrides. Since they can be worked with at (or close to) atmospheric pressure, scalability is not a problem and manufacturability issues are thus minimized, including capital equipment costs. Although the III-nitrides cannot be float-zone refined to remove impurities due to their high melting temperatures and vapor pressures, the salts can be, thus reducing sources of impurities before growth begins. Finally, the molten salts offer a number of pathways to improve the solubility and control the growth of the III-nitrides by functioning as an electrolyte in electrochemical processes. We have already demonstrated growth of wurtzite GaN particles ranging from 0.2 to 0.9 mm in two hours in our laboratory using these techniques. It was the goal of this work to extend this ESG approach to the growth of indium nitride. The hope was that the abundance of the activated form of nitrogen, namely the triply-charged nitride ion (N{sup -3}) would enable the facile growth of InN in solution at low temperatures.
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Journal of Crystal Growth
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Article for Compound Semiconductor Magazine in the UK
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An atmospheric pressure approach to growth of bulk group III-nitrides is outlined. Native III-nitride substrates for optoelectronic and high power, high frequency electronics are desirable to enhance performance and reliability of these devices; currently, these materials are available in research quantities only for GaN, and are unavailable in the case of InN. The thermodynamics and kinetics of the reactions associated with traditional crystal growth techniques place these activities on the extreme edges of experimental physics. The novel techniques described herein rely on the production of the nitride precursor (N{sup 3-}) by chemical and/or electrochemical methods in a molten halide salt. This nitride ion is then reacted with group III metals in such a manner as to form the bulk nitride material. The work performed during the period of funding (February 2006-September 2006) focused on establishing that mass transport of GaN occurs in molten LiCl, the construction of a larger diameter electrochemical cell, the design, modification, and installation of a made-to-order glove box (required for handling very hygroscopic LiCl), and the feasibility of using room temperature molten salts to perform nitride chemistry experiments.
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