Publications
High aspect ratio silicon template fabrication for 100 keV X-ray phase contrast imaging
Fabrication of extreemly high aspect ratio diffraction gratings for X-ray phase contrast imaging
LIGA based very HAR Gratings for XPCI Fabrication enabled by Electrochemical Technique
Ceramic additive manufacturing of a simple plano mirror
Proceedings - 34th ASPE Annual Meeting
Lithographic Development Endpoint Detection Using Electrochemical Techniques
Enhanced Lithography Using an Electrochemical Technique to Monitor the Endpoint
7 Results