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LTCC thick film process characterization

IMAPS/ACerS 12th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2016

Girardi, M.A.; Peterson, K.A.; Vianco, Paul T.

Low temperature cofired ceramic (LTCC) technology has proven itself in military/space electronics, wireless communication, microsystems, medical and automotive electronics, and sensors. The use of LTCC for high frequency applications is appealing due to its low losses, design flexibility and packaging and integration capability. The LTCC thick film process is summarized including some unconventional process steps such as feature machining in the unfired state and thin film definition of outer layer conductors. The LTCC thick film process was characterized to optimize process yields by focusing on these factors: 1) Print location, 2) Print thickness, 3) Drying of tapes and panels, 4) Shrinkage upon firing, and 5) Via topography. Statistical methods were used to analyze critical process and product characteristics in the determination towards that optimization goal.

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Maintaining Low Voiding Solder Die Attach for Power Die While Minimizing Die Tilt

Hamm, Randy H.; Peterson, K.A.

This paper addresses work to minimize voiding and die tilt in solder attachment of a large power die, measuring 9.0 mm X 6.5 mm X 0.1 mm (0.354” x 0.256” x 0.004”), to a heat spreader. As demands for larger high power die continue, minimizing voiding and die tilt is of interest for improved die functionality, yield, manufacturability, and reliability. High-power die generate considerable heat, which is important to dissipate effectively through control of voiding under high thermal load areas of the die while maintaining a consistent bondline (minimizing die tilt). Voiding was measured using acoustic imaging and die tilt was measured using two different optical measurement systems. 80Au-20Sn solder reflow was achieved using a batch vacuum solder system with optimized fixturing. Minimizing die tilt proved to be the more difficult of the two product requirements to meet. Process development variables included tooling, weight and solder preform thickness.

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Stress and strain modeling of low temperature cofired ceramic (LTCC) seal frame and lid

IMAPS/ACerS 11th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2015

Krueger, Daniel; Porter, John; Peterson, K.A.

Low temperature cofired ceramic (LTCC) is established as an excellent packaging technology for high reliability, high density microelectronics. LTCC multichip modules (MCMs) comprising both 'surface mount' and 'chip and wire' technologies provide additional customization for performance. Long term robustness of the packages is impacted by the selection of seal frame and lid materials used to enclose the components inside distinct rooms in LTCC MCMs. An LTCC seal frame and lid combination has been developed that is capable of meeting the sealing and electromagnetic shielding requirements of MCMs. This work analyzes the stress and strain performance of various seal frame and lid materials, sealing materials, and configurations. The application for the MCM will impact selection of the seal frame, lid, and sealing materials based on this analysis.

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Laser ablation of thin films on LTCC

Proceedings - 2014 47th International Symposium on Microelectronics, IMAPS 2014

Girardi, M.A.; Peterson, K.A.; Vianco, Paul T.; Grondin, R.; Wieliczka, D.

Direct Digital Manufacturing techniques such as laser ablation are proposed for the fabrication of lower cost, miniaturized, and lightweight integrated assemblies with high performance requirements. This paper investigates the laser ablation of a Ti/Cu/Pt/Au thin film metal stack on fired low temperature cofired ceramic (LTCC) surfaces using a 355 nm Nd.YAG diode pumped laser ablation system. It further investigates laser ablation applications using unfil ed, or 'green', LTCC materials: (1) through one layer of a laminated stack of unfiled LTCC tape to a buried thick film conductor ground plane, and (2) in unfiled Au thick films. The UV laser power profile and part fixturing were optimized to address defects such as LTCC microcracking, thin film adhesion failures, and redeposition of Cu and Pt. An alternate design approach to minimize ablation time was tested for efficiency in manufacture. Multichip Modules (MCM) were tested for solder ability', solder leach resistance, and wire bondabilify. Scanning election microscopy (SEM) as well as cross sections and microanalytical techniques were used in this study.

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14 Results
14 Results