Degradation of Monolayers Coatings used in Silicon Microsystems Wiehn, Joshua S.; Ohlhausen, J.A. Abstract not provided. More Details TYPE Conference YEAR 2005 OSTI
Characterization of monolayer surface treatments for MEMS exposed to possible back-end-of-line conditions Dugger, Michael T.; Wiehn, Joshua S. Abstract not provided. More Details TYPE Conference YEAR 2004 OSTI
Investigation of electrical contact resistance and adhesion of deposited films for microscale device surfaces Dickrell, Daniel J.; Wiehn, Joshua S.; Dugger, Michael T. Abstract not provided. More Details TYPE Conference YEAR 2004 OSTI