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Long wavelength interband cascade lasers

Applied Physics Letters

Massengale, J.A.; Shen, Yixuan; Yang, Rui Q.; Hawkins, Samuel D.; Klem, John F.

InAs-based interband cascade lasers (ICLs) can be more easily adapted toward long wavelength operation than their GaSb counterparts. Devices made from two recent ICL wafers with an advanced waveguide structure are reported, which demonstrate improved device performance in terms of reduced threshold current densities for ICLs near 11 μm or extended operating wavelength beyond 13 μm. The ICLs near 11 μm yielded a significantly reduced continuous wave (cw) lasing threshold of 23 A/cm2 at 80 K with substantially increased cw output power, compared with previously reported ICLs at similar wavelengths. ICLs made from the second wafer incorporated an innovative quantum well active region, comprised of InAsP layers, and lased in the pulsed-mode up to 120 K at 13.2 μm, which is the longest wavelength achieved for III-V interband lasers.

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An All-Dielectric Polaritonic Metasurface with a Giant Nonlinear Optical Response

Nano Letters

Sarma, Raktim S.; Xu, Jiaming X.; de Ceglia, Domenico d.; Carletti, Luca C.; Campione, Salvatore; Klem, John F.; Sinclair, Michael B.; Belkin, Mikhail B.; Brener, Igal B.

Enhancing the efficiency of second-harmonic generation using all-dielectric metasurfaces to date has mostly focused on electromagnetic engineering of optical modes in the meta-atom. Further advances in nonlinear conversion efficiencies can be gained by engineering the material nonlinearities at the nanoscale, however this cannot be achieved using conventional materials. Semiconductor heterostructures that support resonant nonlinearities using quantum engineered intersubband transitions can provide this new degree of freedom. By simultaneously optimizing the heterostructures and meta-atoms, we experimentally realize an all-dielectric polaritonic metasurface with a maximum second-harmonic generation power conversion factor of 0.5 mW/W2 and power conversion efficiencies of 0.015% at nominal pump intensities of 11 kW/cm2. These conversion efficiencies are higher than the record values reported to date in all-dielectric nonlinear metasurfaces but with 3 orders of magnitude lower pump power. Our results therefore open a new direction for designing efficient nonlinear all-dielectric metasurfaces for new classical and quantum light sources.

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Extreme Nonlinearities in All Dielectric Polaritonic Metasurfaces

2021 15th International Congress on Artificial Materials for Novel Wave Phenomena, Metamaterials 2021

Sarma, Raktim S.; Xu, J.; De Ceglia, D.; Carletti, L.; Klem, John F.; Sinclair, Michael B.; Belkin, M.A.; Brener, Igal B.

We demonstrate an extremely nonlinear all-dielectric metasurface that employs intersubband polaritons to achieve a second-harmonic conversion coefficient of 5 x 10-4 W-1 and second-harmonic power conversion efficiency of 0.015% at nominal pump intensities of 11 kW/cm2. Furthermore, through heterostructure design, we achieve microscopic control of the nonlinearity and demonstrate suppression or enhancement of second-harmonic generation by controlling the polarity of the resonant χ(2).

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Recombination rate analysis in long minority carrier lifetime mid-wave infrared InGaAs/InAsSb superlattices

Journal of Applied Physics

Carrasco, Rigo A.; Morath, Christian P.; Grant, Perry C.; Ariyawansa, Gamini; Stephenson, Chad A.; Kadlec, Clark N.; Hawkins, Samuel D.; Klem, John F.; Shaner, Eric A.; Steenbergen, Elizabeth H.; Schaefer, Stephen T.; Johnson, Shane R.; Webster, Preston T.

Gallium is incorporated into the strain-balanced In(Ga)As/InAsSb superlattice system to achieve the same mid-wave infrared cutoff tunability as conventional Ga-free InAs/InAsSb type-II superlattices, but with an additional degree of design freedom to enable optimization of absorption and transport properties. Time-resolved photoluminescence measurements of InGaAs/InAsSb superlattice characterization- and doped device structures are reported from 77 to 300 K and compared to InAs/InAsSb. The low-injection photoluminescence decay yields the minority carrier lifetime, which is analyzed with a recombination rate model, enabling the determination of the temperature-dependent Shockley-Read-Hall, radiative, and Auger recombination lifetimes and extraction of defect energy levels and capture cross section defect concentration products. The Shockley-Read-Hall-limited lifetime of undoped InGaAs/InAsSb is marginally reduced from 2.3 to 1.4 μs due to the inclusion of Ga; however, given that Ga improves the vertical hole mobility by a factor of >10×, a diffusion-limited InGaAs/InAsSb superlattice nBn could expect a lower bound of 2.5× improvement in diffusion length with significant impact on photodetector quantum efficiency and radiation hardness. At temperatures below 120 K, the doped device structures are Shockley-Read-Hall limited at 0.5 μs, which shows promise for detector applications.

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Strong Coupling in All-Dielectric Intersubband Polaritonic Metasurfaces

Nano Letters

Sarma, Raktim S.; Nookala, Nishant; Reilly, Kevin J.; Liu, Sheng; De Ceglia, Domenico; Carletti, Luca; Goldflam, Michael G.; Campione, Salvatore; Sapkota, Keshab R.; Green, Huck; Wang, George T.; Klem, John F.; Sinclair, Michael B.; Belkin, Mikhail A.; Brener, Igal B.

Mie-resonant dielectric metasurfaces are excellent candidates for both fundamental studies related to light-matter interactions and for numerous applications ranging from holography to sensing to nonlinear optics. To date, however, most applications using Mie metasurfaces utilize only weak light-matter interaction. Here, we go beyond the weak coupling regime and demonstrate for the first time strong polaritonic coupling between Mie photonic modes and intersubband (ISB) transitions in semiconductor heterostructures. Furthermore, along with demonstrating ISB polaritons with Rabi splitting as large as 10%, we also demonstrate the ability to tailor the strength of strong coupling by engineering either the semiconductor heterostructure or the photonic mode of the resonators. Unlike previous plasmonic-based works, our new all-dielectric metasurface approach to generate ISB polaritons is free from ohmic losses and has high optical damage thresholds, thereby making it ideal for creating novel and compact mid-infrared light sources based on nonlinear optics.

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Extended-short-wavelength infrared AlInAsSb and InPAsSb detectors on InAs

Proceedings of SPIE - The International Society for Optical Engineering

Klem, John F.; Olesberg, Jonathon T.; Hawkins, Samuel D.; Weiner, P.H.; Deitz, Julia D.; Kadlec, C.N.; Shaner, Eric A.; Coon, W.T.

We have fabricated and characterized AlInAsSb- and InPAsSb-absorber nBn infrared detectors with 200 K cutoff wavelengths from 2.55 to 3.25 μm. Minority-carrier lifetimes determined by microwave reflectance measurements were 0.2-1.0 μs in doped n-type absorber materials. Devices having 4 μm thick absorbers exhibited sharp cutoff at wavelengths of 2.9 μm or longer and softer cutoff at shorter wavelengths. Top-illuminated devices with n+ InAs window/contact layers had external quantum efficiencies of 40-50% without anti-reflection coating at 50 mV reverse bias and wavelengths slightly shorter than cutoff. Despite the shallow-etch mesa nBn design, perimeter currents contributed significantly to the 200 K dark current. Dark currents for InPAsSb devices were lower than AlInAsSb devices with similar cutoff wavelengths. For unoptimized InPAsSb devices with 2.55 μm cutoff, 200 K areal and perimeter dark current densities at -0.2 V bias in devices of various sizes were approximately 1x10-7 A/cm2 and 1.4x10-8 A/cm, respectively.

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Nanoantenna-Enhanced Resonant Detectors for Improved Infrared Detector Performance

Goldflam, Michael G.; Anderson, Evan M.; Fortune, Torben R.; Klem, John F.; Hawkins, Samuel D.; Davids, Paul D.; Campione, Salvatore; Pung, Aaron J.; Webster, Preston T.; Weiner, Phillip H.; Finnegan, Patrick S.; Wendt, Joel R.; Wood, Michael G.; Haines, Chris H.; Coon, Wesley T.; Olesberg, Jonathon T.; Shaner, Eric A.; Kadlec, Clark N.; Beechem, Thomas E.; Sinclair, Michael B.; Tauke-Pedretti, Anna; Kim, Jin K.; Peters, D.W.

Abstract not provided.

Monolithically fabricated tunable long-wave infrared detectors based on dynamic graphene metasurfaces

Applied Physics Letters

Goldflam, Michael G.; Ruiz, Isaac R.; Howell, S.W.; Tauke-Pedretti, Anna; Anderson, Evan M.; Wendt, J.R.; Finnegan, P.; Hawkins, Samuel D.; Coon, W.; Fortune, Torben R.; Shaner, Eric A.; Kadlec, Clark N.; Olesberg, Jonathon T.; Klem, John F.; Webster, Preston T.; Sinclair, Michael B.; Kim, Jin K.; Peters, D.W.; Beechem, Thomas E.

Here, the design, fabrication, and characterization of an actively tunable long-wave infrared detector, made possible through direct integration of a graphene-enabled metasurface with a conventional type-II superlattice infrared detector, are reported. This structure allows for post-fabrication tuning of the detector spectral response through voltage-induced modification of the carrier density within graphene and, therefore, its plasmonic response. These changes modify the transmittance through the metasurface, which is fabricated monolithically atop the detector, allowing for spectral control of light reaching the detector. Importantly, this structure provides a fabrication-controlled alignment of the metasurface filter to the detector pixel and is entirely solid-state. Using single pixel devices, relative changes in the spectral response exceeding 8% have been realized. These proof-of-concept devices present a path toward solid-state hyperspectral imaging with independent pixel-to-pixel spectral control through a voltage-actuated dynamic response.

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Experimental Evidence of the Lorentz-Like Effective Medium Resonance in Semiconductor Hyperbolic Metamaterials Using Strong Coupling to Plasmonic Metasurfaces

IEEE Transactions on Antennas and Propagation

Campione, Salvatore; Klem, John F.; Liu, Sheng; Montano, Ines; Sinclair, Michael B.; Luk, Ting S.

The Lorentz-like effective medium resonance (LEMR) exhibited by the longitudinal effective permittivity of semiconductor hyperbolic metamaterials (SHMs) has been known for some time. However, direct observation of this resonance proved to be difficult. Herein, we experimentally demonstrate its existence by strongly coupling SHMs to plasmonic metasurfaces. We consider four strong coupling implementations of SHMs that exhibit different LEMR absorption profiles (both in frequency and in strength) to validate our approach.

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Determination of background doping polarity of unintentionally doped semiconductor layers

Applied Physics Letters

Fink, D.R.; Lee, S.; Kodati, S.H.; Rogers, V.; Ronningen, T.J.; Winslow, M.; Grein, C.H.; Jones, A.H.; Campbell, J.C.; Klem, John F.; Krishna, S.

We present a method of determining the background doping type in semiconductors using capacitance-voltage measurements on overetched double mesa p-i-n or n-i-p structures. Unlike Hall measurements, this method is not limited by the conductivity of the substrate. By measuring the capacitance of devices with varying top and bottom mesa sizes, we were able to conclusively determine which mesa contained the p-n junction, revealing the polarity of the intrinsic layer. This method, when demonstrated on GaSb p-i-n and n-i-p structures, concluded that the material is residually doped p-type, which is well established by other sources. The method was then applied to a 10 monolayer InAs/10 monolayer AlSb superlattice, for which the doping polarity was unknown, and indicated that this material is also p-type.

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Determination of background doping type in type-II superlattice using capacitance-voltage measurements with double mesa structure

Proceedings of SPIE - The International Society for Optical Engineering

Fink, D.R.; Lee, S.; Kodati, S.H.; Dahiya, V.; Ronningen, T.J.; Winslow, M.; Grein, C.H.; Jones, A.H.; Campbell, J.C.; Klem, John F.; Krishna, S.

We present a method of determining the background doping type in semiconductors using capacitance-voltage measurements on overetched double mesa p-i-n or n-i-p structures. Unlike Hall measurements, this method is not limited by the conductivity of the substrate. By measuring the capacitance of devices with varying top and bottom mesa sizes, we were able to conclusively determine which mesa contained the p-n junction, revealing the polarity of the intrinsic layer. This method, when demonstrated on GaSb p-i-n and n-i-p structures, determined that the material is residually doped p-type, which is well established by other sources. The method was then applied on a 10 monolayer InAs/10 monolayer AlSb superlattice, for which the doping polarity was unknown, and indicated that this material is also p-type.

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Extended SWIR InGaAs/GaAsSb type-II superlattice photodetector on InP

Proceedings of SPIE - The International Society for Optical Engineering

Stephenson, Chad A.; Klem, John F.; Olesberg, Jonathon T.; Kadlec, Clark N.; Coon, Wesley T.; Weiner, Phillip H.

An InGaAs/GaAsSb Type-II superlattice is explored as an absorber material for extended short-wave infrared detection. A 10.5 nm period was grown with an InGaAs/GaAsSb thickness ratio of 2 with a target In composition of 46% and target Sb composition of 62%. Cutoff wavelengths near 2.8 μm were achieved with responsivity beyond 3 μm. Demonstrated dark current densities were as low as 1.4 mA/cm2 at 295K and 13 μA/cm2 at 235K at -1V bias. A significant barrier to hole extraction was identified in the detector design that severely limited the external quantum efficiency (EQE) of the detectors. A redesign of the detector that removes that barrier could make InGaAs/GaAsSb very competitive with current commercial HgCdTe and extended InGaAs technology.

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Intersubband Polaritonics in Dielectric Metasurfaces

Sarma, Raktim S.; Sarma, Raktim S.; Nookala, Nishant N.; Nookala, Nishant N.; Kevin, Reilly K.; Kevin, Reilly K.; Liu, Sheng L.; Liu, Sheng L.; Domenico, de C.; Domenico, de C.; Goldflam, Michael G.; Goldflam, Michael G.; Luca, Carletti L.; Luca, Carletti L.; Campione, Salvatore; Campione, Salvatore; Klem, John F.; Klem, John F.; Sinclair, Michael B.; Sinclair, Michael B.; Belkin, Mikhail B.; Belkin, Mikhail B.; Brener, Igal B.; Brener, Igal B.

Abstract not provided.

Microwave Doppler Charge Velocimetry for Narrow and Wide Bandgap Semiconductors

Shaner, Eric A.; Klem, John F.; Stephenson, Chad A.; Kadlec, Clark N.; Goldflam, Michael G.; Wasserman, Daniel W.

Characterization of vertical transport in semiconductor heterostructures is extremely difficult and often impractical. Measurements that are relatively straight forward in lateral transport using Hall methods, such as quantifying carrier density or mobility, have no analog in conventional vertical devices. Doppler charge velocimetry may provide an alternative approach to obtaining transport information. We hypothesize that we can drive vertical currents in structures like heterojunction bipolar transistors or nBn detectors, illuminate them with microwaves, and directly measure the carrier velocities through Doppler shifts imparted on the reflected microwave signal. Some challenges involve providing optical injection and working in the vertical geometry required to extract the desired information. While progress was made to this end, experiments have not yet proved successful. Implications for infrared material characterization are summarized at the end of this document.

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Semiconductor Hyperbolic Metamaterials at the Quantum Limit

Scientific Reports

Montaño, Inès; Campione, Salvatore; Klem, John F.; Beechem, Thomas E.; Wolf, Omri; Sinclair, Michael B.; Luk, Ting S.

We study semiconductor hyperbolic metamaterials (SHMs) at the quantum limit experimentally using spectroscopic ellipsometry as well as theoretically using a new microscopic theory. The theory is a combination of microscopic density matrix approach for the material response and Green’s function approach for the propagating electric field. Our approach predicts absorptivity of the full multilayer system and for the first time allows the prediction of in-plane and out-of-plane dielectric functions for every individual layer constructing the SHM as well as effective dielectric functions that can be used to describe a homogenized SHM.

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Low dissipation spectral filtering using a field-effect tunable III-V hybrid metasurface

Applied Physics Letters

Sarma, Raktim S.; Campione, Salvatore; Goldflam, Michael G.; Shank, Joshua S.; Noh, Jinhyun; Smith, Sean S.; Ye, Peide D.; Sinclair, Michael B.; Klem, John F.; Wendt, J.R.; Ruiz, Isaac R.; Howell, Stephen W.; Brener, Igal B.

Considering the power constrained scaling of silicon complementary metal-oxide-semiconductor technology, the use of high mobility III-V compound semiconductors such as In0.53Ga0.47As in conjunction with high-κ dielectrics is becoming a promising option for future n-type metal-oxide-semiconductor field-effect-transistors. Development of low dissipation field-effect tunable III-V based photonic devices integrated with high-κ dielectrics is therefore very appealing from a technological perspective. In this work, we present an experimental realization of a monolithically integrable, field-effect-tunable, III-V hybrid metasurface operating at long-wave-infrared spectral bands. Our device relies on strong light-matter coupling between epsilon-near-zero (ENZ) modes of an ultra-thin In0.53Ga0.47As layer and the dipole resonances of a complementary plasmonic metasurface. The tuning mechanism of our device is based on field-effect modulation, where we modulate the coupling between the ENZ mode and the metasurface by modifying the carrier density in the ENZ layer using an external bias voltage. Modulating the bias voltage between ±2 V, we deplete and accumulate carriers in the ENZ layer, which result in spectrally tuning the eigenfrequency of the upper polariton branch at 13 μm by 480 nm and modulating the reflectance by 15%, all with leakage current densities less than 1 μA/cm2. Our wavelength scalable approach demonstrates the possibility of designing on-chip voltage-tunable filters compatible with III-V based focal plane arrays at mid- and long-wave-infrared wavelengths.

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Anomalously large resistance at the charge neutrality point in a zero-gap InAs/GaSb bilayer

New Journal of Physics

Yu, W.; Clericò, V.; Fuentevilla, C.H.; Shi, X.; Jiang, Y.; Saha, D.; Lou, W.K.; Chang, K.; Huang, D.H.; Gumbs, G.; Smirnov, D.; Stanton, C.J.; Jiang, Z.; Bellani, V.; Meziani, Y.; Diez, E.; Pan, Wei P.; Hawkins, Samuel D.; Klem, John F.

We report here our recent electron transport results in spatially separated two-dimensional electron and hole gases with nominally degenerate energy subbands, realized in an InAs(10 nm)/GaSb(5 nm) coupled quantum well. We observe a narrow and intense maximum (∼500 kΩ) in the four-terminal resistivity in the charge neutrality region, separating the electron-like and hole-like regimes, with a strong activated temperature dependence above T = 7 K and perfect stability against quantizing magnetic fields. We discuss several mechanisms for that unexpectedly large resistance in this zero-gap semi-metal system including the formation of an excitonic insulator state.

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Sb-induced strain fluctuations in a strained layer superlattice of InAs/InAsSb

Journal of Applied Physics

Kim, Honggyu; Meng, Yifei; Klem, John F.; Hawkins, Samuel D.; Kim, Jin K.; Zuo, Jian M.

We show that Sb substitution for As in a MBE grown InAs/InAsSb strained layer superlattice (SLS) is accompanied by significant strain fluctuations. The SLS was observed using scanning transmission electron microscopy along the [100] zone axis where the cation and anion atomic columns are separately resolved. Strain analysis based on atomic column positions reveals asymmetrical transitions in the strain profile across the SLS interfaces. The averaged strain profile is quantitatively fitted to the segregation model, which yields a distribution of Sb in agreement with the scanning tunneling microscopy result. The subtraction of the calculated strain reveals an increase in strain fluctuations with the Sb concentration, as well as isolated regions with large strain deviations extending spatially over ∼1 nm, which suggest the presence of point defects.

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Integrating Resonant Structures with IR Detectors

Goldflam, Michael G.; Goldflam, Michael G.; Anderson, Evan M.; Anderson, Evan M.; Campione, Salvatore; Campione, Salvatore; Coon, Wesley T.; Coon, Wesley T.; Davids, Paul D.; Davids, Paul D.; Fortune, Torben R.; Fortune, Torben R.; Hawkins, Samuel D.; Hawkins, Samuel D.; Kadlec, Clark N.; Kadlec, Clark N.; Kadlec, Emil A.; Kadlec, Emil A.; Kim, Jin K.; Kim, Jin K.; Klem, John F.; Klem, John F.; Shaner, Eric A.; Shaner, Eric A.; Sinclair, Michael B.; Sinclair, Michael B.; Tauke-Pedretti, Anna; Tauke-Pedretti, Anna; Warne, Larry K.; Warne, Larry K.; Wendt, J.R.; Wendt, J.R.; Beechem, Thomas E.; Beechem, Thomas E.; Howell, Stephen W.; Howell, Stephen W.; McDonald, Anthony E.; McDonald, Anthony E.; Ruiz, Isaac R.; Ruiz, Isaac R.

Abstract not provided.

Improved infrared detection using nanoantennas

International Conference on Optical MEMS and Nanophotonics

Peters, D.W.; Sinclair, Michael B.; Goldflam, Michael G.; Warne, Larry K.; Campione, Salvatore; Kim, Jin K.; Davids, Paul D.; Tauke-Pedretti, Anna; Wendt, J.R.; Klem, John F.; Hawkins, Samuel D.; Parameswaran, Sivasubramanian P.; Coon, W.T.; Keeler, G.A.; Fortune, Torben R.

We examine integration of a patterned metal nanoantenna (or metasurface) directly onto long-wave infrared detectors. These structures show significantly improved external quantum efficiency compared to their traditional counterparts. We will show simulation and experimental results.

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Narrow-Bandgap Interband Cascade Thermophotovoltaic Cells

IEEE Journal of Photovoltaics

Lotfi, Hossein; Li, Lu; Lei, Lin; Yang, Rui Q.; Klem, John F.; Johnson, Matthew B.

We report on the characterization of narrow-bandgap (Eg ≈ 0.4 eV, at 300 K) interband cascade thermophotovoltaic (TPV) devices with InAs/GaSb/AlSb type-II superlattice absorbers. Two device structures with different numbers of stages (two and three) were designed and grown to study the influence of the number of stages and absorber thicknesses on the device performance at high temperatures (300-340 K). Maximum power efficiencies of 9.6% and 6.5% with open-circuit voltages of 800 and 530 mV were achieved in the three- and two-stage devices at 300 K, respectively. These results validate the benefits of a multiple-stage architecture with thin individual absorbers for efficient conversion of infrared radiation into electricity from low-temperature heat sources. Additionally, we developed an effective characterization method, based on an adapted version of Suns-Voc technique, to extract the device series and shunt resistance in these TPV cells.

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Resonantly enhanced infrared detectors based on type-II superlattice absorbers

Goldflam, Michael G.; Goldflam, Michael G.; Campione, Salvatore; Campione, Salvatore; Kadlec, Emil A.; Kadlec, Emil A.; Hawkins, Samuel D.; Hawkins, Samuel D.; Coon, Wesley T.; Coon, Wesley T.; Fortune, Torben R.; Fortune, Torben R.; Parameswaran, Sivasubramanian P.; Parameswaran, Sivasubramanian P.; Keeler, Gordon A.; Keeler, Gordon A.; Klem, John F.; Klem, John F.; Tauke-Pedretti, Anna; Tauke-Pedretti, Anna; Shaner, Eric A.; Shaner, Eric A.; Davids, Paul D.; Davids, Paul D.; Warne, Larry K.; Warne, Larry K.; Wendt, J.R.; Wendt, J.R.; Kim, Jin K.; Kim, Jin K.; Peters, D.W.; Peters, D.W.

Abstract not provided.

Next-generation infrared focal plane arrays for high-responsivity low-noise applications

IEEE Aerospace Conference Proceedings

Goldflam, Michael G.; Hawkins, Samuel D.; Parameswaran, Sivasubramanian P.; Tauke-Pedretti, Anna; Warne, Larry K.; Peters, D.W.; Campione, Salvatore; Coon, W.T.; Keeler, Gordon A.; Shaner, Eric A.; Wendt, J.R.; Kadlec, Emil A.; Fortune, Torben R.; Klem, John F.; Davids, Paul D.; Kim, Jin K.

High-quality infrared focal plane arrays (FPAs) are used in many satellite, astronomical, and terrestrial applications. These applications require highly-sensitive, low-noise FPAs, and therefore do not benefit from advances made in low-cost thermal imagers where reducing cost and enabling high-temperature operation drive device development. Infrared detectors used in FPAs have been made for decades from alloys of mercury cadmium telluride (MCT). These infrared detectors are nearing the believed limit of their performance. This limit, known in the infrared detector community as Rule 07, dictates the dark current floor for MCT detectors, in their traditional architecture, for a given temperature and cutoff wavelength. To overcome the bounds imposed by Rule 07, many groups are working on detector compounds other than MCT. We focus on detectors employing III-V-based gallium-free InAsSb superlattice active regions while also changing the basic architecture of the pixel to improve signal-to-noise. Our architecture relies on a resonant, metallic, subwavelength nanoantenna patterned on the absorber surface, in combination with a Fabry-Pérot cavity, to couple the incoming radiation into tightly confined modes near the nanoantenna. This confinement of the incident energy in a thin layer allows us to greatly reduce the volume of the absorbing layer to a fraction of the free-space wavelength, yielding a corresponding reduction in dark current from spontaneously generated electron-hole pairs in the absorber material. This architecture is detector material agnostic and could be applied to MCT detector structures as well, although we focus on using superlattice antimonide-based detector materials. This detector concept has been applied to both mid-wave (3-5 μm) and longwave (8-12 μm) infrared detectors and absorbers. Here we examine long-wave devices, as these detectors currently have a larger gap between desired device performance and that of currently existing detectors. The measured structures show an external quantum efficiency exceeding 50%. We present a comparison of the modeled and measured photoresponse of these detectors and compare these detectors to currently available commercial detectors using relevant metrics such as external quantum efficiency. We also discuss modeling of crosstalk between adjacent pixels and its influence on the potential for a dual-wavelength detector. Finally, we evaluate potential advances in these detectors that may occur in the near future.

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Enhanced infrared detectors using resonant structures combined with thin type-II superlattice absorbers

Applied Physics Letters

Goldflam, Michael G.; Kadlec, Emil A.; Olson, B.V.; Klem, John F.; Hawkins, Samuel D.; Parameswaran, Sivasubramanian P.; Coon, W.T.; Keeler, Gordon A.; Fortune, Torben R.; Tauke-Pedretti, Anna; Wendt, J.R.; Shaner, Eric A.; Davids, Paul D.; Kim, Jin K.; Peters, D.W.

We examined the spectral responsivity of a 1.77 μm thick type-II superlattice based long-wave infrared detector in combination with metallic nanoantennas. Coupling between the Fabry-Pérot cavity formed by the semiconductor layer and the resonant nanoantennas on its surface enables spectral selectivity, while also increasing peak quantum efficiency to over 50%. Electromagnetic simulations reveal that this high responsivity is a direct result of field-enhancement in the absorber layer, enabling significant absorption in spite of the absorber's subwavelength thickness. Notably, thinning of the absorbing material could ultimately yield lower photodetector noise through a reduction in dark current while improving photocarrier collection efficiency. The temperature- and incident-angle-independent spectral response observed in these devices allows for operation over a wide range of temperatures and optical systems. This detector paradigm demonstrates potential benefits to device performance with applications throughout the infrared.

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Directional and monochromatic thermal emitter from epsilon-near-zero conditions in semiconductor hyperbolic metamaterials

Scientific Reports

Campione, Salvatore; Marquier, Francois; Hugonin, Jean P.; Ellis, A.R.; Klem, John F.; Sinclair, Michael B.; Luk, Ting S.

The development of novel thermal sources that control the emission spectrum and the angular emission pattern is of fundamental importance. In this paper, we investigate the thermal emission properties of semiconductor hyperbolic metamaterials (SHMs). Our structure does not require the use of any periodic corrugation to provide monochromatic and directional emission properties. We show that these properties arise because of epsilon-near-zero conditions in SHMs. The thermal emission is dominated by the epsilon-near-zero effect in the doped quantum wells composing the SHM. Furthermore, different properties are observed for s and p polarizations, following the characteristics of the strong anisotropy of hyperbolic metamaterials.

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Evidence of a Shockley-Read-Hall Defect State Independent of Band-Edge Energy in InAs/In(As,Sb) Type-II Superlattices

Physical Review Applied

Aytac, Yigit A.; Olson, Ben O.; Kim, Jin K.; Shaner, Eric A.; Hawkins, Samuel D.; Klem, John F.; Flatte, Michael E.; Boggess, Tom B.

A set of seven InAs/InAsSb type-II superlattices (T2SLs) were designed to have speci c bandgap energies between 290 meV (4.3 m) and 135 meV (9.2 m) in order to study the e ects of the T2SL bandgap energy on the minority carrier lifetime. A temperature dependent optical pump-probe technique is used to measure the carrier lifetimes, and the e ect of a mid-gap defect level on the carrier recombination dynamics is reported. The Shockley-Read-Hall (SRH) defect state is found to be at energy of approximately -250 12 meV relative to the valence band edge of bulk GaSb for the entire set of T2SL structures, even though the T2SL valence band edge shifts by 155 meV on the same scale. These results indicate that the SRH defect state in InAs/InAsSb T2SLs is singular and is nearly independent of the exact position of the T2SL bandgap or band edge energies. They also suggest the possibility of engineering the T2SL structure such that the SRH state is removed completely from the bandgap, a result that should signi cantly increase the minority carrier lifetime.

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Thermal Design and Characterization of Heterogeneously Integrated InGaP/GaAs HBTs

IEEE Transactions on Components, Packaging and Manufacturing Technology

Choi, Sukwon; Peake, Gregory M.; Keeler, Gordon A.; Geib, K.M.; Briggs, R.D.; Beechem, Thomas E.; Shaffer, Ryan A.; Clevenger, Jascinda C.; Patrizi, G.A.; Klem, John F.; Tauke-Pedretti, Anna; Nordquist, Christopher N.

Flip-chip heterogeneously integrated n-p-n InGaP/GaAs heterojunction bipolar transistors (HBTs) with integrated thermal management on wide-bandgap AlN substrates followed by GaAs substrate removal are demonstrated. Without thermal management, substrate removal after integration significantly aggravates self-heating effects, causing poor $I$-$V$ characteristics due to excessive device self-heating. An electrothermal codesign scheme is demonstrated that involves simulation (design), thermal characterization, fabrication, and evaluation. Thermoreflectance thermal imaging, electrical-temperature sensitive parameter-based thermometry, and infrared thermography were utilized to assess the junction temperature rise in HBTs under diverse configurations. In order to reduce the thermal resistance of integrated devices, passive cooling schemes assisted by structural modification, i.e., positioning indium bump heat sinks between the devices and the carrier, were employed. By implementing thermal heat sinks in close proximity to the active region of flip-chip integrated HBTs, the junction-to-baseplate thermal resistance was reduced over a factor of two, as revealed by junction temperature measurements and improvement of electrical performance. The suggested heterogeneous integration method accounts for not only electrical but also thermal requirements providing insight into realization of advanced and robust III-V/Si heterogeneously integrated electronics.

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Short-wavelength interband cascade infrared photodetectors operating above room temperature

Journal of Applied Physics

Lotfi, Hossein; Li, Lu; Lei, Lin; Jiang, Yuchao; Yang, Rui Q.; Klem, John F.; Johnson, Matthew B.

High temperature operation (250-340 K) of short-wavelength interband cascade infrared photodetectors (ICIPs) with InAs/GaSb/Al0.2In0.8Sb/GaSb superlattice absorbers has been demonstrated with a 50% cutoff wavelength of 2.9 μm at 300 K. Two ICIP structures, one with two and the other with three stages, were designed and grown to explore this multiple-stage architecture. At λ = 2.1 μm, the two- and three-stage ICIPs had Johnson-noise-limited detectivities of 5.1 × 109 and 5.8 × 109cm Hz1/2/W, respectively, at 300 K. The better device performance of the three-stage ICIP over the two-stage ICIP confirmed the advantage of more stages for this cascade architecture. An Arrhenius activation energy of 450 meV is extracted for the bulk resistance-area product, which indicates the dominance of the diffusion current at these high temperatures.

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Recent developments in interband cascade infrared photodetectors

Proceedings of SPIE - The International Society for Optical Engineering

Lotfi, Hossein; Li, Lu; Lei, Lin; Ye, Hao; Rassel, Sm S.; Jiang, Yuchao; Yang, Rui Q.; Klem, John F.; Mishima, Tetsuya D.; Santos, Michael B.; Johnson, Matthew B.; Gupta, James A.

We investigate high-temperature and high-frequency operation of interband cascade infrared photodetectors (ICIPs)-two critical properties. Short-wavelength ICIPs with a cutoff wavelength of 2.9 μm had Johnson-noise limited detectivity of 5.8×109 cmHz1/2/W at 300 K, comparable to the commercial Hg1-xCdxTe photodetectors of similar wavelengths. A simple but effective method to estimate the minority carrier diffusion length in short-wavelength ICIPs is introduced. Using this approach, the diffusion length was estimated to be significantly shorter than 1 μm at high temperatures, indicating the importance of a multiple-stage photodetector (e.g., ICIPs) at high temperatures. Recent investigations on the high-frequency operation of mid-wavelength ICIPs (λc=4.3 μm) are discussed. These photodetectors had 3-dB bandwidths up to 1.3 GHz with detectivities exceeding 1x109 cmHz1/2/W at room temperature. These results validate the ability of ICIPs to achieve high bandwidths with large sensitivity and demonstrate the great potential for applications such as: heterodyne detection, and free-space optical communication.

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Auger recombination in long-wave infrared InAs/InAsSb type-II superlattices

Applied Physics Letters

Olson, B.V.; Grein, C.H.; Kim, Jin K.; Kadlec, Emil A.; Klem, John F.; Hawkins, Samuel D.; Shaner, Eric A.

The Auger lifetime is a critical intrinsic parameter for infrared photodetectors as it determines the longest potential minority carrier lifetime and consequently the fundamental limitations to their performance. Here, Auger recombination is characterized in a long-wave infrared InAs/InAsSb type-II superlattice. Auger coefficients as small as 7.1 × 10 - 26 cm6/s are experimentally measured using carrier lifetime data at temperatures in the range of 20 K-80 K. The data are compared to Auger-1 coefficients predicted using a 14-band K · p electronic structure model and to coefficients calculated for HgCdTe of the same bandgap. The experimental superlattice Auger coefficients are found to be an order-of-magnitude smaller than HgCdTe.

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Minority carrier lifetime and dark current measurements in mid-wavelength infrared InAs0.91Sb0.09 alloy nBn photodetectors

Applied Physics Letters

Olson, B.V.; Kim, Jin K.; Kadlec, Emil A.; Klem, John F.; Hawkins, Samuel D.; Leonhardt, Darin L.; Coon, W.T.; Fortune, Torben R.; Cavaliere, Melissa A.; Tauke-Pedretti, Anna; Shaner, Eric A.

Carrier lifetime and dark current measurements are reported for a mid-wavelength infrared InAs0.91Sb0.09 alloy nBn photodetector. Minority carrier lifetimes are measured using a non-contact time-resolved microwave technique on unprocessed portions of the nBn wafer and the Auger recombination Bloch function parameter is determined to be |F1F2|=0.292. The measured lifetimes are also used to calculate the expected diffusion dark current of the nBn devices and are compared with the experimental dark current measured in processed photodetector pixels from the same wafer. Excellent agreement is found between the two, highlighting the important relationship between lifetimes and diffusion currents in nBn photodetectors.

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Epsilon-near-zero modes for tailored light-matter interaction

Physical Review Applied

Campione, Salvatore; Liu, Sheng L.; Benz, Alexander; Klem, John F.; Sinclair, Michael B.; Brener, Igal B.

Epsilon-near-zero (ENZ) modes arising from condensed-matter excitations such as phonons and plasmons are a new path for tailoring light-matter interactions at the nanoscale. Complex spectral shaping can be achieved by creating such modes in nanoscale semiconductor layers and controlling their interaction with multiple, distinct, dipole resonant systems. Examples of this behavior are presented at midinfrared frequencies for ENZ modes that are strongly coupled to metamaterial resonators and simultaneously strongly coupled to semiconductor phonons or quantum-well intersubband transitions (ISTs), resulting in double- and triple-polariton branches in transmission spectra. For the double-polariton branch case, we find that the best strategy to maximize the Rabi splitting is to use a combination of a doped layer supporting an ENZ feature and a layer supporting ISTs, with overlapping ENZ and IST frequencies. This design flexibility renders this platform attractive for low-voltage tunable filters, light-emitting diodes, and efficient nonlinear composite materials.

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Giant supercurrent states in a superconductor-InAs/GaSb-superconductor junction

Journal of Applied Physics

Shi, Xiaoyan S.; Yu, Wenlong; Jiang, Zhigang; Andrei Bernevig, B.; Pan, Wei P.; Hawkins, Samuel D.; Klem, John F.

Superconductivity in topological materials has attracted a great deal of interest in both electron physics and material sciences since the theoretical predictions that Majorana fermions can be realized in topological superconductors. Topological superconductivity could be realized in a type II, band-inverted, InAs/GaSb quantum well if it is in proximity to a conventional superconductor. Here, we report observations of the proximity effect induced giant supercurrent states in an InAs/GaSb bilayer system that is sandwiched between two superconducting tantalum electrodes to form a superconductor-InAs/GaSb-superconductor junction. Electron transport results show that the supercurrent states can be preserved in a surprisingly large temperature-magnetic field (T - H) parameter space. In addition, the evolution of differential resistance in T and H reveals an interesting superconducting gap structure.

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Temperature-dependent optical measurements of the dominant recombination mechanisms in InAs/InAsSb type-2 superlattices

Journal of Applied Physics

Olson, Benjamin V.; Shaner, Eric A.; Kim, Jin K.; Hawkins, Samuel D.; Klem, John F.; Boggoss, Thomas F.; Flatte, Michael E.; Aytac, Yigit A.

We present that temperature-dependent measurements of carrier recombination rates using a time-resolved optical pump-probe technique are reported for mid-wave infrared InAs/InAs1-xSbx type-2 superlattices (T2SLs). By engineering the layer widths and alloy compositions, a 16 K band-gap of ~235 ± 10 meV was achieved for five unintentionally and four intentionally doped T2SLs. Carrier lifetimes were determined by fitting lifetime models based on Shockley-Read-Hall (SRH), radiative, and Auger recombination processes to the temperature and excess carrier density dependent data. The minority carrier (MC), radiative, and Auger lifetimes were observed to generally increase with increasing antimony content and decreasing layer thickness for the unintentionally doped T2SLs. The MC lifetime is limited by SRH processes at temperatures below 200 K in the unintentionally doped T2SLs. The extracted SRH defect energy levels were found to be near mid-bandgap. Additionally, it is observed that the MC lifetime is limited by Auger recombination in the intentionally doped T2SLs with doping levels greater than n ~1016 cm-3.

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McMillan-Rowell like oscillations in a superconductor-InAs/GaSb-superconductor junction

Applied Physics Letters

Shi, Xiaoyan S.; Yu, Wenlong; Hawkins, Samuel D.; Klem, John F.; Pan, Wei P.

We have fabricated a superconductor (Ta)-InAs/GaSb bilayer-superconductor (Ta) junction device that has a long mean free path and can preserve the wavelike properties of particles (electrons and holes) inside the junction. Differential conductance measurements were carried out at low temperatures in this device, and McMillan-Rowell like oscillations (MROs) were observed. Surprisingly, a much larger Fermi velocity, compared to that from Shubnikov-de Haas oscillations, was obtained from the frequency of MROs. Possible mechanisms are discussed for this discrepancy.

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Monolayer-by-monolayer compositional analysis of InAs/InAsSb superlattices with cross-sectional STM

Journal of Crystal Growth

Wood, M.R.; Kanedy, K.; Lopez, F.; Weimer, M.; Klem, John F.; Hawkins, Samuel D.; Shaner, Eric A.; Kim, Jin K.

We use cross-sectional scanning tunneling microscopy (STM) to reconstruct the monolayer-by-monolayer composition profile across a representative subset of MBE-grown InAs/InAsSb superlattice layers and find that antimony segregation frustrates the intended compositional discontinuities across both antimonide-on-arsenide and arsenide-on-antimonide heterojunctions. Graded, rather than abrupt, interfaces are formed in either case. We likewise find that the incorporated antimony per superlattice period varies measurably from beginning to end of the multilayer stack. Although the intended antimony discontinuities predict significant discrepancies with respect to the experimentally observed high-resolution x-ray diffraction spectrum, dynamical simulations based on the STM-derived profiles provide an excellent quantitative match to all important aspects of the x-ray data.

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Phased-array sources based on nonlinear metamaterial nanocavities

Nature Communications

Wolf, Omri W.; Campione, Salvatore; Benz, Alexander; Ravikumar, Arvind P.; Liu, Sheng L.; Luk, Ting S.; Kadlec, Emil A.; Shaner, Eric A.; Klem, John F.; Sinclair, Michael B.; Brener, Igal B.

Coherent superposition of light from subwavelength sources is an attractive prospect for the manipulation of the direction, shape and polarization of optical beams. This phenomenon constitutes the basis of phased arrays, commonly used at microwave and radio frequencies. Here we propose a new concept for phased-array sources at infrared frequencies based on metamaterial nanocavities coupled to a highly nonlinear semiconductor heterostructure. Optical pumping of the nanocavity induces a localized, phase-locked, nonlinear resonant polarization that acts as a source feed for a higher-order resonance of the nanocavity. Varying the nanocavity design enables the production of beams with arbitrary shape and polarization. As an example, we demonstrate two second harmonic phased-array sources that perform two optical functions at the second harmonic wavelength (∼5μm): a beam splitter and a polarizing beam splitter. Proper design of the nanocavity and nonlinear heterostructure will enable such phased arrays to span most of the infrared spectrum.

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Tailored light-matter interaction through epsilon-near- zero modes

CLEO: QELS - Fundamental Science, CLEO_QELS 2015

Campione, Salvatore; Liu, Sheng L.; Benz, Alexander; Klem, John F.; Sinclair, Michael B.; Brener, Igal B.

We use epsilon-near-zero modes in semiconductor nanolayers to design a system whose spectral properties are controlled by their interaction with multi-dipole resonances. This design flexibility renders our platform attractive for efficient nonlinear composite materials. © OSA 2015.

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Intensity- and Temperature-Dependent Carrier Recombination in InAs/InAs1-x S bx Type-II Superlattices

Physical Review Applied

Olson, B.V.; Kadlec, Emil A.; Kim, Jin K.; Klem, John F.; Hawkins, Samuel D.; Shaner, Eric A.; Flatté, M.E.

Time-resolved measurements of carrier recombination are reported for a midwave infrared InAs/InAs0.66Sb0.34 type-II superlattice (T2SL) as a function of pump intensity and sample temperature. By including the T2SL doping level in the analysis, the Shockley-Read-Hall (SRH), radiative, and Auger recombination components of the carrier lifetime are uniquely distinguished at each temperature. SRH is the limiting recombination mechanism for excess carrier densities less than the doping level (the low-injection regime) and temperatures less than 175 K. A SRH defect energy of 95 meV, either below the T2SL conduction-band edge or above the T2SL valence-band edge, is identified. Auger recombination limits the carrier lifetimes for excess carrier densities greater than the doping level (the high-injection regime) for all temperatures tested. Additionally, at temperatures greater than 225 K, Auger recombination also limits the low-injection carrier lifetime due to the onset of the intrinsic temperature range and large intrinsic carrier densities. Radiative recombination is found to not have a significant contribution to the total lifetime for all temperatures and injection regimes, with the data implying a photon recycling factor of 15. Using the measured lifetime data, diffusion currents are calculated and compared to calculated Hg1-xCdxTe dark current, indicating that the T2SL can have a lower dark current with mitigation of the SRH defect states. These results illustrate the potential for InAs/InAs1-xSbx T2SLs as absorbers in infrared photodetectors.

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Control of strong light-matter coupling using the capacitance of metamaterial nanocavities

Nano Letters

Benz, Alexander; Campione, Salvatore; Klem, John F.; Sinclair, Michael B.; Brener, Igal B.

Metallic nanocavities with deep subwavelength mode volumes can lead to dramatic changes in the behavior of emitters placed in their vicinity. This collocation and interaction often leads to strong coupling. Here, we present for the first time experimental evidence that the Rabi splitting is directly proportional to the electrostatic capacitance associated with the metallic nanocavity. The system analyzed consists of different metamaterial geometries with the same resonance wavelength coupled to intersubband transitions in quantum wells.

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Metamaterials strongly coupled to intersubband transitions: Circuit model and second order nonlinear processes

2014 IEEE Photonics Conference, IPC 2014

Campione, Salvatore; Benz, Alexander; Wolf, Omri W.; Klem, John F.; Capolino, Filippo; Sinclair, Michael B.; Brener, Igal B.

We present an electrodynamic model of strongly coupled metamaterial/intersubband-transition systems that can be used to predict and maximize Rabi splittings. This model can also be used to optimize metamaterial structures that enhance second-order nonlinear processes.

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Superconducting proximity effect in inverted InAs/GaSb quantum well structures with Ta electrodes

Applied Physics Letters

Yu, Wenlong; Jiang, Yuxuan; Huan, Chao; Chen, Xunchi; Jiang, Zhigang; Hawkins, Samuel D.; Klem, John F.; Pan, Wei P.

We present our recent electronic transport results in top-gated InAs/GaSb quantum well hybrid structures with superconducting Ta electrodes. We show that the transport across the InAs-Ta junction depends largely on the interfacial transparency, exhibiting distinct zero-bias behavior. For a relatively resistive interface, a broad conductance peak is observed at zero bias. When a transparent InAs-Ta interface is achieved, a zero-bias conductance dip appears with two coherent-peak-like features forming at bias voltages corresponding to the superconducting gap of Ta. The conductance spectra of the transparent InAs-Ta junction at different gate voltages can be fit well using the standard Blonder-Tinkham-Klapwijk theory.

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Search for Majorana fermions in topological superconductors

Pan, Wei P.; Shi, Xiaoyan S.; Hawkins, Samuel D.; Klem, John F.

The goal of this project is to search for Majorana fermions (a new quantum particle) in a topological superconductor (a new quantum matter achieved in a topological insulator proximitized by an s-wave superconductor). Majorana fermions (MFs) are electron-like particles that are their own anti-particles. MFs are shown to obey non-Abelian statistics and, thus, can be harnessed to make a fault-resistant topological quantum computer. With the arrival of topological insulators, novel schemes to create MFs have been proposed in hybrid systems by combining a topological insulator with a conventional superconductor. In this LDRD project, we will follow the theoretical proposals to search for MFs in one-dimensional (1D) topological superconductors. 1D topological superconductor will be created inside of a quantum point contact (with the metal pinch-off gates made of conventional s-wave superconductors such as niobium) in a two-dimensional topological insulator (such as inverted type-II InAs/GaSb heterostructure).

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Doping-tunable thermal emission from plasmon polaritons in semiconductor epsilon-near-zero thin films

Applied Physics Letters

Jun, Young C.; Luk, Ting S.; Robert Ellis, A.; Klem, John F.; Brener, Igal B.

We utilize the unique dispersion properties of leaky plasmon polaritons in epsilon-near-zero (ENZ) thin films to demonstrate thermal radiation control. Owing to its highly flat dispersion above the light line, a thermally excited leaky wave at the ENZ frequency out-couples into free space without any scattering structures, resulting in a narrowband, wide-angle, p-polarized thermal emission spectrum. We demonstrate this idea by measuring angle- and polarization-resolved thermal emission spectra from a single layer of unpatterned, doped semiconductors with deep-subwavelength film thickness (d / λ 0 ∼ 6 × 10 - 3, where d is the film thickness and λ 0 is the free space wavelength). We show that this semiconductor ENZ film effectively works as a leaky wave thermal radiation antenna, which generates far-field radiation from a thermally excited mode. The use of semiconductors makes the radiation frequency highly tunable by controlling doping densities and also facilitates device integration with other components. Therefore, this leaky plasmon polariton emission from semiconductor ENZ films provides an avenue for on-chip control of thermal radiation.

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Wafer-level step-stressing of InGaP/GaAs HBTs

ECS Transactions

Baca, A.G.; Kotobi, Joshua A.; Fortune, Torben R.; Gorenz, Alan G.; Klem, John F.; Briggs, R.D.; Clevenger, Jascinda C.; Patrizi, G.A.

Wafer-level step-stress experiments on high voltage Npn InGaP/GaAs HBTs are presented. A methodology utilizing brief, monotonically increasing stresses and periodic, interrupted parametric characterization is presented. The method and various examples of step-stressed HBTs illustrate the value of the technique for screening the reliability of HBT wafers. Degradation modes observed in these InGaP/GaAs HBTs closely correspond to a subset of those in other, longer types of reliability experiments and can be relevant in a reliability screen. A statistical sampling of HBT wafers reveals a consistently realized critical destructive limit over a very narrow power range, which indicates that thermal stress is the main cause of degradation. When stepped just shy of the destructive limit, electrical characteristics are capable of revealing gradual degradation. The end state of stressing typically involves shorting of both the base-emitter and base-collector junctions. Interrupted characterization revealed cases where baseemitter shorts preceded base-collector shorts and other cases where base-collector shorts occurred first. Examples of degradation include reductions in reverse breakdown voltage, increases in the offset voltage, and drops in current gain. These wafer-level stepstress techniques show promise for reducing the large time lag between wafer fabrication and useful reliability screening in HBTs.

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Quantum-engineered interband cascade photovoltaic devices

Proceedings of SPIE - The International Society for Optical Engineering

Klem, John F.

Quantum-engineered multiple stage photovoltaic (PV) devices are explored based on InAs/GaSb/AlSb interband cascade (IC) structures. These ICPV devices employ multiple discrete absorbers that are connected in series by widebandgap unipolar barriers using type-II heterostructure interfaces for facilitating carrier transport between cascade stages similar to IC lasers. The discrete architecture is beneficial for improving the collection efficiency and for spectral splitting by utilizing absorbers with different bandgaps. As such, the photo-voltages from each individual cascade stage in an ICPV device add together, creating a high overall open-circuit voltage, similar to conventional multi-junction tandem solar cells. Furthermore, photo-generated carriers can be collected with nearly 100% efficiency in each stage. This is because the carriers travel over only a single cascade stage, designed to be shorter than a typical diffusion length. The approach is of significant importance for operation at high temperatures where the diffusion length is reduced. Here, we will present our recent progress in the study of ICPV devices, which includes the demonstration of ICPV devices at room temperature and above with narrow bandgaps (e.g. 0.23 eV) and high open-circuit voltages. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

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Nanoantenna-enabled midwave infrared focal plane arrays

Proceedings of SPIE - The International Society for Optical Engineering

Peters, D.W.; Reinke, Charles M.; Davids, Paul D.; Klem, John F.; Leonhardt, Darin L.; Wendt, J.R.; Kim, Jin K.; Samora, S.

We demonstrate the effects of integrating a nanoantenna to a midwave infrared (MWIR) focal plane array (FPA). We model an antenna-coupled photodetector with a nanoantenna fabricated in close proximity to the active material of a photodetector. This proximity allows us to take advantage of the concentrated plasmonic fields of the nanoantenna. The role of the nanoantenna is to convert free-space plane waves into surface plasmons bound to a patterned metal surface. These plasmonic fields are concentrated in a small volume near the metal surface. Field concentration allows for a thinner layer of absorbing material to be used in the photodetector design and promises improvements in cutoff wavelength and dark current (higher operating temperature). While the nanoantenna concept may be applied to any active photodetector material, we chose to integrate the nanoantenna with an InAsSb photodiode. The geometry of the nanoantenna-coupled detector is optimized to give maximal carrier generation in the active region of the photodiode, and fabrication processes must be altered to accommodate the nanoantenna structure. The intensity profiles and the carrier generation rates in the photodetector active layers are determined by finite element method simulations, and iteration between optical nanoantenna simulation and detector modeling is used to optimize the device structure. © 2012 SPIE.

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Comparison of nBn and nBp mid-wave barrier infrared photodetectors

Proceedings of SPIE - The International Society for Optical Engineering

Klem, John F.; Kim, Jin K.; Cich, M.J.; Hawkins, Samuel D.; Fortune, T.R.; Rienstra, Jeffrey L.

We have fabricated mid-wave infrared photodetectors containing InAsSb absorber regions and AlAsSb barriers in n-barrier-n (nBn) and n-barrier-p (nBp) configurations, and characterized them by current-voltage, photocurrent, and capacitance-voltage measurements in the 100-200 K temperature range. Efficient collection of photocurrent in the nBn structure requires application of a small reverse bias resulting in a minimum dark current, while the nBp devices have high responsivity at zero bias. When biasing both types of devices for equal dark currents, the nBn structure exhibits a differential resistance significantly higher than the nBp, although the nBp device may be biased for arbitrarily low dark current at the expense of much lower dynamic resistance. Capacitance-voltage measurements allow determination of the electron concentration in the unintentionally-doped absorber material, and demonstrate the existence of an electron accumulation layer at the absorber/barrier interface in the nBn device. Numerical simulations of idealized nBn devices demonstrate that photocurrent collection is possible under conditions of minimal absorber region depletion, thereby strongly suppressing depletion region Shockley-Read-Hall generation. © 2010 Copyright SPIE - The International Society for Optical Engineering.

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Characterization of single barrier microrefrigerators at cryogenic temperatures

Journal of Electronic Materials

Wang, X.; Ezzahri, Y.; Bian, Z.; Zebarjadi, M.; Shakouri, A.; Klem, John F.; Patrizi, G.A.; Young, Erik W.; Mukherjee, Sayan M.

The experimental characterization of single barrier heterostructure thermionic cooling devices at cryogenic temperatures is reported. The device studied was a cylindrical InGaAs microrefrigerator, in which the active layer was a 1 μm thick In 0.527Al 0.218Ga 0.255As heterostructure barrier with n-type doping concentration of 6.68 × 10 16 cm -3 and an In 0.53Ga 0.47As emitter/collector of 5 × 10 18 cm -3 n-doping. A full field thermoreflectance imaging technique was used to measure the distribution of temperature change on the device's top surface when different current excitation values were applied. By reversing the current direction, we studied the device's behavior in both cooling and heating regimes. At an ambient temperature of 100 K, a maximum cooling of 0.6 K was measured. This value was approximately one-third of the measured maximum cooling value at room temperature (1.8 K). The paper describes the device's structure and the first reported thermal imaging at cryogenic temperatures using the thermoreflectance technique. © 2009 The Author(s).

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Growth, fabrication, and characterization of high-speed 1550-nm S-SEEDs for all-optical logic

ECS Transactions

Keeler, Gordon A.; Serkland, Darwin K.; Overberg, Mark E.; Klem, John F.; Geib, K.M.; Clevenger, Jascinda C.; Hsu, Alan Y.; Hadley, G.R.

We describe recent advances in the development of 1550-nm symmetric self-electrooptic effect devices (S-SEEDs). S-SEEDs are semiconductor optoelectronic devices used to implement ultrafast all-optical logic functions: for optical fiber communication applications. In this paper, basic S-SEED operation is described, followed by a detailed explanation of the optimization techniques used to improve DC and high-speed performance in these long wavelength devices. Both epitaxial strain and quantum well design are shown to be important for S-SEEDs grown in the InAlGaAs quaternary material system. The device fabrication approach is outlined, and DC electrical and optical performance is discussed. Finally, we describe the high-speed optoelectronic measurements used to determine S-SEED switching characteristics. The devices described herein are the first known S-SEEDs to operate at telecommunications- compatible wavelengths and demonstrate record switching speeds with rail-to-rail switching rates faster than 6 picoseconds. © The Electrochemical Society.

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Microfabricated wire arrays for Z-pinch

Cich, Michael C.; Klem, John F.; Spahn, Olga B.; Peake, Gregory M.; Rowen, Adam M.; Nash, Thomas J.

Microfabrication methods have been applied to the fabrication of wire arrays suitable for use in Z. Self-curling GaAs/AlGaAs supports were fabricated as an initial route to make small wire arrays (4mm diameter). A strain relief structure that could be integrated with the wire was designed to allow displacements of the anode/cathode connections in Z. Electroplated gold wire arrays with integrated anode/cathode bus connections were found to be sufficiently robust to allow direct handling. Platinum and copper plating processes were also investigated. A process to fabricate wire arrays on any substrate with wire thickness up to 35 microns was developed. Methods to handle and mount these arrays were developed. Fabrication of wire arrays of 20mm diameter was demonstrated, and the path to 40mm array fabrication is clear. With some final investment to show array mounting into Z hardware, the entire process to produce a microfabricated wire array will have been demonstrated.

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Improved manufacturability of AlGaAs/GaAs Pnp heterojunction bipolar transistors

ECS Transactions

Clevenger, J.B.; Patrizi, G.A.; Peterson, T.C.; Cich, M.J.; Baca, A.G.; Klem, John F.; Plut, Thomas A.; Fortune, T.R.; Hightower, M.S.; Torres, D.; Hawkins, Samuel D.; Sullivan, Charles T.

Specially designed Pnp heterojunction bipolar transistors (HBT's) in the AlGaAs/GaAs material system can offer improved radiation response over commercially-available silicon bipolar junction transistors (BJT's). To be a viable alternative to the silicon Pnp BJT, improvements to the manufacturability of the HBT were required. Utilization of a Pd/Ge/Au non-spiking ohmic contact to the base and implementation of a PECVD silicon nitride hard mask for wet etch control were the primary developments that led to a more reliable fabrication process. The implementation of the silicon nitride hard mask and the subsequent process improvements increased the average electrical yield from 43% to 90%. © The Electrochemical Society.

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Final report on LDRD project : single-photon-sensitive imaging detector arrays at 1600 nm

Serkland, Darwin K.; Childs, Kenton D.; Koudelka, Robert K.; Geib, K.M.; Klem, John F.; Hawkins, Samuel D.; Patel, Rupal K.

The key need that this project has addressed is a short-wave infrared light detector for ranging (LIDAR) imaging at temperatures greater than 100K, as desired by nonproliferation and work for other customers. Several novel device structures to improve avalanche photodiodes (APDs) were fabricated to achieve the desired APD performance. A primary challenge to achieving high sensitivity APDs at 1550 nm is that the small band-gap materials (e.g., InGaAs or Ge) necessary to detect low-energy photons exhibit higher dark counts and higher multiplication noise compared to materials like silicon. To overcome these historical problems APDs were designed and fabricated using separate absorption and multiplication (SAM) regions. The absorption regions used (InGaAs or Ge) to leverage these materials 1550 nm sensitivity. Geiger mode detection was chosen to circumvent gain noise issues in the III-V and Ge multiplication regions, while a novel Ge/Si device was built to examine the utility of transferring photoelectrons in a silicon multiplication region. Silicon is known to have very good analog and GM multiplication properties. The proposed devices represented a high-risk for high-reward approach. Therefore one primary goal of this work was to experimentally resolve uncertainty about the novel APD structures. This work specifically examined three different designs. An InGaAs/InAlAs Geiger mode (GM) structure was proposed for the superior multiplication properties of the InAlAs. The hypothesis to be tested in this structure was whether InAlAs really presented an advantage in GM. A Ge/Si SAM was proposed representing the best possible multiplication material (i.e., silicon), however, significant uncertainty existed about both the Ge material quality and the ability to transfer photoelectrons across the Ge/Si interface. Finally a third pure germanium GM structure was proposed because bulk germanium has been reported to have better dark count properties. However, significant uncertainty existed about the quantum efficiency at 1550 nm the necessary operating temperature. This project has resulted in several conclusions after fabrication and measurement of the proposed structures. We have successfully demonstrated the Ge/Si proof-of-concept in producing high analog gain in a silicon region while absorbing in a Ge region. This has included significant Ge processing infrastructure development at Sandia. However, sensitivity is limited at low temperatures due to high dark currents that we ascribe to tunneling. This leaves remaining uncertainty about whether this structure can achieve the desired performance with further development. GM detection in InGaAs/InAlAs, Ge/Si, Si and pure Ge devices fabricated at Sandia was shown to overcome gain noise challenges, which represents critical learning that will enable Sandia to respond to future single photon detection needs. However, challenges to the operation of these devices in GM remain. The InAlAs multiplication region was not found to be significantly superior to current InP regions for GM, however, improved multiplication region design of InGaAs/InP APDs has been highlighted. For Ge GM detectors it still remains unclear whether an optimal trade-off of parameters can achieve the necessary sensitivity at 1550 nm. To further examine these remaining questions, as well as other application spaces for these technologies, funding for an Intelligence Community post-doc was awarded this year.

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In-situ optical time-domain reflectometry (OTDR) for VCSEL-based communication systems

Proceedings of SPIE - The International Society for Optical Engineering

Keeler, Gordon A.; Serkland, Darwin K.; Geib, K.M.; Klem, John F.; Peake, Gregory M.

Optical lime-domain reflectometry (OTDR) is an effeclive technique for locating faults in fiber communication links. The fact that most OTDR measurements are performed manually is a significant drawback, because it makes them too costly for use in many short-distance networks and too slow for use in military avionic platforms. Here we describe and demonstrate an automated, low-cost, real-time approach to fault monitoring that can be achieved by integrating OTDR functionality directly into VCSEL-based transceivers. This built-in test capability is straightforward to implement and relevant to both multimode and single mode networks. In-situ OTDR uses the transmitter VCSEL already present in data transceivers. Fault monitoring is performed by emitting a brief optical pulse into the fiber and then turning the VCSEL off. If a fault exists, a portion of the optical pulse returns to the transceiver after a time equal to the round-trip delay through the fiber. In multimode OTDR, the signal is detected by an integrated photodetector, while in single mode OTDR the VCSEL itself can be used as a detector. Modified driver electronics perform the measurement and analysis. We demonstrate that VCSEL-based OTDR has sufficient sensitivity to determine the location of most faults commonly seen in short-haul networks (i.e., the Fresnel reflections from improperly terminated fibers and scattering from raggedly-broken fibers). Results are described for single mode and multimode experiments, at both 850 nm and 1.3 μm. We discuss the resolution and sensitivity that have been achieved, as well as expected limitations for this novel approach to network monitoring.

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LDRD final report on high power broadly tunable Mid-IR quantum cascade lasers for improved chemical species detection

Young, Erik W.; Wanke, Michael W.; Klem, John F.; Fuller, Charles T.; Hudgens, James J.

The goal of our project was to examine a novel quantum cascade laser design that should inherently increase the output power of the laser while simultaneously providing a broad tuning range. Such a laser source enables multiple chemical species identification with a single laser and/or very broad frequency coverage with a small number of different lasers, thus reducing the size and cost of laser based chemical detection systems. In our design concept, the discrete states in quantum cascade lasers are replaced by minibands made of multiple closely spaced electron levels. To facilitate the arduous task of designing miniband-to-miniband quantum cascade lasers, we developed a program that works in conjunction with our existing modeling software to completely automate the design process. Laser designs were grown, characterized, and iterated. The details of the automated design program and the measurement results are summarized in this report.

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Development of bottom-emitting 1300-nm vertical-cavity surface-emitting lasers

IEEE Photonics Technology Letters

Louderback, D.A.; Fish, M.A.; Klem, John F.; Serkland, Darwin K.; Choquette, K.D.; Pickrell, G.W.; Stone, R.V.; Guilfoyle, P.S.

We present experimental results on the development of bottom-emitting GaInNAs vertical-cavity surface-emitting lasers (VCSELs) operating at wavelengths near 1300 nm. This development effort is based on the modification of oxide-apertured top-emitting structures to allow emission through the GaAs substrate. Similar device performance was seen in both the top- and bottom-emitting structures. Single-mode output powers (adjusted for substrate absorption) of ∼0.75 mW, with threshold currents of 1.3 mA, were achieved with ∼3.5-μm aperture diameters. Larger multimode devices exhibited a maximum adjusted output power of 2.2 mW. To the best of our knowledge, these are the first bottom-emitting flip-chip compatible 1300-nm VCSELs fabricated with GaInNAs-GaAs active regions.

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III-antimonide/nitride based semiconductors for optoelectronic materials and device studies : LDRD 26518 final report

Peake, Gregory M.; Peake, Gregory M.; Klem, John F.; Modine, N.A.; Waldrip, Karen E.; Kurtz, S.R.; Allerman, A.A.; Jones, E.D.

The goal of this LDRD was to investigate III-antimonide/nitride based materials for unique semiconductor properties and applications. Previous to this study, lack of basic information concerning these alloys restricted their use in semiconductor devices. Long wavelength emission on GaAs substrates is of critical importance to telecommunication applications for cost reduction and integration into microsystems. Currently InGaAsN, on a GaAs substrate, is being commercially pursued for the important 1.3 micrometer dispersion minima of silica-glass optical fiber; due, in large part, to previous research at Sandia National Laboratories. However, InGaAsN has not shown great promise for 1.55 micrometer emission which is the low-loss window of single mode optical fiber used in transatlantic fiber. Other important applications for the antimonide/nitride based materials include the base junction of an HBT to reduce the operating voltage which is important for wireless communication links, and for improving the efficiency of a multijunction solar cell. We have undertaken the first comprehensive theoretical, experimental and device study of this material with promising results. Theoretical modeling has identified GaAsSbN to be a similar or potentially superior candidate to InGaAsN for long wavelength emission on GaAs. We have confirmed these predictions by producing emission out to 1.66 micrometers and have achieved edge emitting and VCSEL electroluminescence at 1.3 micrometers. We have also done the first study of the transport properties of this material including mobility, electron/hole mass, and exciton reduced mass. This study has increased the understanding of the III-antimonide/nitride materials enough to warrant consideration for all of the target device applications.

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Final report on LDRD project 52722 : radiation hardened optoelectronic components for space-based applications

Blansett, Ethan B.; Klem, John F.; Hawkins, Samuel D.; Sanchez, Victoria S.; Sullivan, Charles T.; Wrobel, Theodore F.; Blansett, Ethan B.; Serkland, Darwin K.; Keeler, Gordon A.; Geib, K.M.; Karpen, Gary D.; Diaz, Melissa R.; Peake, Gregory M.; Hargett, Terry H.

This report describes the research accomplishments achieved under the LDRD Project 'Radiation Hardened Optoelectronic Components for Space-Based Applications.' The aim of this LDRD has been to investigate the radiation hardness of vertical-cavity surface-emitting lasers (VCSELs) and photodiodes by looking at both the effects of total dose and of single-event upsets on the electrical and optical characteristics of VCSELs and photodiodes. These investigations were intended to provide guidance for the eventual integration of radiation hardened VCSELs and photodiodes with rad-hard driver and receiver electronics from an external vendor for space applications. During this one-year project, we have fabricated GaAs-based VCSELs and photodiodes, investigated ionization-induced transient effects due to high-energy protons, and measured the degradation of performance from both high-energy protons and neutrons.

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GaAs MOEMS Technology

Spahn, Olga B.; Fuller, Charles T.; Bauer, Thomas M.; Sullivan, Charles T.; Grossetete, Grant G.; Cich, Michael C.; Tigges, Chris P.; Reno, J.L.; Peake, Gregory M.; Klem, John F.

Many MEMS-based components require optical monitoring techniques using optoelectronic devices for converting mechanical position information into useful electronic signals. While the constituent piece-parts of such hybrid opto-MEMS components can be separately optimized, the resulting component performance, size, ruggedness and cost are substantially compromised due to assembly and packaging limitations. GaAs MOEMS offers the possibility of monolithically integrating high-performance optoelectronics with simple mechanical structures built in very low-stress epitaxial layers with a resulting component performance determined only by GaAs microfabrication technology limitations. GaAs MOEMS implicitly integrates the capability for radiation-hardened optical communications into the MEMS sensor or actuator component, a vital step towards rugged integrated autonomous microsystems that sense, act, and communicate. This project establishes a new foundational technology that monolithically combines GaAs optoelectronics with simple mechanics. Critical process issues addressed include selectivity, electrochemical characteristics, and anisotropy of the release chemistry, and post-release drying and coating processes. Several types of devices incorporating this novel technology are demonstrated.

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Low temperature photoluminescence studies of narrow bandgap GaAsSbN quantum wells on GaAs

Materials Research Society Symposium - Proceedings

Waldrip, Karen E.; Jones, E.D.; Modine, N.A.; Jalali, F.; Klem, John F.; Peake, G.M.

We present low-temperature (T = 4K) photoluminescence studies of the effect of adding nitrogen to 6-nm-wide single-strained GaAsSb quantum wells on GaAs. The samples were grown by both MBE and MOCVD techniques. The nominal Sb concentration is about 30%. Adding about 1 to 2% N drastically reduced the bandgap energies from 1 to 0.75 eV, or 1.20 to 1.64 μm. Upon performing ex situ rapid thermal anneals, 825°C for 10s, the band gap energies as well as the photoluminescence intensities increased. The intensities increased by an order of magnitude for the annealed samples and the band gap energies increased by about 50 - 100 meV, depending on growth temperatures. The photoluminescence linewidths tended to decrease upon annealing. Preliminary results of a first-principles band structure calculation for the GaAsSbN system are also presented.

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Continuous wave operation of 1.3 μm vertical cavity InGaAsN quantum well lasers

Conference Digest - IEEE International Semiconductor Laser Conference

Fischer, Arthur J.; Klem, John F.; Choquette, K.D.; Blum, O.; Allerman, A.A.; Fritz, I.J.; Kurtz, S.R.; Breiland, William G.; Sieg, R.; Geib, K.M.; Scott, J.W.; Naone, R.L.

The continuous wave operation of 1.3 μm vertical cavity surface emitting laser (VCSEL) grown on GaAs substrates is achieved up to 55 °C, as motivated by demands of emerging VCSEL network applications. These VCSELs employ the mature AlGaAs/GaAs distributed Bragg reflector mirror technology, including selective oxidation for efficient cavity designs. By incorporating a tunnel junction near the optical cavity, both mirrors are doped n-type, which provides the benefits of low optical loss.

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In-plane magnetophotoluminescence studies of modulation-doped GaAs/AlGaAs coupled double quantum wells

Applied Physics Letters

Kim, Yongmin; Perry, C.H.; Simmons, J.A.; Klem, John F.

In-plane magnetic-field photoluminescence spectra from a series of n-type modulation-doped GaAs/Al0.3Ga0.7As coupled double quantum wells show distinctive doublet structures related to the tunnel-split ground sublevel states. The magnetic-field behavior of the upper transition from the antisymmetric state strongly depends on sample mobility. In a lower mobility sample, the transition energy displays an N-type kink with field (namely, a maximum followed by a minimum), whereas higher mobility samples have a linear dependence. The former is attributed to a coupling mechanism due to homogeneous broadening of the electron and hole states. The results are in good agreement with recent theoretical calculations. © 2000 American Institute of Physics.

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Characteristics of GaAsSb single-quantum-well-lasers emitting near 1.3 μm

IEEE Photonics Technology Letters

Blum, Olga; Klem, John F.

We report data on GaAsSb single-quantum-well lasers grown on GaAs substrates. Room temperature pulsed emission at 1.275 μm in a 1250-μm-long device has been observed. Minimum threshold current densities of 535 A/cm2 were measured in 2000-μm-long lasers. We also measured internal losses of 2-5 cm-1, internal quantum efficiencies of 30%-38% and characteristic temperatures To of 67°C-77°C. From these parameters, a gain constant Go of 1660 cm-1 and a transparency current density Jtr of 134 A/cm2 were calculated. The results indicate the potential for fabricating 1.3-μm vertical-cavity surface-emitting lasers from these materials.

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Room temperature continuous wave InGaAsN quantum well vertical cavity lasers emitting at 1.3 um

Electronic Letters

Choquette, K.D.; Geib, K.M.; Klem, John F.; Fischer, Arthur J.; Spahn, Olga B.; Allerman, A.A.; Fritz, I.J.; Kurtz, S.R.; Breiland, William G.

Selectively oxidized vertical cavity lasers emitting at 1294 nm using InGaAsN quantum wells are reported for the first time which operate continuous wave at and above room temperature. The lasers employ two n-type Al{sub 0.94}Ga{sub 0.06}As/GaAs distributed Bragg reflectors each with a selectively oxidized current aperture adjacent to the optical cavity, and the top output mirror contains a tunnel junction to inject holes into the active region. Continuous wave single mode lasing is observed up to 55 C. These lasers exhibit the longest wavelength reported to date for vertical cavity surface emitting lasers grown on GaAs substrates.

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GaAsSb/InGaAs type-II quantum wells for long-wavelength lasers on GaAs substrates

Journal of Vacuum Science and Technology B

Klem, John F.; Spahn, Olga B.; Kurtz, S.R.; Fritz, I.J.; Choquette, K.D.

The authors have investigated the properties of GaAsSb/InGaAs type-II bilayer quantum well structures grown by molecule beam epitaxy for use in long-wavelength lasers on GaAs substrates. Structures with layer, strains and thicknesses designed to be thermodynamically stable against dislocation formation exhibit room-temperature photoluminescence at wavelengths as long as 1.43 {mu}m. The photoluminescence emission wavelength is significantly affected by growth temperature and the sequence of layer growth (InGaAs/GaAsSb vs GaAsSb/InGaAs), suggesting that Sb and/or In segregation results in non-ideal interfaces under certain growth conditions. At low injection currents, double heterostructure lasers with GaAsSb/InGaAs bilayer quantum well active regions display electroluminescence at wavelengths comparable to those obtained in photoluminescence, but at higher currents the electroluminescence shifts to shorter wavelengths. Lasers have been obtained with threshold current densities as low as 120 A/cm{sup 2} at 1.17 {mu}m, and 2.1 kA/cm{sup 2} at 1.21 {mu}m.

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Compliant substrate technology for dissimilar epitaxy

Floro, Jerrold A.; Follstaedt, D.M.; Klem, John F.

Strained-layer semiconductor films offer tremendous potential with regards to optoelectronic applications for high speed communications, mobile communications, sensing, and novel logic devices. It is an unfortunate reality that many of the possible film/substrate combinations that could be exploited technologically are off limits because of large differences in lattice parameters, chemical compatibilities, or thermal expansion rates. These mechanical, chemical, and thermal incompatibilities manifest themselves primarily in terms of lattice defects such as dislocations and antiphase boundaries, and in some cases through enhanced surface roughness. An additional limitation, from a production point of view, is money. Device manufacturers as a rule want the cheapest substrate possible. Freeing the heteroepitaxial world of the bonds of (near) lattice matching would vastly expand the types of working devices that could be grown. As a result, a great deal of effort has been expended finding schemes to integrate dissimilar film/substrate materials while preserving the perfection of the film layer. One such scheme receiving significant attention lately is the so-called compliant substrate approach.

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A GaAs heterojunction bipolar transistor with 106 V breakdown

Baca, A.G.; Klem, John F.; Ashby, Carol I.; Martin, Dennis C.

A high voltage GaAs HBT with an open-base collector breakdown voltage of 106 V and an open-emitter breakdown voltage of 134 V has been demonstrated. A high quality 9.0 {micro}m thick collector doped to 2.0{times}10{sup 15} cm{sup {minus}3} grown by MBE on a doped GaAs substrate is the key to achieving this breakdown. These results were achieved for HBTs with 4{times}40 {micro}m{sup 2} emitters. DC current gain of 38 at 6,000 A/cm{sup 2} was measured.

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168 Results
168 Results