Tungsten (W) films have many applications in the semiconducting industry for sensor technology. Deposition conditions can significantly impact the resulting W films in terms of the phases present (α-BCC or β-A12), microstructural grain orientation (texture), and residual strain. Tilt-A-Whirl methodology has been employed for the evaluation of a W film showing both texture and residual strain. Sin2(ψ) analysis of the film was performed to quantify the strongly tensile in-plane strain (+0.476%) with an estimated in-plane tensile stress of ~1.9 GPa. The 3D dataset was also evaluated qualitatively via 3D visualization. Visualization of 3D texture/strain data poses challenges due to peak broadening resulting from defocusing of the beam at high ψ tilt angles. To address this issue, principal component analysis (PCA) was employed to diagnose, model, and remove the broadening component from the diffraction data. Evaluation of the raw data and subsequent corrected data (after removal of defocusing effects) has been performed through projection of the data into a virtual 3D environment (via CAD2VR software) to qualitatively detect the impact of residual strain on the observed pole figure.
Staruch, M.; Bennett, S.P.; Matis, B.R.; Baldwin, J.W.; Bussmann, K.; Gopman, D.B.; Kabanov, Y.; Lau, J.W.; Shull, R.D.; Langlois, Eric L.; Arrington, C.; Pillars, Jamin R.; Finkel, P.
Magnetostrictive Co77Fe23 films are fully suspended to produce free-standing, clamped-clamped, microbeam resonators. A negative or positive shift in the resonant frequency is observed for magnetic fields applied parallel or perpendicular to the length of the beam, respectively, confirming the magnetoelastic nature of the shift. Notably, the resonance shifts linearly with higher-bias fields oriented perpendicular to the beam's length. Domain imaging elucidates the distinction in the reversal processes along the easy and hard axes. Together, these results suggest that through modification of the magnetic anisotropy, the frequency shift and angular dependence can be tuned, producing highly magnetic-field-sensitive resonators.
The ability to track nuclear material is a challenge for resiliency of complex systems, e.g., harsh environments. RF tags, frequently used in national security applications, cannot be used for technological, operational, or safety reasons. Magnetic Smart Tags (MaST) is a novel tag technology based on magnetoelastic sensing that circumvents these issues. This technology is enabled by a new, cost-effective, batch manufacturing electrochemical deposition (ECD) process. This new advancement in fabrication enables multi-frequency tags capable of providing millions of possible codes for tag identification unlike existing theft deterrent tags that can convey only a single bit of information. Magnetostrictive 70% Co: 30% Fe was developed as the base alloy comprising the magnetoelastic resonator transduction element. Saturation magnetostriction, S , has been externally measured by the Naval Research Laboratory to be as high as 78 ppm. Description of a novel MEMS variable capacitive test structure is described for future measurements of this parameter.
Recent studies have shown the potential for nanocrystalline metals to possess excellent fatigue resistance compared to their coarse-grained counterparts. Although the mechanical properties of nanocrystalline metals are believed to be particularly susceptible to material defects, a systematic study of the effects of geometric discontinuities on their fatigue performance has not yet been performed. In the present work, nanocrystalline Ni-40 wt%Fe containing both intrinsic and extrinsic defects were tested in tension-tension fatigue. The defects were found to dramatically reduce the fatigue resistance, which was attributed to the relatively high notch sensitivity in the nanocrystalline material. Microstructural analysis within the crack-initiation zones underneath the defects revealed cyclically-induced abnormal grain growth (AGG) as a predominant deformation and crack initiation mechanism during high-cycle fatigue. The onset of AGG and the ensuing fracture is likely accelerated by the stress concentrations, resulting in the reduced fatigue resistance compared to the relatively defect-free counterparts.
Magnetostrictive CoFe films were investigated for use as magnetoelastic tags or sensors. The ability to electrodeposit these films enables batch fabrication processes to pattern a variety of geometries while controlling the film stoichiometry and crystallography. In current research looking at CoFe, improved magnetostriction was achieved using a co-sputtering, annealing, and quenching method1. Other current research has reported electrodeposited CoFe films using a sulfate based chemistry resulting in film compositions that are Fe rich in the range of Co0.3-0.4Fe0.7-0.6 and have problems of codeposition of undesirables that can have a negative impact on magnetic properties. The research presented here focused on maximizing magnetostriction at the optimal stoichiometry range of Co0.7-0.75Fe0.3-0.25, targeting the (fcc+bcc)/bcc phase boundary, and using a novel chemistry and plating parameters to deposit films without being limited to “line of sight” deposition.