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Compound Semiconductor Integrated Photonics for Avionics

Tauke-Pedretti, Anna; Vawter, Gregory A.; Skogen, Erik J.; Alford, Charles A.; Cajas, Florante G.; Overberg, Mark E.; Peake, Gregory M.; Wendt, J.R.; Chow, Weng W.; Lentine, Anthony L.; Nelson, Jeffrey S.; Sweatt, W.C.; Jared, Bradley H.; Resnick, Paul J.; Sanchez, Carlos A.; Pipkin, Jennifer R.; Girard, Gerald R.; Nielson, Greg N.; Cruz-Campa, Jose L.; Okandan, Murat O.

Abstract not provided.

Wavelength Conversion Arrays for Optical and X-Ray Diagnostics at Z

Skogen, Erik J.; Dolan, Daniel H.; Vawter, Gregory A.; Tauke-Pedretti, Anna; Peake, Gregory M.; Alford, Charles A.; Cajas, Florante G.

Optical diagnostics play a central role in dynamic compression research. Currently, streak cameras are employed to record temporal and spectroscopic information in single-event experiments, yet are limited in several ways; the tradeoff between time resolution and total record duration is one such limitation. This project solves the limitations that streak cameras impose on dynamic compression experiments while reducing both cost and risk (equipment and labor) by utilizing standard high-speed digitizers and commercial telecommunications equipment. The missing link is the capability to convert the set of experimental (visible/x-ray) wavelengths to the infrared wavelengths used in telecommunications. In this report, we describe the problem we are solving, our approach, our results, and describe the system that was delivered to the customer. The system consists of an 8-channel visible-to- infrared converter with > 2 GHz 3-dB bandwidth.

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Compound semiconductor photonic integrated circuits at Sandia National Laboratories

2015 IEEE Avionics and Vehicle Fiber-Optics and Photonics Conference, AVFOP 2015

Vawter, Gregory A.

Monolithic photonic integrated circuits (PICs) have a long history reaching back more than 40 years. During that time, and particularly in the past 15 years, the technology has matured and the application space grown to span sophisticated tunable diode lasers, 40 Gb/s electrical-to-optical signal converters with complex data formats, wavelength multiplexors and routers, as well as RF and other sensors. Sandia National Laboratories (SNL) has developed a complete InGaAsP PIC capability supporting the needs of U.S. government that may be of interest to industry. This talk will review the Sandia PIC capability and highlight the unique strengths and applications. Examples will be provided from recent R&D activity.

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Selective layer disordering in intersubband Al0.028Ga0.972 N/AlN superlattices with silicon nitride capping layer

Applied Physics Express

Wierer Jr, Jonathan W.; Allerman, A.A.; Skogen, Erik J.; Tauke-Pedretti, Anna; Vawter, Gregory A.; Montano, Ines M.

We demonstrate the selective layer disordering in intersubband Al0.028Ga0.972 N/AlN superlattices using a silicon nitride (SiNx) capping layer. The (SiNx) capped superlattice exhibits suppressed layer disordering under high-temperature annealing. In addition, the rate of layer disordering is reduced with increased SiNx thickness. The layer disordering is caused by Si diffusion, and the SiNx layer inhibits vacancy formation at the crystal surface and ultimately, the movement of Al and Ga atoms across the heterointerfaces. In conclusion, patterning of the SiNx layer results in selective layer disordering, an attractive method to integrate active and passive III–nitride-based intersubband devices.

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Photonic integration at sandia national laboratories

Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2015

Tauke-Pedretti, Anna; Vawter, Gregory A.; Skogen, Erik J.; Alford, Charles A.; Overberg, Mark E.; Peake, Gregory M.; Cajas, Florante G.

This talk will discuss recent work on photonic integration for applications in optical signal processing, digital logic, and fundamental device research with an emphasis on InP-based photonic integrated circuit technology. © 2015 OSA.

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Layer disordering and doping compensation of an intersubband AlGaN/AlN superlattice by silicon implantation

Applied Physics Letters

Wierer, J.J.; Allerman, A.A.; Skogen, Erik J.; Tauke-Pedretti, Anna; Alford, Charles A.; Vawter, Gregory A.; Montano, Ines M.

Layer disordering and doping compensation of an Al0.028Ga0.972N/AlN superlattice by implantation are demonstrated. The as-grown sample exhibits intersubband absorption at ∼1.56 μm which is modified when subject to a silicon implantation. After implantation, the intersubband absorption decreases and shifts to longer wavelengths. Also, with increasing implant dose, the intersubband absorption decreases. It is shown that both layer disordering of the heterointerfaces and doping compensation from the vacancies produced during the implantation cause the changes in the intersubband absorption. Such a method is useful for removing absorption in spatially defined areas of III-nitride optoelectronic devices by, for example, creating low-loss optical waveguides monolithically that can be integrated with as-grown areas operating as electro-absorption intersubband modulators.

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Wide dynamic range of ring resonator channel-dropping filters with integrated SOAs

Optics InfoBase Conference Papers

Vawter, Gregory A.; Tauke-Pedretti, Anna; Skogen, Erik J.

We present the first complete simulation of the dynamic range and noise of InGaAsP multi-ring channel-drop filters with internal SOAs. The results show gain saturation, and spontaneous emission noise limit the dynamic range. © 2010 Optical Society of America.

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Cascaded double ring resonator filter with integrated SOAs

Optics InfoBase Conference Papers

Tauke-Pedretti, Anna; Vawter, Gregory A.; Skogen, Erik J.; Peake, Gregory M.; Overberg, Mark E.; Alford, Charles; Torres, David; Cajas, Florante; Kalivoda, James

We present a filter consisting of cascaded ring resonators with integrated SOAs. The filter demonstrates an extinction ratio >30 dB, a free spectral range of 56 GHz and a FWHM bandwidth of 3 GHz. © 2010 Optical Society of America.

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Mutual injection locking of monolithically integrated coupled-cavity DBR lasers

IEEE Photonics Technology Letters

Tauke-Pedretti, Anna; Vawter, Gregory A.; Skogen, Erik J.; Peake, Gregory M.; Overberg, Mark E.; Alford, Charles A.; Chow, Weng W.; Yang, Zhenshan Y.; Torres, David; Cajas, Florante

We present a photonic integrated circuit (PIC) composed of two strongly coupled distributed Bragg reflector (DBR) lasers. This PIC utilizes the dynamics of mutual injection locking to increase the relaxation resonance frequency from 3 GHz to beyond 30 GHz. Mutual injection-locking and external injection-locking operation are compared. © 2011 IEEE.

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Cascaded double ring resonator filter with integrated SOAs

2011 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference, OFC/NFOEC 2011

Tauke-Pedretti, Anna; Vawter, Gregory A.; Skogen, Erik J.; Peake, Gregory M.; Overberg, Mark E.; Alford, Charles A.; Torres, David; Cajas, Florante; Kalivoda, James

We present a filter consisting of cascaded ring resonators with integrated SOAs. The filter demonstrates an extinction ratio ≥30 dB, a free spectral range of 56 GHz and a FWHM bandwidth of 3 GHz. © 2011 Optical Society of America.

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Wide dynamic range of ring resonator channel-dropping filters with integrated SOAs

2011 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference, OFC/NFOEC 2011

Vawter, Gregory A.; Tauke-Pedretti, Anna; Skogen, Erik J.

We present the first complete simulation of the dynamic range and noise of InGaAsP multi-ring channel-drop filters with internal SOAs. The results show gain saturation, and spontaneous emission noise limit the dynamic range. © 2011 Optical Society of America.

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Optical logic gates using interconnected photodiodes and electro-absorption modulators

Optics InfoBase Conference Papers

Skogen, Erik J.; Vawter, Gregory A.; Tauke-Pedretti, Anna; Overberg, Mark E.; Peake, Gregory M.; Alford, Charles; Torres, David; Cajas, Florante; Sullivan, Charles T.

We demonstrate an optical gate architecture with optical isolation between input and output using interconnected PD-EAMs to perform AND and NOT functions. Waveforms for 10 Gbps AND and 40 Gbps NOT gates are shown. © 2010 Optical Society of America.

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Enhanced frequency response in monolithically integrated coupled cavity lasers and electro-absorption modulator

Vawter, Gregory A.; Wendt, J.R.; Alford, Charles A.; Skogen, Erik J.; Overberg, Mark E.; Peake, Gregory M.; Chow, Weng W.; Yang, Zhenshan Y.

We present the bandwidth enhancement of an EAM monolithically integrated with two mutually injection-locked lasers. An improvement in the modulation efficiency and bandwidth are shown with mutual injection locking.

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Injection-locked composite lasers for mm-wave modulation : LDRD 117819 final report

Vawter, Gregory A.; Skogen, Erik J.; Chow, Weng W.; Overberg, Mark E.; Peake, Gregory M.; Wendt, J.R.

This report summarizes a 3-year LDRD program at Sandia National Laboratories exploring mutual injection locking of composite-cavity lasers for enhanced modulation responses. The program focused on developing a fundamental understanding of the frequency enhancement previously demonstrated for optically injection locked lasers. This was then applied to the development of a theoretical description of strongly coupled laser microsystems. This understanding was validated experimentally with a novel 'photonic lab bench on a chip'.

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Novel detection methods for radiation-induced electron-hole pairs

Cich, Michael C.; Derzon, Mark S.; Martinez, Marino M.; Nordquist, Christopher N.; Vawter, Gregory A.

Most common ionizing radiation detectors typically rely on one of two general methods: collection of charge generated by the radiation, or collection of light produced by recombination of excited species. Substantial efforts have been made to improve the performance of materials used in these types of detectors, e.g. to raise the operating temperature, to improve the energy resolution, timing or tracking ability. However, regardless of the material used, all these detectors are limited in performance by statistical variation in the collection efficiency, for charge or photons. We examine three alternative schemes for detecting ionizing radiation that do not rely on traditional direct collection of the carriers or photons produced by the radiation. The first method detects refractive index changes in a resonator structure. The second looks at alternative means to sense the chemical changes caused by radiation on a scintillator-type material. The final method examines the possibilities of sensing the perturbation caused by radiation on the transmission of a RF transmission line structure. Aspects of the feasibility of each approach are examined and recommendations made for further work.

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Defining capabilities of Si and InP photonics

Vawter, Gregory A.

Monolithic photonic integrated circuits (PICs) have a long history reaching back more than 40 years. During that time, and particularly in the past 15 years, the technology has matured and the application space grown to span sophisticated tunable diode lasers, 40 Gb/s electrical-to-optical signal converters with complex data formats, wavelength multiplexors and routers, as well as chemical/biological sensors. Most of this activity has centered in recent years on optical circuits built on either Silicon or InP substrates. This talk will review the three classes of PIC and highlight the unique strengths, and weaknesses, of PICs based on Silicon and InP substrates. Examples will be provided from recent R&D activity.

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Micropolarizing device for long wavelength infrared polarization imaging

Kemme, S.A.; Boye, Robert B.; Wendt, J.R.; Vawter, Gregory A.; Cruz-Cabrera, A.A.

The goal of this project is to fabricate a four-state pixelated subwavelength optical device that enables mid-wave infrared (MWIR) or long-wave infrared (LWIR) snapshot polarimetric imaging. The polarization information can help to classify imaged materials and identify objects of interest for numerous remote sensing and military applications. While traditional, sequential polarimetric imaging produces scenes with polarization information through a series of assembled images, snapshot polarimetric imaging collects the spatial distribution of all four Stokes parameters simultaneously. In this way any noise due to scene movement from one frame to the next is eliminated. We fabricated several arrays of subwavelength components for MWIR polarization imaging applications. Each pixel unit of the array consists of four elements. These elements are micropolarizers with three or four different polarizing axis orientations. The fourth element sometimes has a micro birefringent waveplate on the top of one of the micropolarizers. The linear micropolarizers were fabricated by patterning nano-scale metallic grids on a transparent substrate. A large area birefringent waveplate was fabricated by deeply etching a subwavelength structure into a dielectric substrate. The principle of making linear micropolarizers for long wavelengths is based upon strong anisotropic absorption of light in the nano-metallic grid structures. The nano-metallic grid structures are patterned with different orientations; therefore, the micropolarizers have different polarization axes. The birefringent waveplate is a deeply etched dielectric one-dimensional subwavelength grating; therefore two orthogonally polarized waves have different phase delays. Finally, in this project, we investigated the near field and diffractive effects of the subwavelength element apertures upon detection. The fabricated pixelated polarizers had a measured extinction ratios larger than 100:1 for pixel sizes in the order of 15 {micro}m by 15 {micro}m that exceed by 7 times previously reported devices. The fabricated birefringent diffractive waveplates had a total variation of phase delay rms of 9.41 degrees with an average delay of 80.6 degrees across the MWIR spectral region. We found that diffraction effects change the requirement for separation between focal plane arrays (FPA) micropolarizer arrays and birefringent waveplates arrays, originally in the order of hundreds of microns (which are the typical substrate thickness) to a few microns or less. This new requirement leads us to propose new approaches to fabricate these devices.

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Pixilated wideband achromatic waveplates fabricated for the mid IR using subwavelength features

Proceedings of SPIE - The International Society for Optical Engineering

Boye, Robert B.; Kemme, S.A.; Wendt, J.R.; Cruz-Cabrera, A.A.; Vawter, Gregory A.; Alford, C.R.; Carter, T.R.; Samora, S.

Subwavelength diffractive features etched into a substrate lead to form birefringence that can be utilized to produce polarization sensitive elements such as waveplates. Using etched features allows for the development of pixilated devices to be used in conjunction with focal plane arrays in polarimetric imaging systems. Typically, the main drawback from using diffractive devices is their high sensitivity to wavelength. Taking advantage of the dispersion of the form birefringence, diffractive waveplates with good achromatic characteristics can be designed. We will report on diffractive waveplates designed for minimal phase retardation error across the 2-5 micron spectral regime. The required fabrication processes of the sub-wavelength feature sizes will be discussed as well as the achromatic performance and transmission efficiency of final devices. Previous work in this area has produced good results over a subset of this wavelength band, but designing for this extended band is particularly challenging. In addition, the effect of the finite size of the apertures of the pixilated devices is of particular interest since they are designed to be used in conjunction with a detector array. The influence of small aperture sizes will also be investigated.

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Fabrication issues for a chirped, subwavelength form-birefringent polarization splitter

Proceedings of SPIE - The International Society for Optical Engineering

Kemme, S.A.; Wendt, J.R.; Vawter, Gregory A.; Cruz-Cabrera, A.A.; Peters, D.W.; Boye, Robert B.; Alford, C.R.; Carter, T.R.; Samora, S.

We report here on an effort to design and fabricate a polarization splitter that utilizes form-birefringence to disperse an input beam as a function of polarization content as well as wavelength spectrum. Our approach is unique in the polarization beam splitting geometry and the potential for tailoring the polarized beams' phase fronts to correct aberrations or add focusing power. A first cut design could be realized with a chirped duty cycle grating at a single etch depth. However, this approach presents a considerable fabrication obstacle since etch depths are a strong function of feature size, or grating period. We fabricated a period of 1.0 micron form-birefringent component, with a nominal depth of 1.7 microns, in GaAs using a CAIBE system with a 2-inch ion beam source diameter. The gas flows, ion energy, and sample temperature were all optimized to yield the desired etch profile.

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Diffractive Optics in the Infrared (DiOptIR) LDRD 67109 final report

Kemme, S.A.; Peters, D.W.; Shields, Eric A.; Wendt, J.R.; Vawter, Gregory A.

This diffractive optical element (DOE) LDRD is divided into two tasks. In Task 1, we develop two new DOE technologies: (1) a broad wavelength band effective anti-reflection (AR) structure and (2) a design tool to encode dispersion and polarization information into a unique diffraction pattern. In Task 2, we model, design, and fabricate a subwavelength polarization splitter. The first technology is an anti-reflective (AR) layer that may be etched into the DOE surface. For many wavelengths of interest, transmissive silicon DOEs are ideal. However, a significant portion of light (30% from each surface) is lost due to Fresnel reflection. To address this issue, we investigate a subwavelength, surface relief structure that acts as an effective AR coating. The second DOE component technology in Task 1 is a design tool to determine the optimal DOE surface relief structure that can encode the light's degree of dispersion and polarization into a unique spatial pattern. Many signals of interest have unique spatial, temporal, spectral, and polarization signatures. The ability to disperse the signal into a unique diffraction pattern would result in improved signal detection sensitivity with a simultaneous reduction in false alarm. Task 2 of this LDRD project is to investigate the modeling, design, and fabrication of subwavelength birefringent devices for polarimetric spectral sensing and imaging applications. Polarimetric spectral sensing measures the spectrum of the light and polarization state of light at each wavelength simultaneously. The capability to obtain both polarization and spectral information can help develop target/object signature and identify the target/object for several applications in NP&MC and national security.

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Fabrication techniques for low loss silicon nitride waveguides

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Shaw, Michael J.; Guo, Junpeng; Vawter, Gregory A.; Habermehl, Scott D.; Sullivan, Charles T.

Optical waveguide propagation loss due to sidewall roughness, material impurity and inhomogeneity has been the focus of many studies in fabricating planar lightwave circuits (PLC's)1,2,3 In this work, experiments were carried out to identify the best fabrication process for reducing propagation loss in single mode waveguides comprised of silicon nitride core and silicon dioxide cladding material. Sidewall roughness measurements were taken during the fabrication of waveguide devices for various processing conditions. Several fabrication techniques were explored to reduce the sidewall roughness and absorption in the waveguides. Improvements in waveguide quality were established by direct measurement of waveguide propagation loss. The lowest linear waveguide loss measured in these buried channel waveguides was 0.1 dB/cm at a wavelength of 1550 nm. This low propagation loss along with the large refractive index contrast between silicon nitride and silicon dioxide enables high density integration of photonic devices and small PLC's for a variety of applications in photonic sensing and communications.

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High-Q integrated on-chip microring resonator

Proposed for publication in IEEE Photonics Technology Letters.

Vawter, Gregory A.; Hadley, G.R.; Esherick, Peter E.; Sullivan, Charles T.

We report a fully integrated high-Q factor micro-ring resonator using silicon nitride/dioxide on a silicon wafer. The micro-ring resonator is critically coupled to a low loss straight waveguide. An intrinsic quality factor of 2.4 x 10{sup 5} has been measured.

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Microfabrication with femtosecond laser processing : (A) laser ablation of ferrous alloys, (B) direct-write embedded optical waveguides and integrated optics in bulk glasses

Burns, George B.; Palmer, Jeremy A.; Harris, Marc F.; McDaniel, Karen L.; Guo, Junpeng; Vawter, Gregory A.; Tallant, David T.; Griffith, M.L.; Luk, Ting S.

At Sandia National Laboratories, miniaturization dominates future hardware designs, and technologies that address the manufacture of micro-scale to nano-scale features are in demand. Currently, Sandia is developing technologies such as photolithography/etching (e.g. silicon MEMS), LIGA, micro-electro-discharge machining (micro-EDM), and focused ion beam (FIB) machining to fulfill some of the component design requirements. Some processes are more encompassing than others, but each process has its niche, where all performance characteristics cannot be met by one technology. For example, micro-EDM creates highly accurate micro-scale features but the choice of materials is limited to conductive materials. With silicon-based MEMS technology, highly accurate nano-scale integrated devices are fabricated but the mechanical performance may not meet the requirements. Femtosecond laser processing has the potential to fulfill a broad range of design demands, both in terms of feature resolution and material choices, thereby improving fabrication of micro-components. One of the unique features of femtosecond lasers is the ability to ablate nearly all materials with little heat transfer, and therefore melting or damage, to the surrounding material, resulting in highly accurate micro-scale features. Another unique aspect to femtosecond radiation is the ability to create localized structural changes thought nonlinear absorption processes. By scanning the focal point within transparent material, we can create three-dimensional waveguides for biological sensors and optical components. In this report, we utilized the special characteristics of femtosecond laser processing for microfabrication. Special emphasis was placed on the laser-material interactions to gain a science-based understanding of the process and to determine the process parameter space for laser processing of metals and glasses. Two areas were investigated, including laser ablation of ferrous alloys and direct-write optical waveguides and integrated optics in bulk glass. The effects of laser and environmental parameters on such aspects as removal rate, feature size, feature definition, and ablation angle during the ablation process of metals were studied. In addition, the manufacturing requirements for component fabrication including precision and reproducibility were investigated. The effect of laser processing conditions on the optical properties of direct-written waveguides and an unusual laser-induced birefringence in an optically isotropic glass are reported. Several integrated optical devices, including a Y coupler, directional coupler, and Mach-Zehnder interferometer, were made to demonstrate the simplicity and flexibility of this technique in comparison to the conventional waveguide fabrication processes.

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Femtosecond laser-pulse-induced birefringence in optically isotropic glass

Journal of Applied Physics

Yang, Pin Y.; Burns, George B.; Guo, Junpeng; Luk, Ting S.; Vawter, Gregory A.

The optical birefringence in an isotropic glass medium was created by using a regeneratively amplified Ti:sapphire femtosecond laser. The regions between two crossed polarizers modified by the femtosecond laser shows bright transmission with respect to the dark background of the isotropic glass. It was found that the angular dependence of transmission through the laser-modified region was consistent with that of an optically birefringent material. It was also observed that the optical axes of laser-induced birefringence can be controlled by the polarization direction of the femtosecond laser.

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Photonic encryption using all optical logic

Tang, Jason D.; Tang, Jason D.; Tarman, Thomas D.; Pierson, Lyndon G.; Blansett, Ethan B.; Vawter, Gregory A.; Robertson, Perry J.; Schroeppel, Richard C.

With the build-out of large transport networks utilizing optical technologies, more and more capacity is being made available. Innovations in Dense Wave Division Multiplexing (DWDM) and the elimination of optical-electrical-optical conversions have brought on advances in communication speeds as we move into 10 Gigabit Ethernet and above. Of course, there is a need to encrypt data on these optical links as the data traverses public and private network backbones. Unfortunately, as the communications infrastructure becomes increasingly optical, advances in encryption (done electronically) have failed to keep up. This project examines the use of optical logic for implementing encryption in the photonic domain to achieve the requisite encryption rates. In order to realize photonic encryption designs, technology developed for electrical logic circuits must be translated to the photonic regime. This paper examines two classes of all optical logic (SEED, gain competition) and how each discrete logic element can be interconnected and cascaded to form an optical circuit. Because there is no known software that can model these devices at a circuit level, the functionality of the SEED and gain competition devices in an optical circuit were modeled in PSpice. PSpice allows modeling of the macro characteristics of the devices in context of a logic element as opposed to device level computational modeling. By representing light intensity as voltage, 'black box' models are generated that accurately represent the intensity response and logic levels in both technologies. By modeling the behavior at the systems level, one can incorporate systems design tools and a simulation environment to aid in the overall functional design. Each black box model of the SEED or gain competition device takes certain parameters (reflectance, intensity, input response), and models the optical ripple and time delay characteristics. These 'black box' models are interconnected and cascaded in an encrypting/scrambling algorithm based on a study of candidate encryption algorithms. We found that a low gate count, cascadable encryption algorithm is most feasible given device and processing constraints. The modeling and simulation of optical designs using these components is proceeding in parallel with efforts to perfect the physical devices and their interconnect. We have applied these techniques to the development of a 'toy' algorithm that may pave the way for more robust optical algorithms. These design/modeling/simulation techniques are now ready to be applied to larger optical designs in advance of our ability to implement such systems in hardware.

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Investigation of 2D laterally dispersive photonic crystal structures : LDRD 33602 final report

Vawter, Gregory A.; Peters, D.W.; Wendt, J.R.; Hadley, G.R.; Vawter, Gregory A.; Peake, Gregory M.; Guo, Junpeng; Subramania, Ganapathi S.

Artificially structured photonic lattice materials are commonly investigated for their unique ability to block and guide light. However, an exciting aspect of photonic lattices which has received relatively little attention is the extremely high refractive index dispersion within the range of frequencies capable of propagating within the photonic lattice material. In fact, it has been proposed that a negative refractive index may be realized with the correct photonic lattice configuration. This report summarizes our investigation, both numerically and experimentally, into the design and performance of such photonic lattice materials intended to optimize the dispersion of refractive index in order to realize new classes of photonic devices.

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Developments in Pursuit of a Micro-Optic Gyroscope

Vawter, Gregory A.; Zubrzycki, Walter J.; Peake, Gregory M.; Alford, Charles A.; Hargett, Terry H.; Lacy-Salters, Betty J.; Hudgens, James J.

Rotation sensors (gyros) and accelerometers are essential components for all precision-guided weapons and autonomous mobile surveillance platforms. MEMS gyro development has been based primarily on the properties of moving mass to sense rotation and has failed to keep pace with the concurrent development of MEMS accelerometers because the reduction of size and therefore mass is substantially more detrimental to the performance of gyros than to accelerometers. A small ({approx}0.2 cu in), robust ({approx}20,000g), inexpensive ({approx}$500), tactical grade performance ({approx}10-20 deg/hr.) gyro is vital for the successful implementation of the next generation of ''smart'' weapons and surveillance apparatus. The range of applications (relevant to Sandia's mission) that are substantially enhanced in capability or enabled by the availability of a gyro possessing the above attributes includes nuclear weapon guidance, fuzing, and safing; synthetic aperture radar (SAR) motion compensation; autonomous air and ground vehicles; gun-launched munitions; satellite control; and personnel tracking. For example, a gyro of this capability would open for consideration more fuzing options for earth-penetration weapons. The MEMS gyros currently available are lacking in one or more of the aforementioned attributes. An integrated optical gyro, however, possesses the potential of achieving all desired attributes. Optical gyros use the properties of light to sense rotation and require no moving mass. Only the individual optical elements required for the generation, detection, and control of light are susceptible to shock. Integrating these elements immensely enhances the gyro's robustness while achieving size and cost reduction. This project's goal, a joint effort between organizations 2300 and 1700, was to demonstrate an RMOG produced from a monolithic photonic integrated circuit coupled with a SiON waveguide resonator. During this LDRD program, we have developed the photonic elements necessary for a resonant micro-optical gyro. We individually designed an AlGaAs distributed Bragg reflector laser; GaAs phase modulator and GaAs photodiode detector. Furthermore, we have fabricated a breadboard gyroscope, which was used to confirm modeling and evaluate signal processing and control circuits.

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Photonics Integration Devices and Technologies

Vawter, Gregory A.; Lin, Shawn-Yu L.; Sullivan, Charles T.; Zubrzycki, Walter J.; Chow, Weng W.; Allerman, A.A.; Wendt, J.R.

We have used selective AlGaAs oxidation, dry-etching, and high-gain semiconductor laser simulation to create new in-plane lasers with interconnecting passive waveguides for use in high-density photonic circuits and future integration of photonics with electronics. Selective oxidation and doping of semiconductor heterostructures have made vertical cavity surface emitting lasers (VCSELs) into the world's most efficient low-power lasers. We apply oxidation technology to improve edge-emitting lasers and photonic-crystal waveguides, making them suitable for monolithic integrated microsystems. Two types of lasers are investigated: (1) a ridge laser with resonant coupling to an output waveguide; (2) a selectively-oxidized laser with a low active volume and potentially sub-milliAmp threshold current. Emphasis is on development of high-performance lasers suited for monolithic integration with photonic circuit elements.

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Fabrication of Diffractive Optical Elements for an Integrated Compact Optical-MEMS Laser Scanner

Journal of Vacuum Science and Technology B

Wendt, J.R.; Vawter, Gregory A.; Spahn, Olga B.; Sweatt, W.C.; Warren, M.E.; Reyes, David N.

The authors describe the microfabrication of a multi-level diffractive optical element (DOE) onto a micro-electromechanical system (MEMS) as a key element in an integrated compact optical-MEMS laser scanner. The DOE is a four-level off-axis microlens fabricated onto a movable polysilicon shuttle. The microlens is patterned by electron beam lithography and etched by reactive ion beam etching. The DOE was fabricated on two generations of MEMS components. The first generation design uses a shuttle suspended on springs and displaced by a linear rack. The second generation design uses a shuttle guided by roller bearings and driven by a single reciprocating gear. Both the linear rack and the reciprocating gear are driven by a microengine assembly. The compact design is based on mounting the MEMS module and a vertical cavity surface emitting laser (VCSEL) onto a fused silica substrate that contains the rest of the optical system. The estimated scan range of the system is {+-}4{degree} with a spot size of 0.5 mm.

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Semiconductor e-h plasma lasers

Zutavern, Fred J.; Baca, A.G.; Chow, Weng W.; Hafich, Michael J.; Hjalmarson, Harold P.; Loubriel, Guillermo M.; Mar, Alan M.; O'Malley, Martin W.; Vawter, Gregory A.

A new type of GaAs laser is based on the electron-hole plasma in a current filament and is not limited in size by p-n junctions. High energy, electrically controlled, compact, short-pulse lasers are useful for: active optical sensors (LADAR, range imaging, imaging through clouds, dust, smoke, or turbid water), direct optical ignition of fuels and explosives, optical recording, and micro-machining. The authors present a new class of semiconductor laser that can potentially produce much more short pulse energy than conventional (injection-pumped) semiconductor lasers (CSL) because this new laser is not limited in volume or aspect ratio by the depth of a p-n junction. They have tested current filament semiconductor lasers (CFSL) that have produced 75nJ of 890nm radiation in 1.5ns (50W peak), approximately ten times more energy than ISL. These lasers are created from current filaments in semi-insulating GaAs and, in contrast to CSL, are not based on current injection. Instead, low-field avalanche carrier generation produces a high-density, charge-neutral plasma channel with the required carrier density distribution for lasing. They have observed filaments as long as 3.4cm and several hundred microns in diameter in the high gain GaAs photoconductive switches. Their smallest dimension can be more than 100 times the carrier diffusion length in GaAs. This paper will report spectral narrowing, lasing thresholds, beam divergence, temporal narrowing, and energies which imply lasing for several configurations of CFSL. It will also discuss active volume scaling based on recent high current tests.

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Integration of optoelectronics and MEMS by free-space micro-optics

Warren, M.E.; Sniegowski, Jeffry J.; Spahn, Olga B.; Sweatt, W.C.; Shul, Randy J.; Wendt, J.R.; Vawter, Gregory A.; Reyes, David N.; Rodgers, Murray S.

This report represents the completion of a three-year Laboratory-Directed Research and Development (LDRD) program to investigate combining microelectromechanical systems (MEMS) with optoelectronic components as a means of realizing compact optomechanical subsystems. Some examples of possible applications are laser beam scanning, switching and routing and active focusing, spectral filtering or shattering of optical sources. The two technologies use dissimilar materials with significant compatibility problems for a common process line. This project emphasized a hybrid approach to integrating optoelectronics and MEMS. Significant progress was made in developing processing capabilities for adding optical function to MEMS components, such as metal mirror coatings and through-vias in the substrate. These processes were used to demonstrate two integration examples, a MEMS discriminator driven by laser illuminated photovoltaic cells and a MEMS shutter or chopper. Another major difficulty with direct integration is providing the optical path for the MEMS components to interact with the light. The authors explored using folded optical paths in a transparent substrate to provide the interconnection route between the components of the system. The components can be surface-mounted by flip-chip bonding to the substrate. Micro-optics can be fabricated into the substrate to reflect and refocus the light so that it can propagate from one device to another and them be directed out of the substrate into free space. The MEMS components do not require the development of transparent optics and can be completely compatible with the current 5-level polysilicon process. They report progress on a MEMS-based laser scanner using these concepts.

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Highly-Efficient Buried-Oxide-Waveguide Laser by selective Oxidation

IEEE Photonics Technology Letters

Vawter, Gregory A.; Spahn, Olga B.; Allerman, A.A.

An edge-emitting buried-oxide waveguide (BOW) laser structure employing lateral selective oxidation of AlGaAs layers above and below the active region for waveguiding and current confinement is presented. This laser configuration has the potential for very small lateral optical mode size and high current confinement and is well suited for integrated optics applications where threshold current and overall efficiency are paramount. Optimization of the waveguide design, oxide layer placement, and bi-parabolic grading of the heterointerfaces on both sides of the AlGaAs oxidation layers has yielded 95% external differential quantum efficiency and 40% wall-plug efficiency from a laser that is very simple to fabricate and does not require epitaxial regrowth of any kind.

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Three-dimensional control of light in a two-dimensional photonic crystal slab

Nature

Allerman, A.A.; Lin, Shawn-Yu L.; Lin, Shawn-Yu L.; Wendt, J.R.; Vawter, Gregory A.; Zubrzycki, Walter J.

A two-dimensional (2D) photonic crystal is an attractive alternative and complimentary to its 3D counterpart, due to fabrication simplicity. A 2D crystal, however, confines light only in the 2D plane, but not in the third direction, the z-direction. Earlier experiments show that such a 2D system can exist, providing that the boundary effect in z-direction is negligible and that light is collimated in the 2D plane. Nonetheless, the usefulness of such 2D crystals is limited because they are incapable of guiding light in z-direction, which leads to diffraction loss. This drawback presents a major obstacle for realizing low-loss 2D crystal waveguides, bends and thresholdless lasers. A recent theoretical calculation, though, suggests a novel way to eliminate such a loss with a 2D photonic crystal slab. The concept of a lightcone is introduced as a criterion for fully guiding and controlling light. Although the leaky modes of a crystal slab have been studied, there have until now no experimental reports on probing its guided modes and band gaps. In this paper, a waveguide-coupled 2D photonic crystal slab is successfully fabricated from a GaAs/Al{sub x}O{sub y} material system and its intrinsic transmission properties are studied. The crystal slab is shown to have a strong 2D band gap at {lambda} {approximately} 1.5 {micro}m. Light attenuates as much as {approximately}5dB per period in the gap, the strongest ever reported for any 2D photonic crystal in optical {lambda}. More importantly, for the first time, the crystal slab is shown to be capable of controlling light fully in all three-dimensions. The lightcone criterion is also experimentally confirmed.

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Agile dry etching of compound semiconductors for science-based manufacturing using in-situ process control

Ashby, Carol I.; Vawter, Gregory A.; Zubrzycki, Walter J.; Breiland, William G.; Bruskas, Larry A.; Woodworth, Joseph R.; Hebner, Gregory A.

In-situ optical diagnostics and ion beam diagnostics for plasma-etch and reactive-ion-beam etch (RIBE) tools have been developed and implemented on etch tools in the Compound Semiconductor Research Laboratory (CSRL). The optical diagnostics provide real-time end-point detection during plasma etching of complex thin-film layered structures that require precision etching to stop on a particular layer in the structure. The Monoetch real-time display and analysis program developed with this LDRD displays raw and filtered reflectance signals that enable an etch system operator to stop an etch at the desired depth within the desired layer. The ion beam diagnostics developed with this LDRD will permit routine analysis of critical ion-beam profile characteristics that determine etch uniformity and reproducibility on the RIBE tool.

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Advanced laser diodes for sensing applications

Vawter, Gregory A.; Mar, Alan M.; Chow, Weng W.; Allerman, A.A.

The authors have developed diode lasers for short pulse duration and high peak pulse power in the 0.01--100.0 m pulsewidth regime. A primary goal of the program was producing up to 10 W while maintaining good far-field beam quality and ease of manufacturability for low cost. High peak power, 17 W, picosecond pulses have been achieved by gain switching of flared geometry waveguide lasers and amplifiers. Such high powers area world record for this type of diode laser. The light emission pattern from diode lasers is of critical importance for sensing systems such as range finding and chemical detection. They have developed a new integrated optical beam transformer producing rib-waveguide diode lasers with a symmetric, low divergence, output beam and increased upper power limits for irreversible facet damage.

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68 Results
68 Results