Publications

The purpose of this project was to do some preliminary studies and process development on electroactive polymers to be used for tunable optical elements and MEMS actuators. Working in collaboration between Sandia National Labs and The University of Illinois Urbana-Champaign, we have successfully developed a process for applying thin films of poly (vinylidene fluoride) (PVDF) onto glass substrates and patterning these using a novel stamping technique. We observed actuation in these structures in static and dynamic measurements. Further work is needed to characterize the impact that this approach could have on the field of tunable optical devices for sensing and communication.

Abstract not provided.

Nano-electromechanical oscillators (NEMOs), capacitively-coupled radio frequency (RF) MEMS switches incorporating dissipative dielectrics, new processing technologies for tetrahedral amorphous carbon (ta-C) films, and scientific understanding of dissipation mechanisms in small mechanical structures were developed in this project. NEMOs are defined as mechanical oscillators with critical dimensions of 50 nm or less and resonance frequencies approaching 1 GHz. Target applications for these devices include simple, inexpensive clocks in electrical circuits, passive RF electrical filters, or platforms for sensor arrays. Ta-C NEMO arrays were used to demonstrate a novel optomechanical structure that shows remarkable sensitivity to small displacements (better than 160 fm/Hz {sup 1/2}) and suitability as an extremely sensitive accelerometer. The RF MEMS capacitively-coupled switches used ta-C as a dissipative dielectric. The devices showed a unipolar switching response to a unipolar stimulus, indicating the absence of significant dielectric charging, which has historically been the major reliability issue with these switches. This technology is promising for the development of reliable, low-power RF switches. An excimer laser annealing process was developed that permits full in-plane stress relaxation in ta-C films in air under ambient conditions, permitting the application of stress-reduced ta-C films in areas where low thermal budget is required, e.g. MEMS integration with pre-existing CMOS electronics. Studies of mechanical dissipation in micro- and nano-scale ta-C mechanical oscillators at room temperature revealed that mechanical losses are limited by dissipation associated with mechanical relaxation in a broad spectrum of defects with activation energies for mechanical relaxation ranging from 0.35 eV to over 0.55 eV. This work has established a foundation for the creation of devices based on nanomechanical structures, and outstanding critical research areas that need to be addressed for the successful application of these technologies have been identified.

The goal of this LDRD project was to evaluate the possibilities of utilizing Stochastic resonance in micromechanical sensor systems as a means for increasing signal to noise for physical sensors. A careful study of this field reveals that in the case of a single sensing element, stochastic resonance offers no real advantage. We have, however, identified a system that can utilize very similar concepts to stochastic resonance in order to achieve an arrayed sensor system that could be superior to existing technologies in the field of inertial sensors, and could offer a very low power technique for achieving navigation grade inertial measurement units.

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