Publications

The development of Pb-free solutions for the highreliability electronics community necessitates the consideration of hybrid microcircuit (HMC) products. This study used a test vehicle that included both plastic and ceramic packages as well as leaded and area-array solder joints on an alumina substrate. The conductor was a Ag-Pd thick film layer. The shear strength was measured for interconnections made with 63Sn-37Pb (wt.%, abbreviated Sn-Pb) and 95.5Sn-3.0Ag-0.5Cu (Sn-Ag-Cu) solders as a function of isothermal aging, thermal cycling, and thermal shock environments. The area-array packages indicated that solder joint fatigue was not altered significantly in a forward compatibility situation (i.e., Sn-Pb balls and a Sn-Ag-Cu assembly process). Local CTE mismatch fatigue strains are important for solder joints connecting ceramic area array packages to ceramic substrates. The gull-wing lead, SOT plastic package solder joints assembled with the Sn-Ag-Cu solder exhibit a greater strength loss under temperature cycling than did the corresponding Sn-Pb interconnections. Thermal shock is more detrimental to Sn-Pb HMC solder joints than are the equivalent number of thermal cycles. Copyright 2012 ASM International® All rights reserved.

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Abstract not provided.

Low Temperature Cofired Ceramic (LTCC) has proven to be an enabling medium for microsystem technologies, because of its desirable electrical, physical, and chemical properties coupled with its capability for rapid prototyping and scalable manufacturing of components. LTCC is viewed as an extension of hybrid microcircuits, and in that function it enables development, testing, and deployment of silicon microsystems. However, its versatility has allowed it to succeed as a microsystem medium in its own right, with applications in non-microelectronic meso-scale devices and in a range of sensor devices. Applications include silicon microfluidic ''chip-and-wire'' systems and fluid grid array (FGA)/microfluidic multichip modules using embedded channels in LTCC, and cofired electro-mechanical systems with moving parts. Both the microfluidic and mechanical system applications are enabled by sacrificial volume materials (SVM), which serve to create and maintain cavities and separation gaps during the lamination and cofiring process. SVMs consisting of thermally fugitive or partially inert materials are easily incorporated. Recognizing the premium on devices that are cofired rather than assembled, we report on functional-as-released and functional-as-fired moving parts. Additional applications for cofired transparent windows, some as small as an optical fiber, are also described. The applications described help pave the way for widespread application of LTCC to biomedical, control, analysis, characterization, and radio frequency (RF) functions for macro-meso-microsystems.

The design, fabrication, and performance of a planar microbattery made from a silicon wafer with a bonded lid are presented. The battery is designed with two compartments, separated by four columns of micro-posts. These posts are 3 or 5 micrometers in diameter. The posts permit transport of liquid electrolyte, but stop particles of battery material from each compartment from mixing. The anode and cathode battery compartments, the posts, fill holes, and conductive vias are all made using high-aspect-ratio reactive ion (Bosch) etching. After the silicon wafer is completed, it is anodically bonded or adhesive bonded to a Pyrex{reg_sign} wafer lid. The battery materials are made from micro-disperse particles that are 3-5 micrometers in diameter. The lithium-ion chemistry is microcarbon mesobeads and lithium cobalt oxide. The battery capacity is 1.83 micro-amp-hrs/cm{sup 2} at a discharge rate of 25 microamps.