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Substrate removal for ultra efficient silicon heater-modulators

Martinez, Nicolas J.D.; DeRose, Christopher T.; Jarecki, Robert L.; Starbuck, Andrew L.; Pomerene, Andrew P.; Trotter, Douglas C.; Lentine, Anthony L.

We present our experimental results of ultra efficient (up to 2.16 nm/mW) thermally tunable modulators with n-Type heaters and the Si substrate removed. To our knowledge, this is the most efficient thermally tunable modulator demonstrated at 1550nm to date. We include results of externally heated modulators with commensurate performance enhancements through substrate removal.