Publications

Sub-bandgap light-induced carrier generation at room temperature in silicon carbide MOS capacitors

DasGupta, Sandeepan D.; Armstrong, Andrew A.; Kaplar, Robert K.; Marinella, Matthew J.; Brock, Reinhard; Smith, Mark A.; Atcitty, Stanley A.

Carrier generation characteristics in n-type substrate SiC MOS capacitors induced by sub-bandgap energy light are reported. The generation rate is high enough to create an inversion layer in ∼20 minutes with monochromatic light (front side illumination) of energy 2.1 eV (intensity ∼5×10 16 cm-2s-1) in 4H-SiC for electric fields smaller than 1 MV/cm. Generation and recovery results strongly indicate involvement of a metastable defect whose efficiency as a generation center increases under hole-rich and decreases under electron-rich conditions. The generation dependence on bias history and light energy shows the defect to have properties consistent with the metastable silicon vacancy / carbon vacancy-antisite complex (VSi/Vc-CSi). © (2012) Trans Tech Publications.