Publications
Stabilization of ferroelectric phase of Hf0.6Zr0.4O2 on NbN and Nb [slides]
This work demonstrated both NbN and Nb make good electrodes for stabilizing orthorhombic phase of Hf0.6Zr0.4O2 ferroelectric films. Wake up are < 100 cycles. Pr can be as high as 30 µC/cm2 - respectively 14 and 18 µC/cm2 here. Further, capacitance suggests an orthorhombic phase can be stabilized. Addition of a linear dielectric under modest thickness can tune the Pr and reduce leakage.