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Solventless sol-gel chemistry through ring-opening polymerization of bridged disilaoxacyclopentanes

Rahimian, Kamyar R.; Loy, Douglas A.

A novel alkylene-bridged disilaoxacyclopentanes were synthesized through the same methodology utilized in the synthesis of phenylene-bridged disilaoxacyclopentane. Disilaoxacyclopentanes were successfully polymerized using photo-acid generators. Furthermore, it was also been able to apply thin films of these materials to different substrates. Successful ring open polymerization (ROP) of these materials using photo-acid generators should allow to use these materials for applications such as conformal coatings and microlithography.