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Silicon Quantum Dots with Counted Antimony Donor Implants

Singh, Meenakshi S.; Pacheco, Jose L.; Perry, Daniel L.; Ten Eyck, Gregory A.; Wendt, J.R.; Pluym, Tammy P.; Dominguez, Jason J.; Manginell, Ronald P.; Luhman, Dwight R.; Bielejec, Edward S.; Lilly, Michael L.; Carroll, Malcolm

Deterministic control over the location and number of donors is crucial to donor spin quantum bits (qubits) in semiconductor based quantum computing. A focused ion beam is used to implant close to quantum dots. Ion detectors are integrated next to the quantum dots to sense the implants. The numbers of ions implanted can be counted to a precision of a single ion. Regular coulomb blockade is observed from the quantum dots. Charge offsets indicative of donor ionization, are observed in devices with counted implants.