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Silicon microring modulator with integrated heater and temperature sensor for thermal control

DeRose, Christopher T.; Watts, Michael W.; Trotter, Douglas C.; Luck, David L.; Nielson, Gregory N.; Young, Ralph W.

The first demonstration of a silicon microring modulator with both an integrated resistive heater and diode-based temperature sensor is shown. The temperature-sensor exhibits a linear response for more than an 85 °C external temperature range. ©2010 Optical Society of America.