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Reduced Dimensionality Lithium Niobate Microsystems

Eichenfield, Matthew S.

The following report describes work performed under the LDRD program at Sandia National Laboratories October 2014 and September 2016. The work presented demonstrates the ability of Sandia Labs to develop state-of-the-art photonic devices based on thin film lithium niobate (LiNbO3 ). Section 1 provides an introduction to integrated LiNbO3 devices and motivation for developing thin film nonlinear optical systems. Section 2 describes the design, fabrication, and photonic performance of thin film optical microdisks fabricated from bulk LiNbO3 using a bulk implantation method developed at Sandia. Sections 3 and 4 describe the development of similar thin film LiNbO3 structures fabricated from LiNbO3 on insulator (LNOI) substrates and our demonstration of optical frequency conversion with state-of-the-art efficiency. Finally, Section 5 describes similar microdisk resonators fabricated from LNOI wafers with a buried metal layer, in which we demonstrate electro-optic modulation.