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Recent Advances in AC-DC Transfer Measurements Using Thin-Film Thermal Converters

Wunsch, Thomas F.; Manginell, Ronald P.; Solomon, Otis M.

New standards for ac current and voltage measurements, thin-film multifunction thermal converters (MJTCS), have been fabricated using thin-film and micro-electro-mechanical systems (MEMS) technology. Improved sensitivity and accuracy over single-junction thermoelements and targeted performance will allow new measurement approaches in traditionally troublesome areas such as the low frequency and high current regimes. A review is presented of new microfabrication techniques and packaging methods that have resulted from a collaborative effort at Sandia National Laboratories and the National Institute of Standards and Technology (MHZ).