Publications

Raman thermometry of an electro-thermal microactuator

Kearney, Sean P.; Phinney, Leslie M.; Baker, Michael S.

Experimentally measured temperature profiles along the micron-scale beam of a working thermal actuator are reported for the first time. Using a surface Raman scattering technique, temperature measurements are obtained in a noncontact fashion with submicron spatial resolution and to within an uncertainty of better than ± 10 K. The experimental data are used to validate computational predictions of the actuator thermal performance with reasonable agreement between the data and predicted temperatures. Copyright © 2005 by ASME.