Publications

Pyroelectric response in crystalline hafnium zirconium oxide (Hf1-xZrxO2) thin films

Smith, Sean S.; Kitahara, A.R.; Rodriguez, Mark A.; Henry, M.D.; Brumbach, Michael T.; Ihlefeld, Jon I.

Pyroelectric coefficients were measured for 20 nm thick crystalline hafnium zirconium oxide (Hf1-xZrxO2) thin films across a composition range of 0 ≤ x ≤ 1. Pyroelectric currents were collected near room temperature under zero applied bias and a sinusoidal oscillating temperature profile to separate the influence of non-pyroelectric currents. The pyroelectric coefficient was observed to correlate with zirconium content, increased orthorhombic/tetragonal phase content, and maximum polarization response. The largest measured absolute value was 48 μCm−2 K−1 for a composition with x = 0.64, while no pyroelectric response was measured for compositions which displayed no remanent polarization (x = 0, 0.91, and 1).