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Probing thermal conductivity of subsurface, amorphous layers in irradiated diamond

Scott, Ethan A.; Braun, Jeffrey L.; Hattar, Khalid M.; Sugar, Joshua D.; Gaskins, John T.; Goorsky, Mark; King, Sean W.; Hopkins, Patrick E.

In this study, we report on the thermal conductivity of amorphous carbon generated in diamond via nitrogen ion implantation (N 3 + at 16.5 MeV). Transmission electron microscopy techniques demonstrate amorphous band formation about the longitudinal projected range, localized approximately 7 μm beneath the sample surface. While high-frequency time-domain thermoreflectance measurements provide insight into the thermal properties of the near-surface preceding the longitudinal projected range depth, a complimentary technique, steady-state thermoreflectance, is used to probe the thermal conductivity at depths which could not otherwise be resolved. Through measurements with a series of focusing objective lenses for the laser spot size, we find the thermal conductivity of the amorphous region to be approximately 1.4 W m-1 K-1, which is comparable to that measured for amorphous carbon films fabricated through other techniques.