Publications

Post-cmos compatible aluminum nitride ring wave guide (RWG) resonators

Wojciechowski, Kenneth W.; Olsson, Roy H.; Tuck, Melanie R.

This work presents a new type of MEMS resonator based on launching an acoustic wave around a ring. Its maximum frequency is set by electrode spacing and can therefore provide a means for developing resonators with center frequencies in the GHz. In addition since the center frequency is dependent on the average radius it is not subject to lithographic process variations in ring width. We have demonstrated several Ring Waveguide (RWG) Resonators with center frequencies at 484 MHz and 1 GHz. In addition we have demonstrated a 4th order filter based on a RWG design.