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Packaging a liquid metal ESD with micro-scale Mercury droplet

Galambos, Paul

A liquid metal ESD is being developed to provide electrical switching at different acceleration levels. The metal will act as both proof mass and electric contact. Mercury is chosen to comply with operation parameters. There are many challenges surrounding the deposition and containment of micro scale mercury droplets. Novel methods of micro liquid transfer are developed to deliver controllable amounts of mercury to the appropriate channels in volumes under 1 uL. Issues of hermetic sealing and avoidance of mercury contamination are also addressed.