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Nitride Electrode Stoichiometry Effects on Ferroelectric Response in Hafnium Zirconium Oxide Thin Films

Ihlefeld, Jon F.; Fields, Shelby S.; Smith, Sean S.; Wolfley, Steven L.; Henry, Michael D.; Sales, Maria G.; Jaszewski, Samantha T.; McDonnell, Stephen J.; Fancher, Chris F.; Davids, Paul D.

Abstract not provided.