Publications

Nanomechanical switch for integration with CMOS logic

Czaplewski, David A.; Patrizi, G.A.; Kraus, Garth K.; Wendt, J.R.; Nordquist, Christopher N.; Wolfley, Steven L.; De Boer, Maarten P.

We designed, fabricated and measured the performance of nanoelectromechanical (NEMS) switches. Initial data are reported with one of the switch designs having a measured switching time of 400 ns and an operating voltage of 5 V. The switches operated laterally with unmeasurable leakage current in the 'off' state. Surface micromachining techniques were used to fabricate the switches. All processing was CMOS compatible. A single metal layer, defined by a single mask step, was used as the mechanical switch layer. The details of the modeling, fabrication and testing of the NEMS switches are reported.