Publications

Nanofabricated SiO{sub 2}-Si-SiO{sub 2} Resonant Tunneling Diodes

Fleming, J.G.; Lin, Shawn-Yu L.

Resonance Tunneling Diodes (RTDs) are devices that can demonstrate very high-speed operation. Typically they have been fabricated using epitaxial techniques and materials not consistent with standard commercial integrated circuits. The authors report here the first demonstration of SiO{sub 2}-Si-SiO{sub 2} RTDs. These new structures were fabricated using novel combinations of silicon integrated circuit processes.