Publications

Multi-frequency aluminum nitride micro-filters for advanced RF communications

Olsson, Roy H.; Wojciechowski, Kenneth W.; Tuck, Melanie R.; Stevens, James E.; Nordquist, Christopher N.

An AlN MEMS resonator technology has been developed, enabling massively parallel filter arrays on a single chip. Low-loss filter banks covering the 10 MHz--10-GHz frequency range have been demonstrated, as has monolithic integration with inductors and CMOS circuitry. The high level of integration enables miniature multi-bandm spectrally aware, and cognitive radios.