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Monte Carlo simulations of multiple scattering effects in ERD measurements

Arstila, K.; Knapp, J.A.; Nordlund, K.; Doyle, Barney L.

Multiple scattering effects in ERD measurements are studied by comparing two Monte Carlo simulation codes, representing different approaches to obtain acceptable statistics, to experimental spectra measured from a HfO2 sample with a time-of-flight-ERD setup. The results show that both codes can reproduce the absolute detection yields and the energy distributions in an adequate way. The effect of the choice of the interatomic potential in multiple scattering effects is also studied. Finally the capabilities of the MC simulations in the design of new measurement setups are demonstrated by simulating the recoil energy spectra from a WCxNy sample with a low energy heavy ion beam. Published by Elsevier B.V.