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Monolithically-integrated MicroChemLab for gas-phase chemical analysis

Shul, Randy J.; Manginell, Ronald P.; Okandan, Murat O.; Kottenstette, Richard K.; Lewis, Patrick R.; Adkins, Douglas R.; Bauer, Joseph M.; Sokolowski, Sara S.

Sandia National Labs has developed an autonomous, hand-held system for sensitive/selective detection of gas-phase chemicals. Through the sequential connection of microfabricated preconcentrators (PC), gas chromatography columns (GC) and a surface acoustic wave (SAW) detector arrays, the MicroChemLab{trademark} system is capable of selective and sensitive chemical detection in real-world environments. To date, interconnection of these key components has primarily been achieved in a hybrid fashion on a circuit board modified to include fluidic connections. The monolithic integration of the PC and GC with a silicon-based acoustic detector is the subject of this work.