Publications
Modeling electrodeposition in LIGA micro-fabrication using an arbitrary Lagrangian-Eulerian formulation for moving-boundary tracking with repeated re-meshing
A predictive multi-dimensional computer model, Lagrangian-Eulerian formulation developed for simulating electrodeposition in LIGA microfabrication was discussed. A Poisson equation that explicitly described electrolyte potential was derived by combining the species mass conservation equations and the electroneutrality constraint. It was observed that pseudo-solid mesh equations that employed an arbitrary-Lagrangian-Eulerian (ALE) formulation were solved in tracking the moving boundary that was present in a LIGA nickel electrodeposition process. By coupling the ALE approach it was easy to follow the entire transient deposition process from start of the deposition till the trench was completely filled up.