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Metrology of 3D nanostructures

Boye, Robert B.

We propose a superresolution technique to resolve dense clusters of blinking emitters. The method relies on two basic assumptions: the emitters are statistically independent, and a model of the imaging system is known. We numerically analyze the performance limits of the method as a function of the emitter density and the noise level. Numerical simulations show that five closely packed emitters can be resolved and localized to a precision of 17nm. The experimental resolution of five quantum dots located within a diffraction limited spot confirms the applicability of this approach.