Material Device and Integration Challenges for High-Frequency Piezoelectric Microresonators
Nordquist, Christopher N.; Henry, Michael J.; Branch, Darren W.; Esteves, Giovanni E.; Siddiqui, Aleem S.; Eichenfield, Matt E.; Reger, Robert W.; Edstrand, Adam E.; Knisely, Katherine K.; Pluym, Tammy P.; Hummel, Gwendolyn H.; Griffin, Benjamin G.
Abstract not provided.