Publications

Mass sensitive, Lorentz-Force actuated, MEMS preconcentrator and chemical sensor

Manginell, Ronald P.; Adkins, Douglas R.; Moorman, Matthew W.; Hadizadeh, Rameen; Copic, Davor; Porter, Daniel; Anderson, John M.; Wheeler, David R.; Pfeifer, Kent B.; Rumpf, Arthur

The mass-sensitive smart preconcentrator (SPC) consists of a Lorentz-Force-actuated MEMS resonator with an integral heater and surface coating for the collection of chemical analytes. Control circuitry is used to drive the SPC to resonance and measure its oscillation frequency. The frequency shift produced by adsorption of analyte on the SPC surface is inversely proportional to the mass of analyte collected. Thus, the SPC can measure when it has collected sufficient analyte for a downstream detection system. The limit of detection (LOD) of the SPC is less than 50 ppb for DMMP (dimethyl-methyl- phosphonate). At 1 ppm, less than 1 second collection of DMMP is sufficient to trigger analysis. An analytical model of operation of the SPC is used to predict the motion of the paddle and the shear modulus of silicon. © The Electrochemical Society.