Publications

Low-Temperature Silicon Epitaxy for Atomic Precision Devices

Anderson, Evan M.; Katzenmeyer, Aaron M.; Luk, Ting S.; Campbell, DeAnna M.; Marshall, Michael T.; Bussmann, Ezra B.; Ohlhausen, J.A.; Lu, Ping L.; Kotula, Paul G.; Ward, Daniel R.; Lu, Tzu-Ming L.; Misra, Shashank M.

Abstract not provided.